专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

41. 发明专利

JPH08174411A POLISHING DEVICE 失效
公开(公告)号：JPH08174411A
公开(公告)日：1996-07-09
申请号：JP33642294
申请日：1994-12-22
申请人： EBARA CORP
发明人： TAKAHASHI TSUTOMU , TOYAMA KEIICHI , TAKAHASHI YOSHIMIZU
IPC分类号： B24B37/013 , B24B37/07 , B24B49/02 , B24B49/12 , H01L21/304 , B24B37/04
摘要： PURPOSE: To enable the detection whether polishing achieves the finish or not in the condition that a material to be polished is installed in the polishing device by providing a light projecting part, which projects the light to the surface to be polished of a work installed in a top ring, and a light receiver part, which, receives the light reflected by the material to be polished, and detecting the finish of the polishing on the basis of the reflected light. CONSTITUTION: A semi-conductor wafer F as a material to be polished is interposed between a top ring 2 and a turn table 1, and the top ring 2 is pushed downward so that the predetermined pressure is applied to the turn table 1, and the surface of the semi-conductor wafer to be polished, namely, the surface, which abuts on the turn table 1, is polished. At the time of detecting the finish of polishing, the turn table 1 is turned so as to expose the polished surface. The polished surface of the semi-conductor wafer F is irradiated with the light from a light emitting unit 3 by a polishing finish detecting means, which is formed of the light emitting unit 3, a light receiver unit 4, an amplifying unit 5, an analog filter 6, an A/D converter unit 7, a computing unit 8 and a control unit 9. Finish of the polishing of the material to be polished is detected by irradiating the polished surface of the semi-conductor wafer F with the light from the light projecting unit 3 and receiving the reflected light with the light receiver unit 4.

42. 发明专利

JPH08118231A POLISHING DEVICE 失效
公开(公告)号：JPH08118231A
公开(公告)日：1996-05-14
申请号：JP27985994
申请日：1994-10-19
申请人： EBARA CORP , TOSHIBA CORP
发明人： NISHI TOYOMI , TSUJIMURA MANABU , TAKAHASHI YOSHIMIZU , YAJIMA HIROMI , AOKI RIICHIRO , IMOTO YUKIO , KODAMA SHOICHI , HIUGA KAZUAKI , KONO YOSHISUKE , NISHIMURA TAKANOBU
IPC分类号： B24B37/20 , B24B37/24 , H01L21/304 , B24B37/00
摘要： PURPOSE: To provide a polishing device on which a cloth cartridge mountable on and demountable from a turntable is hardly deformed. CONSTITUTION: In this polishing device, a cloth cartridge 1 formed by sticking a cloth 3 on a pedestal 2 is installed to a turntable 4 allowable to mount and demount, a polishing liquid is dropped to the cloth 3 on the upper surface of the cloth cartridge 1 rotating together with the turntable 4, and a work is pressed on the upper surface of the cloth 3 so as to polish the contact surface between the work and the cloth 3. And in this polishing device, the cloth cartridge 1 is fixed to the turntable 4 both at the peripheral part and at the center.

43. 发明专利

JP2013248733A Polishing device 有权
标题翻译：抛光装置
公开(公告)号：JP2013248733A
公开(公告)日：2013-12-12
申请号：JP2013156521
申请日：2013-07-29
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MAEDA KAZUAKI , TAKAHASHI YOSHIMIZU , SEKI MASAYA , KUSA HIROAKI
IPC分类号： B24B41/06 , B24B21/00 , B24B21/04 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a polishing device for polishing an outer circumferential portion of one side of a substrate.SOLUTION: A substrate device has a wafer holding mechanism 1 for holding and rotating a substrate W, a polishing mechanism 2 for pressing a polishing tool 10 to the outer circumferential portion of the substrate W and polishing the outer circumferential portion thereof, and an outer circumferential portion support mechanism 3 for supporting the outer circumferential portion of the wafer substrate W with fluid. The polishing mechanism 2 and the outer circumferential portion support mechanism 3 are almost symmetrically arranged with respect to the substrate W, and the outer circumferential portion of the substrate W is supported from the bottom surface of the substrate W by fluid jetted from the outer circumferential portion support mechanism 3.
摘要翻译：要解决的问题：提供一种用于抛光基板一侧的外周部分的抛光装置。解决方案：基板装置具有用于保持和旋转基板W的晶片保持机构1，用于按压抛光的抛光机构2 工具10到基板W的外周部分并抛光其外圆周部分，以及用于用流体支撑晶片基板W的外圆周部分的外周部分支撑机构3。抛光机构2和外周部支撑机构3相对于基板W几乎对称地布置，并且基板W的外周部分从基板W的底面被从外周部分喷射的流体支撑支持机制3。

