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41. 发明授权

US06617587B2 Electron optics for multi-beam electron beam lithography tool 失效
标题翻译：多光束电子束光刻工具的电子光学
公开(公告)号：US06617587B2
公开(公告)日：2003-09-09
申请号：US10243585
申请日：2002-09-12
申请人： N. William Parker , Alan D. Brodie , George Xinsheng Guo , Edward M. Yin , Michael C. Matter
发明人： N. William Parker , Alan D. Brodie , George Xinsheng Guo , Edward M. Yin , Michael C. Matter
IPC分类号： H01J37147
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J37/3177
摘要： A charge particle optical column capable of being used in a high throughput, mutli-column, multi-beam electron beam lithography system is disclosed herein. The column has the following properties: purely electrostatic components; small column footprint (20 mm square); multiple, individually focused charge particle beams; telecentric scanning of all beams simultaneously on a wafer for increased depth of field; and conjugate blanking of the charged particle beams for reduced beam blur. An electron gun is disclosed that uses microfabricated field emission sources and a microfabricated aperture-deflector assembly. The aperture-deflector assembly acts as a perfect lens in focusing, steering and blanking a multipicity of electron beams through the back focal plane of an immersion lens located at the bottom of the column. Beam blanking can be performed using a gating signal to decrease beam blur during writing on the wafer.
摘要翻译：本文公开了一种能够在高通量，多列，多光束电子束光刻系统中使用的电荷粒子光学列。该柱具有以下特性：纯静电成分; 小柱占地面积（20平方米）; 多个单独聚焦的电荷粒子束; 同时在晶圆上同时扫描所有光束以增加景深; 并且用于减少光束模糊的带电粒子束的共轭消隐。公开了一种电子枪，其使用微制造的场致发射源和微制造的孔径偏转器组件。孔径偏转器组件用作聚焦，转向和消隐通过位于塔底部的浸没透镜的后焦平面的多个电子束的完美透镜。可以使用门控信号进行光束消隐，以减少在晶片上写入期间的光束模糊。

42. 发明授权

US09733164B2 Lamella creation method and device using fixed-angle beam and rotating sample stage 有权
公开(公告)号：US09733164B2
公开(公告)日：2017-08-15
申请号：US13493735
申请日：2012-06-11
申请人： Andrew B. Wells , N. William Parker , Clive D. Chandler , Mark W. Utlaut
发明人： Andrew B. Wells , N. William Parker , Clive D. Chandler , Mark W. Utlaut
IPC分类号： H01J37/26 , H01J37/20 , G01N1/32 , H01J37/302 , H01J37/305
CPC分类号： G01N1/32 , H01J37/3023 , H01J37/3056 , H01J2237/31745
摘要： A system for creating a substantially planar face in a substrate, the system including directing one or more beams at a first surface of a substrate to remove material from a first location, the beam being offset from a normal to the first surface by a curtaining angle; sweeping the one or more beams in a plane that is perpendicular to the first surface to mill one or more initial cuts, the initial cuts exposing a second surface that is substantially perpendicular to the first surface; rotating the substrate about an axis other than an axis normal to the first beam or parallel to the first beam; directing the first beam at the second surface to remove additional material from the substrate without changing the curtaining angle; and scanning the one or more beams in across the second surface to mill one or more finishing cuts.

43. 发明授权

US09591735B2 High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped 有权
标题翻译：电感耦合等离子体离子源与未被主动泵送的液体进行高压隔离
公开(公告)号：US09591735B2
公开(公告)日：2017-03-07
申请号：US14128030
申请日：2012-06-21
申请人： Sean Kellogg , Andrew B. Wells , James B. McGinn , N. William Parker , Mark W. Utlaut
发明人： Sean Kellogg , Andrew B. Wells , James B. McGinn , N. William Parker , Mark W. Utlaut
IPC分类号： H05H1/24 , H01J27/16 , H01J37/08 , H01J37/32 , H05H1/46
CPC分类号： H05H1/24 , H01J27/16 , H01J37/08 , H01J37/321 , H01J2237/002 , H01J2237/061 , H01J2237/0817 , H01J2237/31749 , H05H1/46 , H05H2001/4652
摘要： An inductively-coupled plasma source for a focused charged particle beam system includes a plasma chamber and a fluid that is not actively pumped surrounding the plasma chamber for providing high voltage isolation between the plasma chamber and nearby parts which are at ground potential, such as a conductive shield. One or more cooling devices cool the plasma chamber by using evaporative cooling and heat pipes to dissipate the heat from the plasma chamber into a surrounding environment.
摘要翻译：用于聚焦带电粒子束系统的电感耦合等离子体源包括等离子体腔室和不被主动地泵送在等离子体室周围的流体，以在等离子体室和处于地电位的附近部件之间提供高电压隔离，例如导电屏蔽。一个或多个冷却装置通过使用蒸发冷却和热管将等离子体室的热量散发到周围环境中来冷却等离子体室。

