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41. 发明专利

DE60029838D1 未知
公开(公告)号：DE60029838D1
公开(公告)日：2006-09-14
申请号：DE60029838
申请日：2000-06-05
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , NISHINO KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO , DOHI RYOUSUKE , IDETA EIJI , HIROSE TAKASHI
IPC分类号： F16K47/08 , F04F1/08 , F16K7/14 , F16K7/16 , F16K25/00 , F16K27/00 , F16K31/02 , F16K47/00 , H04B17/00 , H04W4/90 , H04W48/12 , H04W74/08
摘要： It is an object of the present invention to provide at low costs a valve with an integral orifice for use in a gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. To realize the objects of the present invention, the main part of the valve with an integral orifice comprises a valve main body made of heat-resisting materials having a gas inflow passage in communication with a valve chamber with an upper open end and a gas outflow passage, a synthetic resin made valve seat body formed in the valve chamber and having a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably installed in the gas outflow passage of the valve seat body, and an orifice formed in the orifice disc to reduce the gas outflow passage of the valve seat body; wherein the orifice is formed in the stainless steel made orifice disc in advance and the metal made orifice disc with the orifice formed by a separate processing and the synthetic resin made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via the metal inner disc.

42. 发明专利

DE69832956T2 未知
公开(公告)号：DE69832956T2
公开(公告)日：2006-08-17
申请号：DE69832956
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , FUKADA OSAMU , OZAWA SUSUMU , SATOU YOSHIHIRO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F15D1/08 , B23P15/16 , G01F1/40 , G01F1/42 , G05D7/01
摘要： An orifice for use in pressure type flow rate control unit which can be manufactured easily and inexpensively, and which has a linear relationship between pressure P1 upstream of the orifice and the flow rate over a wide range of pressure ratio P2/P1 (where P1 is the pressure upstream of the orifice and P2 is the pressure downstream of same), with the flow rate characteristic relationship among a plurality of orifices being easily adjustable. More specifically, the orifice has a structure comprising a tapered inlet section (1) wherein one open end of a bottom hole (6) bored into a main body member (D) is cut into a shape like the mouthpiece of a trumpet, and a short drawn parallel part (2) continuing therefrom; and a short expanded tapered section (3) formed by expanding the diameter of the other open end of the bottom hole (6) and continuing from the drawn parallel part (2), and an expanded parallel part (4) continuing therefrom.

43. 发明专利

CA2229476C FLUID CONTROL APPARATUS 未知
公开(公告)号：CA2229476C
公开(公告)日：2006-07-11
申请号：CA2229476
申请日：1998-02-13
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： MOROKOSHI HIROSHI , YAMAJI MICHIO , OHMI TADAHIRO , TANAKA SHIGEAKI , HIRAO KEIJI , YOKOYAMA KOSUKE , KURAMOCHI MICHIO , IKEDA NOBUKAZU , HATANO MASAYUKI , HIROSE TAKASHI , KAWANO YUJI
IPC分类号： F16K11/10 , F16K27/00 , C23C16/44 , C23C16/455 , C30B25/14 , F15B13/00 , F15B13/08 , H01L21/205
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.

44. 发明专利

DE69732976T2 未知
公开(公告)号：DE69732976T2
公开(公告)日：2006-02-16
申请号：DE69732976
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K7/14 , F16K31/06 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

45. 发明专利

AT310985T 未知
公开(公告)号：AT310985T
公开(公告)日：2005-12-15
申请号：AT98937819
申请日：1998-08-13
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , DOHI RYOUSUKE , UNO TOMIO , NISHINO KOUJI , FUKUDA HIROYUKI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F16K17/22 , G05D7/06 , G05D16/20 , F16K7/16 , F16K7/14
摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The pressure-type flow rate control apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q = KP1 (K = constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves as variable orifice wherein the gap is adjusted by the orifice drive.