44. 发明专利

JP2013184096A Seawater desalination system and energy recovery apparatus 有权
标题翻译：海水淡化系统和能源回收装置
公开(公告)号：JP2013184096A
公开(公告)日：2013-09-19
申请号：JP2012050017
申请日：2012-03-07
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , GOTO MASANORI , MAEDA KAZUAKI
IPC分类号： B01D61/06 , B01D61/02 , C02F1/44
CPC分类号： F03B17/00 , B01D61/06 , B01D2313/246 , C02F1/441 , C02F2103/08 , C02F2303/10 , F03B13/00 , F05B2220/62 , Y02A20/131 , Y02W10/30
摘要： PROBLEM TO BE SOLVED: To provide an energy recovery apparatus in which a localized stream flowing in from a port is made uniform across the cross section of a chamber by installing two perforated plates near the port of the chamber and setting the position of the perforated plates and the aperture ratio of the perforated plates in an optimum range.SOLUTION: An energy recovery apparatus is used in a seawater desalination system and includes a chamber 20, a concentrated seawater port P1, a seawater port P2, and first perforated plates 31 and second perforated plates 32 installed both in two pairs near the concentrated seawater port and the seawater port respectively. The first perforated plate 31 and the second perforated plate 32 are so set up that any one of the three conditions is satisfied: the aperture ratio of the first perforated plate 31 is 45-60%, the aperture ratio of the second perforated plate 32 is 45-60%, and the distance L2 between the first perforated plate 31 and the second perforated plate 32 is not less than 0.5 times the inner diameter of the chamber.
摘要翻译：要解决的问题：提供一种能量回收装置，其中通过在所述室的端口附近安装两个多孔板，并且将所述多孔板的位置设定，使从端口流入的局部流在室的横截面上均匀多孔板的开口率在最佳范围内。解决方案：能量回收装置用于海水淡化系统中，包括一个室20，一个集中的海水口P1，一个海水口P2和一个第一多孔板31和第二个多孔板32分别在浓缩海水口和海水口附近两对安装。第一多孔板31和第二多孔板32被设置为满足三个条件中的任何一个：第一多孔板31的孔径比为45-60％，第二多孔板32的孔径比为 45-60％，第一多孔板31和第二多孔板32之间的距离L2不小于室内径的0.5倍。

45. 发明专利

JP2013173146A Seawater desalination system and energy exchange chamber 有权
标题翻译：海水淡化系统和能源交换室
公开(公告)号：JP2013173146A
公开(公告)日：2013-09-05
申请号：JP2013123757
申请日：2013-06-12
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , SHINODA MASAO , EGUCHI MASATO , GOTO MASANORI
IPC分类号： B01D61/06 , C02F1/44
CPC分类号： B01D61/06 , B01D61/025 , B01D61/08 , B01D61/10 , B01D63/02 , B01D2313/246 , C02F1/441 , C02F2201/004 , C02F2303/10 , Y02A20/131 , Y02W10/30
摘要： PROBLEM TO BE SOLVED: To provide a sea water desalination system configured in such a manner that an energy exchange chamber is constructed without a piston to solve the problem of abrasion of a slide member and that mixing of condensed seawater with seawater in the chamber is suppressed.SOLUTION: An energy exchange chamber 20 includes a condensed seawater port P1 letting the condensed seawater in and out, a seawater port P2 letting the seawater in and out, and disposes in the chamber: a first rectification unit at a position that alienates a given distance from the condensed seawater port P1; a second rectification unit at a position that alienates a given distance from the first rectification unit; a third rectification unit at a position that alienates a given distance from the seawater port P2; and a fourth rectification unit at a position that alienates a given distance from the third rectification unit.
摘要翻译：要解决的问题：提供一种海水淡化系统，其配置为使得能量交换室被构造成没有活塞以解决滑动构件的磨损问题，并且压缩室中的冷凝的海水与海水的混合被抑制解决方案：能量交换室20包括使冷凝的海水进出的冷凝的海水口P1，使海水进出的海水口P2并处理在室中：在疏散给定的位置的位置处的第一整流单元距离浓缩海水口P1的距离; 在离开所述第一整流单元的给定距离的位置处的第二整流单元; 在离开海水口P2一定距离的位置处的第三整流单元; 以及在离开与第三整流单元给定距离的位置处的第四整流单元。