44. 发明授权

US09053895B2 System for attachment of an electrode into a plasma source 有权
标题翻译：用于将电极附接到等离子体源中的系统
公开(公告)号：US09053895B2
公开(公告)日：2015-06-09
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
IPC分类号： H01J1/02 , H01J37/08 , H01J37/04 , H01J27/16
CPC分类号： H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
摘要翻译：用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。

45. 发明授权

US08987678B2 Encapsulation of electrodes in solid media 有权
标题翻译：电极在固体介质中的封装
公开(公告)号：US08987678B2
公开(公告)日：2015-03-24
申请号：US13437599
申请日：2012-04-02
申请人： Sean Kellogg , N. William Parker , Mark W. Utlaut , Anthony Graupera
发明人： Sean Kellogg , N. William Parker , Mark W. Utlaut , Anthony Graupera
IPC分类号： G21K1/08 , H01J27/16 , H01J37/08 , H01J37/32 , H05H1/28 , H05H1/30 , H05H1/46
CPC分类号： H01J27/16 , H01J37/08 , H01J37/321 , H01J2237/002 , H01J2237/061 , H01J2237/0817 , H01J2237/31749 , H05H1/28 , H05H1/30 , H05H1/46 , H05H2001/4652 , H05H2001/4682
摘要： An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
摘要翻译：用于聚焦带电粒子束系统的电感耦合等离子体源包括提供改进的电隔离和减小的电容RF耦合的导电屏蔽以及绝缘和冷却等离子体室的介电流体。导电屏蔽可以封闭在固体电介质中。电介质流体可以由泵循环或不被泵循环。热管可用于冷却介电流体。

46. 发明申请

US20120305127A1 Method and Structure for Prevention of Incorrect Fueling Operations for Diesel-Powered Vehicles 有权
标题翻译：柴油机车辆不正确加油操作的方法与结构
公开(公告)号：US20120305127A1
公开(公告)日：2012-12-06
申请号：US13153180
申请日：2011-06-03
申请人： Curtis Roys , N. William Parker
发明人： Curtis Roys , N. William Parker
IPC分类号： B65B3/04 , B23P19/00
CPC分类号： B67D7/344 , B60K15/0406 , B60K2015/0461 , B60K2015/0483
摘要： A method and structure are described for preventing the accidental introduction of gasoline into the fuel system of a diesel-powered vehicle. In a first preferred embodiment, a gasoline fuel nozzle is configured with a magnet, such as magnetic strips, and the entrance to a fill tube of a diesel-powered is configured with a magnetic field sensor ring. When an incorrect fueling operation, such as the introduction of gasoline into the fuel tank of the diesel-powered vehicle, is attempted the sensor ring alerts the operator visually and/or audibly before fueling starts, thereby preventing incorrect fueling. In alternative embodiments, sensing of an attempted incorrect fueling operation may require only the sensor ring.
摘要翻译：描述了一种用于防止汽油意外引入柴油动力车辆的燃料系统中的方法和结构。在第一优选实施例中，汽油燃料喷嘴配置有诸如磁条的磁体，并且柴油动力的填充管的入口配置有磁场传感器环。当尝试不正确的加油操作，例如将汽油引入柴油动力车辆的燃料箱时，传感器环在加油开始之前可视地和/或可听见地警告操作者，从而防止不正确的加油。在替代实施例中，尝试不正确的加油操作的感测可能仅需要传感器环。

47. 发明申请

US20120261587A1 Encapsulation of Electrodes in Solid Media for use in conjunction with Fluid High Voltage Isolation 审中-公开
标题翻译：固体介质中的电极封装，与流体高压隔离结合使用
公开(公告)号：US20120261587A1
公开(公告)日：2012-10-18
申请号：US13437599
申请日：2012-04-02
申请人： Sean Kellogg , N. William Parker , Mark W. Utlaut , Anthony Graupera
发明人： Sean Kellogg , N. William Parker , Mark W. Utlaut , Anthony Graupera
IPC分类号： G21K5/04
CPC分类号： H01J27/16 , H01J37/08 , H01J37/321 , H01J2237/002 , H01J2237/061 , H01J2237/0817 , H01J2237/31749 , H05H1/28 , H05H1/30 , H05H1/46 , H05H2001/4652 , H05H2001/4682
摘要： An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
摘要翻译：用于聚焦带电粒子束系统的电感耦合等离子体源包括提供改进的电隔离和减小的电容RF耦合的导电屏蔽以及绝缘和冷却等离子体室的介电流体。导电屏蔽可以封闭在固体电介质中。电介质流体可以由泵循环或不被泵循环。热管可用于冷却介电流体。

