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    • 42. 发明申请
    • Methods of Forming Patterns in Semiconductor Constructions, Methods of Forming Container Capacitors, and Methods of Forming Reticles Configured for Imprint Lithography
    • 在半导体结构中形成图案的方法,形成容器电容器的方法和形成用于印刷光刻的网格方法
    • US20120088348A1
    • 2012-04-12
    • US13330973
    • 2011-12-20
    • Gurtej S. Sandhu
    • Gurtej S. Sandhu
    • H01L21/02
    • H01L28/91B82Y10/00B82Y40/00G03F7/0002H01L21/31144H01L27/10852
    • The invention includes methods of forming reticles configured for imprint lithography, methods of forming capacitor container openings, and methods in which capacitor container openings are incorporated into DRAM arrays. An exemplary method of forming a reticle includes formation of a radiation-imageable layer over a material. A lattice pattern is then formed within the radiation-imageable layer, with the lattice pattern defining a plurality of islands of the radiation-imageable layer. The lattice-patterned radiation-imageable layer is utilized as a mask while subjecting the material under the lattice-patterned layer to an etch which transfers the lattice pattern into the material. The etch forms a plurality of pillars which extend only partially into the material, with the pillars being spaced from one another by gaps. The gaps are subsequently narrowed with a second material which only partially fills the gaps.
    • 本发明包括形成用于压印光刻的掩模版的方法,形成电容器容器开口的方法,以及将电容器容器开口并入到DRAM阵列中的方法。 形成掩模版的示例性方法包括在材料上形成可辐射成像层。 然后在可辐射成像层内形成格子图案,其中格子图案限定可辐射成像层的多个岛。 将格子图案的可辐射成像层用作掩模,同时使晶格图案层下的材料经历将晶格图案转移到材料中的蚀刻。 蚀刻形成多个柱,其仅部分地延伸到材料中,柱通过间隙彼此间隔开。 间隙随后仅用部分填充间隙的第二材料变窄。
    • 43. 发明申请
    • Methods of Forming Diodes
    • 形成二极管的方法
    • US20120070973A1
    • 2012-03-22
    • US13305072
    • 2011-11-28
    • Gurtej S. SandhuBhaskar Srinivasan
    • Gurtej S. SandhuBhaskar Srinivasan
    • H01L21/04
    • H01L21/04H01L27/1021H01L27/2418H01L29/1606H01L45/00
    • Some embodiments include methods of forming diodes. A stack may be formed over a first conductive material. The stack may include, in ascending order, a sacrificial material, at least one dielectric material, and a second conductive material. Spacers may be formed along opposing sidewalls of the stack, and then an entirety of the sacrificial material may be removed to leave a gap between the first conductive material and the at least one dielectric material. In some embodiments of forming diodes, a layer may be formed over a first conductive material, with the layer containing supports interspersed in sacrificial material. At least one dielectric material may be formed over the layer, and a second conductive material may be formed over the at least one dielectric material. An entirety of the sacrificial material may then be removed.
    • 一些实施例包括形成二极管的方法。 可以在第一导电材料上形成堆叠。 堆叠可以按升序包括牺牲材料,至少一种电介质材料和第二导电材料。 间隔物可以沿着堆叠的相对侧壁形成,然后可以去除整个牺牲材料以在第一导电材料和至少一种电介质材料之间留下间隙。 在形成二极管的一些实施例中,可以在第一导电材料上形成层,其中包含支撑体的层散布在牺牲材料中。 可以在该层上形成至少一种介电材料,并且可以在该至少一种电介质材料的上方形成第二导电材料。 然后可以去除整个牺牲材料。
    • 45. 发明授权
    • Methods of forming patterns
    • 形成图案的方法
    • US08133664B2
    • 2012-03-13
    • US12397083
    • 2009-03-03
    • Scott SillsGurtej S. SandhuJohn SmytheMing Zhang
    • Scott SillsGurtej S. SandhuJohn SmytheMing Zhang
    • G03F7/26
    • H01L21/0274G03F7/20G03F7/40H01L21/0337H01L21/0338
    • Some embodiments include methods of forming patterns of openings. The methods may include forming spaced features over a substrate. The features may have tops and may have sidewalls extending downwardly from the tops. A first material may be formed along the tops and sidewalls of the features. The first material may be formed by spin-casting a conformal layer of the first material across the features, or by selective deposition along the features relative to the substrate. After the first material is formed, fill material may be provided between the features while leaving regions of the first material exposed. The exposed regions of the first material may then be selectively removed relative to both the fill material and the features to create the pattern of openings.
    • 一些实施例包括形成开口图案的方法。 所述方法可以包括在衬底上形成间隔的特征。 特征可以具有顶部并且可以具有从顶部向下延伸的侧壁。 第一材料可以沿着特征的顶部和侧壁形成。 第一材料可以通过将特征上的第一材料的共形层旋转浇铸而形成,或通过相对于基底的特征的选择性沉积来形成。 在形成第一材料之后,可以在特征之间提供填充材料,同时使第一材料的区域暴露。 然后可以相对于填充材料和特征来选择性地去除第一材料的暴露区域以产生开口图案。
    • 49. 发明申请
    • Nanotube Separation Methods
    • 纳米管分离方法
    • US20120039790A1
    • 2012-02-16
    • US13276150
    • 2011-10-18
    • Gurtej S. Sandhu
    • Gurtej S. Sandhu
    • D01F9/12B82Y40/00
    • B01D21/262B01D43/00B82Y30/00B82Y40/00C01B32/172Y10S977/745Y10S977/746Y10S977/845Y10S977/847
    • A nanotube separation method includes depositing a tag on a nanotube in a nanotube mixture. The nanotube has a defect and the tag deposits at the defect where a deposition rate is greater than on another nanotube in the mixture lacking the defect. The method includes removing the tagged nanotube from the mixture by using the tag. As one option, the tag may contain a ferromagnetic material and the removing may include applying a magnetic field. As another option, the tag may contain an ionic material and the removing may include applying an electric field. As a further option, the tag may contain an atom having an atomic mass greater than the atomic mass of carbon and the removing may include applying a centrifugal force to the nanotube mixture. Any two or more of the indicated removal techniques may be combined.
    • 纳米管分离方法包括在纳米管混合物中的纳米管上沉积标签。 纳米管具有缺陷,并且标记沉积在缺陷处,其中沉积速率大于缺少缺陷的混合物中的另一纳米管上的沉积速率。 该方法包括通过使用标签从混合物中去除标记的纳米管。 作为一种选择,标签可以包含铁磁材料,并且去除可以包括施加磁场。 作为另一选择,标签可以包含离子材料,并且去除可以包括施加电场。 作为另一选择,标签可以包含原子质量大于碳原子质量的原子,并且除去可包括向纳米管混合物施加离心力。 可以组合指示的去除技术中的任何两种或更多种。