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    • 50. 发明授权
    • Metal tube oxidation treatment apparatus
    • 金属管氧化处理装置
    • US5295668A
    • 1994-03-22
    • US842361
    • 1992-04-13
    • Tadahiro OhmiYoshiyuki NakaharaShigeki HayashiTakashi SakanakaEiji OhtaFumio Nakahara
    • Tadahiro OhmiYoshiyuki NakaharaShigeki HayashiTakashi SakanakaEiji OhtaFumio Nakahara
    • C21D9/08C23C8/10C23C8/18
    • C21D9/08C23C8/10C23C8/18
    • It is a metal oxidation treatment apparatus for carrying out the inactivation treatment of metal tubes used especially in a super high purity gas piping system and an apparatus of super high vacuum.The support part of a support member is made as a tubular form member, and a tapered part is provided on the outer periphery thereof, and further, since a spring is mounted to be displaceable, even if fluctuation is present in the internal diameter of stainless steel tubes, it is possible to let the stainless tubes easily be supported on the support part. Also, even fluctuation of the length is present in the stainless steel tubes, the support member is always pushed to the stainless steel tubes. Oxidative gas diffusing out of the tube to be treated to the outside thereof can be released to the outside of the oxidation treatment furnace without letting it contact to the tube to be treated.
    • PCT No.PCT / JP90 / 01230 Sec。 371日期:1992年4月13日 102(e)日期1992年4月13日PCT 1990年9月25日PCT PCT。 公开号WO91 / 05071 日期为1991年04月18日。它是一种金属氧化处理装置,用于特别在超高纯度气体管道系统和超高真空装置中使用的金属管的灭活处理。 支撑构件的支撑部分被制成管状构件,并且在其外周上设置有锥形部分,此外,由于弹簧安装成可移动,即使在不锈钢的内径中存在波动 钢管,可以使不锈钢管容易地支撑在支撑部分上。 此外,不锈钢管中存在长度均匀的波动,总是将支撑构件推到不锈钢管上。 从待处理的管扩散到其外部的氧化气体可以释放到氧化处理炉的外部,而不会使其与待处理的管接触。