46. 发明专利

DE69732976D1 未知
公开(公告)号：DE69732976D1
公开(公告)日：2005-05-12
申请号：DE69732976
申请日：1997-12-01
申请人： FUJIKIN KK , TOHOKU STEEL CO , OHMI TADAHIRO , TAKAHASHI MIGAKU
发明人： OHMI TADAHIRO , TAKAHASHI MIGAKU , YAMAJI MICHIO , TANIGAWA TAKESHI , IKEDA NOBUKAZU , DOI RYOSUKE , NISHINO KOJI , YASUMOTO NAOFUMI , FUKUDA HIROYUKI , UNO TOMIO , YANAI YASUYUKI
IPC分类号： F16K7/14 , F16K31/06 , F16K31/08
摘要： The invention relates to a fluid control valve which controls a fluid moving through a valve body by means of opening and closing a portion between a valve seat and a valve holder using a drive unit, wherein: said drive unit comprises a rod shaped shaft for applying pressure via said valve seat and a valve rod, and a member a which is affixed around said rod shaped shaft, said member a comprises a magnetic material, and a coil having a space between it and the shaft and provided at a position parallel to said shaft moves said member a upwardly and downwardly by electromagnetic induction, and using the force of a spring, as well, the portion between said valve seat and said valve holder is opened and closed, and after an exciting current supplied to said coil is cut off, an exciting current is resupplied to said coil for a brief period after a passage of a short time t.

47. 发明专利

CA2346202C STRUCTURE OR CONSTRUCTION FOR MOUNTING A PRESSURE DETECTOR 未知
公开(公告)号：CA2346202C
公开(公告)日：2005-02-08
申请号：CA2346202
申请日：2000-08-03
申请人： FUJIKIN KK , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： IKEDA NOBUKAZU , KOIZUMI HIROSHI , NAGAOKA HIDEKI , KAGATSUME SATOSHI , HIROSE TAKASHI , IDETA EIJI , HIROSE JUN , FUKASAWA KAZUO , DOHI RYOUSUKE , YOSHIKAWA KAZUHIRO , NISHINO KOUJI , OHMI TADAHIRO
IPC分类号： G01L9/04 , G01L9/00 , G01L19/00 , G01L19/04 , G01L19/06 , G01L19/14 , G01L7/08
摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics o f the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of t he diaphragm base, and the gasket is also brought in contact with the block low er surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contactin g the metal gasket so that the shallow groove absorbs strain caused by the presser member.

48. 发明专利

DE69825444D1 未知
公开(公告)号：DE69825444D1
公开(公告)日：2004-09-09
申请号：DE69825444
申请日：1998-09-18
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , KAWADA KOJI , TANABE YOSHIKAZU , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO
IPC分类号： H01L21/02 , B01J4/04 , B01J8/00 , B01J8/02 , B01J12/00 , B01J23/42 , B01J23/89 , C01B5/00 , H01L21/31

49. 发明专利

CA2480894A1 PROCESS OF FORMING PLATINUM COATING CATALYST LAYER IN MOISTURE-GENERATING REACTOR 未知
公开(公告)号：CA2480894A1
公开(公告)日：2004-04-29
申请号：CA2480894
申请日：2003-10-14
申请人： FUJIKIN KK , OHMI TADAHIRO
发明人： MINAMI YUKIO , KAWADA KOJI , KITANO MASAFUMI , MORIMOTO AKIHIRO , IKEDA NOBUKAZU , OHMI TADAHIRO
IPC分类号： B01J21/04 , B01J23/42 , B01J32/00 , B01J37/02 , B01J37/08 , B01J37/10 , C01B5/00
摘要： A method for forming a platinum coating catalyst layer in a reaction furnace for generating a water gas through reacting hydrogen and oxygen without burning them at a high temperature, which comprises manufacturing the reacti on furnace for generating a water gas by the use of an aluminum-containing allo y, subjecting the surface of the inner wall of the reaction furnace to a selective oxidation treatment of aluminum, to form a barrier coating film comprising aluminum oxide (Al2O3) as a main component, and then laminating a nd adhering a platinum coating film onto the barrier coating film, thereby forming the platinum coating catalyst layer. The method allows the formation of a barrier coating which has a uniform thickness and a high adhesion to a base material and exhibits high protective function for a platinum coating film on the surface of the inner wall of the reaction space of a reaction furnace for generating a water gas, with ease at a low cost.

50. 发明专利

DE69727419D1 未知
公开(公告)号：DE69727419D1
公开(公告)日：2004-03-11
申请号：DE69727419
申请日：1997-05-07
申请人： OHMI TADAHIRO , FUJIKIN KK
发明人： OHMI TADAHIRO , HIRAO KEIJI , MINAI YUKIO , YAMAJI MICHIO , HIROSE TAKASHI , IKEDA NOBUKAZU
IPC分类号： F15B13/00 , F15B13/02 , F15B13/08 , F15B11/00 , F16K27/00 , H01L21/02
摘要： A fluid control device has formed in a valve main body a main channel (16) communicating with an inlet of a channel within a massflow controller (1), and a relatively long subchannel (38,18) and a relatively short subchannel (17,39) both communicating with the main channel (16). The process gas to be assure of high purity is passed through the relatively long subchannel.

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