46. 发明专利

JP2013155627A Wear detection mechanism of bearing, and vertical shaft pump including the same 有权
标题翻译：轴承的磨损检测机构和包括其的垂直轴泵
公开(公告)号：JP2013155627A
公开(公告)日：2013-08-15
申请号：JP2012015029
申请日：2012-01-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , ISHIDO TORU , TAKASHIMA MICHIO , ISHIHARA KOICHI , SATO SHINGO , UCHIDA YOSHIHIRO
IPC分类号： F04D29/04 , F04D13/00 , F04D13/08 , F04D29/60
摘要： PROBLEM TO BE SOLVED: To provide a wear detection mechanism of a bearing, applicable to a preceding standby type vertical shaft pump which operates even in a dry state.SOLUTION: A wear detection mechanism includes: a sensor pad 62 arranged to surround a rotary shaft 5; a pad holding member 64 formed of a conductor; sliding members 94 and 96 for movably supporting the pad holding member 64 in a radial direction of the rotary shaft 5; a first electrode 66 and a second electrode 68 facing the pad holding member 64; insulating members 70, 72, and 74 electrically isolating the first electrode 66 and the second electrode 68 from each other; a detent member 100 for limiting rotation of the sensor pad 62 and the pad holding member 64; and a detection circuit 120 for detecting electric conduction between the first electrode 66 and the second electrode 68 through the pad holding member 64.
摘要翻译：要解决的问题：提供一种轴承的磨损检测机构，其适用于即使在干燥状态下也工作的前述待机型立式轴泵。解决方案：磨损检测机构包括：传感器垫62，其布置成围绕旋转轴 5; 由导体形成的焊盘保持部件64; 滑动构件94和96，用于沿着旋转轴5的径向可移动地支撑垫保持构件64; 面对衬垫保持构件64的第一电极66和第二电极68; 绝缘构件70,72和74将第一电极66和第二电极68彼此电隔离; 用于限制传感器垫62和垫保持构件64的旋转的制动构件100; 以及用于通过焊盘保持部件64检测第一电极66和第二电极68之间的电导的检测电路120。

47. 发明专利

JP2013136011A Energy recovery chamber 有权
标题翻译：能源回收室
公开(公告)号：JP2013136011A
公开(公告)日：2013-07-11
申请号：JP2011287402
申请日：2011-12-28
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , TAKAHASHI SADAYOSHI
IPC分类号： B01D61/06 , C02F1/44
CPC分类号： Y02A20/131
摘要： PROBLEM TO BE SOLVED: To provide an energy recovery chamber that raises pressure of sea water by using condensed seawater discharged from a reverse osmosis membrane separator, wherein a load generated by a chamber inner pressure pressurizing the end plates closing the openings present in both ends of a cylindrical chamber body does not act on the chamber body.SOLUTION: The energy recovery chamber comprises: a cylindrical chamber body 21; the end plates 22 closing the openings of both ends in the chamber body 21, and forming a space CH for housing the condensed seawater and seawater inside together with the chamber body 21; a condensed seawater port P1 for feeding or discharging the condensed seawater to or from the space CH; a seawater port P2 for feeding or discharging the seawater to or from the space CH; and a coupling rod 23 extending in the space to couple both end plates 22, and receiving the load applied to the end plates 22 by the pressure of the condensed seawater and/or seawater in the space. At least one end plate 22 is movable in the axial direction of the coupling rod 23 with respect to the chamber body 21 by the load.
摘要翻译：要解决的问题：提供一种通过使用从反渗透膜分离器排出的浓缩海水来提高海水压力的能量回收室，其中，由室内压力产生的负荷对封闭两端存在的开口的端板进行加压圆筒形腔体不会作用在腔体上。解决方案：能量回收室包括：圆柱形腔体21; 端板22封闭室主体21中的两端的开口，并形成用于将冷凝的海水和海水与室主体21一起容纳在内部的空间CH; 用于将冷凝的海水供给或排出空间CH的冷凝海水口P1; 用于向/从空间CH供给或排出海水的海水口P2; 以及在空间中延伸以连接两个端板22并且通过该空间中的冷凝的海水和/或海水的压力接收施加到端板22的负载的联接杆23。至少一个端板22可以通过负载相对于室主体21在联接杆23的轴向方向上移动。