48. 发明申请

US20120261565A1 WIDE APERATURE WIEN EXB MASS FILTER 有权
公开(公告)号：US20120261565A1
公开(公告)日：2012-10-18
申请号：US13089875
申请日：2011-04-19
申请人： David Tuggle , N. William Parker
发明人： David Tuggle , N. William Parker
IPC分类号： H01J49/22 , H01J49/20
CPC分类号： H01J37/05 , H01J2237/31749
摘要： An ExB Wien mass filter provides an independently-adjustable electric field combined with the dipole electric field required for mass separation. The independently adjustable electric field can be used provide a larger optical aperture, to correct astigmatism and to deflect the beam in direction parallel and/or perpendicular to the magnetic field.
摘要翻译： ExB维恩质量过滤器提供独立可调的电场与质量分离所需的偶极电场相结合。可独立调节的电场可以提供更大的光学孔径，以校正散光并使光束在与磁场平行和/或垂直的方向上偏转。

49. 发明授权

US08242457B2 Charged particle optics with azimuthally-varying third-order aberrations for generation of shaped beams 有权
标题翻译：具有方位变化的三阶像差的带电粒子光学器件用于产生成形梁
公开(公告)号：US08242457B2
公开(公告)日：2012-08-14
申请号：US12050035
申请日：2008-03-17
申请人： N. William Parker
发明人： N. William Parker
IPC分类号： G21K1/08
CPC分类号： H01J37/153 , B82Y10/00 , B82Y40/00 , H01J37/3007 , H01J37/3023 , H01J37/3174 , H01J2237/1534 , H01J2237/303 , H01J2237/30494
摘要： A charged particle shaped beam column includes: a charged particle source; a gun lens configured to provide a charged particle beam approximately parallel to the optic axis of the column; an objective lens configured to form the charged particle shaped beam on the surface of a substrate, wherein the disk of least confusion of the objective lens does not coincide with the surface of the substrate; an optical element with 8N poles disposed radially symmetrically about the optic axis of the column, the optical element being positioned between the condenser lens and the objective lens, wherein N is an integer greater than or equal to 1; and a power supply configured to apply excitations to the 8N poles of the optical element to provide an octupole electromagnetic field. The octupole electromagnetic field is configured to induce azimuthally-varying third-order deflections to the beam trajectories passing through the 8N-pole optical element. By controlling the excitation of the 8N poles a shaped beam, such as a square beam, can be formed at the surface of the substrate. The 8N-pole element can be magnetic or electrostatic.
摘要翻译：带电粒子束柱包括：带电粒子源; 枪式透镜，其构造成提供近似平行于所述柱的光轴的带电粒子束; 配置为在基板的表面上形成带电粒子束的物镜，其中所述物镜的最小混淆盘与所述基板的表面不一致; 具有8N磁极的光学元件，其围绕所述列的光轴径向对称设置，所述光学元件位于所述聚光透镜和所述物镜之间，其中N是大于或等于1的整数; 以及电源，被配置为对所述光学元件的8N极施加激励以提供八极电磁场。八极电磁场被配置为引起通过8N极光学元件的光束轨迹的方位角变化的三阶偏转。通过控制8N极的激发，可以在衬底的表面上形成诸如方束的成形光束。 8N极元件可以是磁性的或静电的。

50. 发明申请

US20120193530A1 System and Method for Localization of Large Numbers of Fluorescent Markers in Biological Samples 有权
标题翻译：用于生物样品中大量荧光标记物定位的系统和方法
公开(公告)号：US20120193530A1
公开(公告)日：2012-08-02
申请号：US13017016
申请日：2011-01-30
申请人： N. William Parker , Mark W. Utlaut
发明人： N. William Parker , Mark W. Utlaut
IPC分类号： G01N23/225 , G01N23/00
CPC分类号： G01N21/6428 , G01N21/6458 , G01N21/6486 , G01N23/225 , H01J37/228 , H01J37/28 , H01J37/285 , H01J2237/206 , H01J2237/2443 , H01J2237/24455 , H01J2237/2448 , H01J2237/2803 , H01J2237/2857
摘要： A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.
摘要翻译：公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响的由GoI编码的感兴趣的蛋白质（PoI）。生物学家的一个目标是更精确地定位细胞内的PoI。本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。

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