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41. 发明专利

JPS51116174A A METHOD FOR PREVENTING DAMAGE OF CENTRIFUGAL EXTRACTER DURING POWER F AILURE 失效
公开(公告)号：JPS51116174A
公开(公告)日：1976-10-13
申请号：JP4033575
申请日：1975-04-04
申请人： HITACHI LTD
发明人： FUJIWARA KIYOSHI , NISHIDA KATSUYASU , KANEKIYO HIROSHI
IPC分类号： B01D11/04
摘要： PURPOSE:A method for preventing damage to a centrifugal extracter during power failure by cutting the installation cost using an uncomplicated mecha nism against power failure and simplifying the post treatment of the treated liquid.

42. 发明专利

JP2001244237A REFRIGERANT PURGE METHOD AND SYSTEM FOR SEMICONDUCTOR MANUFACTURING DEVICE 失效
公开(公告)号：JP2001244237A
公开(公告)日：2001-09-07
申请号：JP2000056048
申请日：2000-02-28
申请人： HITACHI LTD
发明人： KANEKIYO HIROSHI , SUEHIRO MITSURU , FUJIMOTO TETSUO , MATANO KATSUJI
IPC分类号： H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a refrigerant purge method and system for improving efficiency by quickly performing purge operation for maintenance without removing parts for solving the problem that the maintenance requires much time since the parts are removed, and washing operation is made in a separate room for periodical maintenance although a refrigerant circulation means is used for a semiconductor manufacturing device. SOLUTION: In a semiconductor manufacturing device circulating a refrigerant with a cooling chamber, a gas purge means for purging gas to parts in the semiconductor manufacturing device is provided. Also, the switch between the refrigerant circulation and the gas purge is controlled by a remote control means, the purge gas is allowed to flow in a direction opposite the refrigerant circulation, and the refrigerant is unloaded from the parts is the semiconductor manufacturing device for recovery.

43. 发明专利

JP2000269183A APPARATUS FOR PLASMA TREATMENT, AND METHOD FOR MAINTENANCE OF THE APPARATUS FOR PLASMA TREATMENT 失效
公开(公告)号：JP2000269183A
公开(公告)日：2000-09-29
申请号：JP7257799
申请日：1999-03-17
申请人： HITACHI LTD
发明人： MASUDA TOSHIO , KANEKIYO HIROSHI , FUJIMOTO TETSUO , SUEHIRO MITSURU , MATANO KATSUJI , TAKAHASHI NUSHITO
IPC分类号： H01L21/302 , B01J3/02 , C23C16/509 , H01J37/32 , H01L21/00 , H01L21/3065 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To realize an apparatus and a method for plasma treatment which facilitate replacement of parts and an operation for maintenance inside a treatment chamber. SOLUTION: An apparatus for plasma treatment, which has a vacuum vessel, having a treatment chamber 100 formed inside, plasma generating devices 110 and 101 for generating plasma in the treatment chamber 100 and an electrode holding a sample treated in the treatment chamber 100. In this apparatus, a part of the upper wall of the vacuum vessel is made openable and closable, and at least one (110) of components constituting the apparatus is disposed in this openable and closable part. The side inside the treating chamber of the openable and closable part is opened at an angle which is directed upward with the component held thereon, when this part is opened.

44. 发明专利

JP2000260756A DRY ETCHING DEVICE 失效
公开(公告)号：JP2000260756A
公开(公告)日：2000-09-22
申请号：JP6474999
申请日：1999-03-11
申请人： HITACHI LTD
发明人： KANEKIYO HIROSHI , SUEHIRO MITSURU , FUJIMOTO TETSUO
IPC分类号： H01L21/302 , B01J19/08 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a lower electrode mechanism which can hold even a wafer of a large diameter stably, and to introduce refrigerant for wafer cooling to a lower electrode through a central shaft. SOLUTION: A central shaft 2 for causing a lower electrode 4 to move vertically is arranged at a center, the central shaft 2 is provided with a refrigerant flow path 14 for wafer cooling and an outer shaft 5 for causing a wafer to move vertically is arranged in the outside of the central shaft 2. A plurality of wafer-push up pins 6 are arranged in the outer shaft 5 so as to keep the distances between the pins large enough to hold the wafer stably.

45. 发明专利

JPH06242457A REFLECTION TYPE LIQUID CRYSTAL DISPLAY 失效
公开(公告)号：JPH06242457A
公开(公告)日：1994-09-02
申请号：JP3009593
申请日：1993-02-19
申请人： HITACHI LTD
发明人： KANEKIYO HIROSHI , TAKAI MASAO
IPC分类号： G02F1/1345
摘要： PURPOSE:To prevent a situation that the numerical aperture of a screen is lowered as high definition is attained in order to make resolution higher by providing the piercing and connecting part of an electrode, and to prevent the visual easiness of the screen from being impaired because a non-picture element part where wiring is performed becomes a joint when a large screen is obtained by adjoining liquid crystal panels. CONSTITUTION:A liquid crystal layer 8 is sandwiched between a driving substrate 1 having transparent driving electrode picture element 2 and a common substrate 6 having a common electrode 7. The driving electrode piercing and connecting part is provided in the driving electrode picture element 2 on the driving substrate 1, and a driving electrode lead-in wire is provided on a back surface, then the wiring is three-dimensionally performed. A common electrode lead-in wire is also arranged on the back surface by providing a common electrode piercing and connecting part connected to the electrode 7 with conductive adhesive. Thus, the non-picture element part does not exist on the outer periphery of the substrate.

46. 发明专利

JPH05341308A 失效
公开(公告)号：JPH05341308A
公开(公告)日：1993-12-24
申请号：JP15329992
申请日：1992-06-12
申请人： HITACHI LTD
发明人： KANEKIYO HIROSHI , TAKAI MASAO , ISHIZU HISAZUMI
IPC分类号： G02F1/1333 , G02F1/1335 , G02F1/1343 , G02F1/1345
摘要： PURPOSE:To provide the liquid crystal display which does not degrade an opening rate and does not degrade the quality of a screen even if picture elements are formed with high fineness by providing an insulating film between driving electrode picture elements and leader wires and providing this insulating film with through-junctures in such a manner that the driving electrode picture elements and the leader wires conduct. CONSTITUTION:A liquid crystal layer 8 is clamped between a driving glass substrate 1 having the transparent driving electrode picture elements 1 and a common glass substrate 10 having a transparent common electrode 9 which is the counter electrode thereof. The transparent insulating film 4 is provided between the independent driving electrode picture elements 6 and the driving electrode leader wires 2 for connecting the driving electrode picture elements 6 to external wirings. The transparent insulating film 4 is provided with the electrode through-junctures 5 in such a manner that the driving electrode picture elements 6 and the driving electrode leader wires 2 conduct. The driving electrode leader wires 2 are led out to one side of the driving glass substrate 1 to form the driving electrode wiring junctures 3. The surfaces of the driving electrode picture elements 6 are provided with the transparent insulating film 7.

47. 发明专利

JPS63141010A LASER DRILLING DEVICE 失效
公开(公告)号：JPS63141010A
公开(公告)日：1988-06-13
申请号：JP28662586
申请日：1986-12-03
申请人： HITACHI LTD
发明人： KIMURA NOBUO , MIYAKE AKIRA , KANEKIYO HIROSHI
IPC分类号： G02B7/00 , G02B27/00
摘要： PURPOSE:To easily adjust an optical component in an optical path in safety by putting a reference laser in the optical path of a drilling laser only when the optical component is adjusted, and adjusting the optical component in the optical path of the drilling laser. CONSTITUTION:A mirror 11-7 rotates as shown by an arrow and reference laser light changes its optical path from optical paths shown by a solid line and a broken line to an optical path shown by a dashed line to enter the optical path of the drilling laser through a mirror 11-8. In this case, stops 13-1 and 13-2 which vary in the diameter of an opening part corresponding to the beam diameters of the drilling laser and reference laser are installed in the optical path of the drilling laser, and the mirrors 11-7 and 11-8 are used to make the reference laser light incident accurately on the same optical path with the drilling laser.

48. 发明专利

JPS62205779A LASER PROCESSING DEVICE 失效
公开(公告)号：JPS62205779A
公开(公告)日：1987-09-10
申请号：JP4616286
申请日：1986-03-05
申请人： HITACHI LTD
发明人： KANEKIYO HIROSHI , HOSOMI NOBUYUKI , MURAKAMI SEI
IPC分类号： C12N15/09 , C12M1/00 , C12N15/00
摘要： PURPOSE:To prevent danger of laser beam reaching an ocular part, etc., and to process a fine, raw test specimen safely while observing, by irradiating laser beam scanned by a scanning part having an angle of rotation of a scanning mirror restricted to a specific range. CONSTITUTION:A scanning mirror 3 is constructed in such a way that an allowable angle of rotation is restricted in order to make irradiation of laser beam downward by a restricting fitment 7 for angle of rotation and the fitment 7 is attached to a scanner 4. Then, laser beam is introduced to a scanning mirror 1 to adjust an angle of rotation and reflected by another scanner 2, introduced to the scanning mirror 3 and reflected so that a raw test specimen such as animal, vegetable cell, microorganism, etc., on a test specimen stand 5 is irradiated with the laser beam. On the other hand, observing lighting is sent the test specimen from the lower part of the test specimen stand 5 by illumination 6 and the raw test specimen is processed by the laser beam while observing it by an ocular part 8.

49. 发明专利

JPS62191761A METHOD FOR OPERATING LIQUID CHROMATOGRAPH APPARATUS FOR TAKING-OUT IN PARTS 失效
公开(公告)号：JPS62191761A
公开(公告)日：1987-08-22
申请号：JP3302986
申请日：1986-02-19
申请人： HITACHI LTD
发明人： KANEKIYO HIROSHI , NAKAJIMA NOBUYUKI , SONODA HIROSHI
IPC分类号： G01N30/46 , B01D15/08 , G01N30/80
摘要： PURPOSE:To make it possible to efficiently taking out an objective component in parts, by arranging a plurality of columns in parallel and automatically performing the opening and closing of a change-over valve at each preset time so as to take out an objective component in parts corresponding to the separation speed of each column. CONSTITUTION:An eluent 1 and a specimen 5 are supplied to a plurality of columns 7 arranged in parallel and the specimen component is adsorbed by the columns 7. Next, the fractionated specimen is made to flow out from each column 7 to be detected by a detector 8 and a change-over valve 9 is changed over to sent not only the liquid containing an objective component to an objective component receiving tank 12 but also the liquid containing a component other than the objective one to a non-objective component receiving tank 13. At this time, the time required before the objective component is fractionated by the column 7 and eluted therefrom is preliminarily measured with respect to each column 7 and the change-over valve 9 is automatically changed over in matching relation to the timing thereof. Because a plurality of the columns are changed over in matching relation to the specimen fractionating times, the columns different in the time required in the fractionation of the specimen can be effectively used simultaneously and scaling-up can be simply performed.

50. 发明专利

JPS62161490A WORKING METHOD FOR RAW SAMPLE 失效
公开(公告)号：JPS62161490A
公开(公告)日：1987-07-17
申请号：JP58286
申请日：1986-01-08
申请人： HITACHI LTD
发明人： KAWAMOTO MUNEO , HOSOMI NOBUYUKI , KANEKIYO HIROSHI , MURAKAMI SEI , YOSHINAGA SHOJI , KIMURA NOBUO
IPC分类号： C12N1/00 , B23K26/02 , B23K26/04 , C12N5/00 , C12Q1/02
摘要： PURPOSE:To execute the working correctly for the scheduled position of a raw sample by projecting the ray for working by correcting it in case of the projection at the succeeding time by the slipping portion between the projection position obtd. from an image after projection of the ray for working and the calculated position to be worked. CONSTITUTION:A TV camera 9 picks up the image of a raw sample via a microscopic device 10, outputs an image signal, digitizes said signal by A/D 21 and stores it in an image memory 22. A monitor TV 24 displays this contents. An operator indicates the work position of the raw sample displayed on the screen with a light pen 25 with watching a TV 24 and this indicating position is operated inside an arithmetic processing part 23. And in the processing part 23, the contents of the memory 22 is taken in and the position of a spot light is found with its image processing. In this way the processing part 23 outputs a spot position control signal to a spot position control device 7 so as to overlap spot light on said indication position by light pen.

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