48. 发明专利

JP2012232291A Seawater desalination system and energy exchange chamber 有权
标题翻译：海水淡化系统和能源交换室
公开(公告)号：JP2012232291A
公开(公告)日：2012-11-29
申请号：JP2012093560
申请日：2012-04-17
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , MAEDA KAZUAKI , GOTO MASANORI
IPC分类号： B01D61/06 , C02F1/44
CPC分类号： C02F1/441 , B01D61/06 , B01D2313/246 , C02F1/006 , C02F2103/08 , C02F2201/003 , C02F2301/022 , C02F2303/10 , Y02A20/131 , Y02W10/30
摘要： PROBLEM TO BE SOLVED: To provide an energy exchange chamber performing pressure transmission from concentrated seawater to seawater while suppressing mixing of the concentrated seawater with the seawater by supplying/discharging the concentrated seawater and the seawater from the lower side and the upper side of the chamber, respectively, and to provide a seawater desalination system including the energy exchange chamber.SOLUTION: The seawater desalination system for separating seawater of which pressure is raised into fresh water and concentrated seawater by passing the seawater through a reverse osmosis membrane separation device 4 includes: the chamber CH for storing the concentrated seawater and seawater; a concentrated seawater port P1 installed on the lower side of the chamber CH to supply/discharge the concentrated seawater; a seawater port P2 installed on the upper side of the chamber CH to supply/discharge the seawater; a concentrated water dispersion structure 26 communicating with the concentrated seawater port P1 and dispersing the concentrated seawater all over a horizontal plane; and a seawater dispersion structure 25 communicating with the seawater port P2 and dispersing the seawater all over a horizontal plane. The concentrated seawater and the seawater introduced into the chamber CH are brought into direct contact with each other to exchange pressure energy between the concentrated seawater and the seawater.
摘要翻译：要解决的问题：提供一种能够从浓缩海水向海水施加压力传递的能量交换室，同时通过从浓缩海水和下侧供给/排出浓缩海水和海水来抑制浓缩海水与海水的混合并提供包括能量交换室的海水淡化系统。解决方案：通过使海水通过反渗透膜分离装置4将分压海水的海水分离成淡水和浓缩海水的海水淡化系统包括：用于储存浓缩海水和海水的室CH; 集中的海水口P1安装在腔室CH的下侧，以供应/排出浓缩海水; 一个海水口P2安装在腔室CH的上侧以供给/排放海水; 与浓缩海水口P1连通并将浓缩海水分散在水平面上的浓缩水分散结构26; 以及与海水口P2连通并在整个水平面上分散海水的海水分散结构25。引入室CH中的浓缩海水和海水彼此直接接触，以在浓缩海水和海水之间交换压力能量。版权所有（C）2013，JPO＆INPIT

49. 发明专利

JP2012096150A Seawater desalination system and energy exchange chamber 有权
标题翻译：海水淡化系统和能源交换室
公开(公告)号：JP2012096150A
公开(公告)日：2012-05-24
申请号：JP2010245205
申请日：2010-11-01
申请人： Ebara Corp , 株式会社荏原製作所
发明人： TAKAHASHI YOSHIMIZU , TAKAHASHI SADAYOSHI
IPC分类号： C02F1/44 , B01D61/06 , B01D61/10
CPC分类号： Y02A20/131 , Y02A20/144
摘要： PROBLEM TO BE SOLVED: To provide a seawater desalination system configured in such a manner that an energy exchange chamber is constructed without a piston to solve the problem of abrasion of a slide member and that mixing of condensed seawater with seawater in the chamber is suppressed.SOLUTION: The seawater desalination system produces fresh water from seawater by passing the seawater pressurized by a pump through a reverse osmosis membrane separation device 4 to separate the seawater into fresh water and condensed seawater, and includes the energy exchange chamber 20 wherein the pressure energy of the condensed seawater discharged from the reverse osmosis membrane separation device 4 is utilized as the energy for pressurizing part of the seawater. The energy exchange chamber 20 includes a condensed seawater port P1 letting the condensed seawater in and out, a seawater port P2 letting the seawater in and out, and a plurality of sectioned channels R set in the chamber and communicating the condensed seawater port P1 with the seawater port P2. The sectioned channel R is made of a corrugated sheet 50 rolled up and composed of a flat sheet 51 bonded with a wavy sheet 52 where they overlap with each other.
摘要翻译：要解决的问题：提供一种海水淡化系统，其配置为使得能量交换室被构造成没有活塞以解决滑动构件的磨损问题，并且将冷凝的海水与海水中的混合在室中被压制解决方案：海水淡化系统通过将由泵加压的海水通过反渗透膜分离装置4从海水中产生淡水，以将海水分离成淡水和冷凝的海水，并且包括能量交换室20，其中，利用从反渗透膜分离装置4排出的浓缩海水的压力能量作为对部分海水进行加压的能量。能量交换室20包括使冷凝的海水进出的冷凝的海水口P1，使海水进出的海水口P2和设置在室中的多个分段通道R，并将冷凝的海水口P1与海水P2。分段通道R由卷绕并由与它们重叠的波状片52粘接的平板51构成的波纹片50制成。版权所有（C）2012，JPO＆INPIT

50. 发明专利

JP2009208214A Polishing apparatus 有权
标题翻译：抛光装置
公开(公告)号：JP2009208214A
公开(公告)日：2009-09-17
申请号：JP2008055946
申请日：2008-03-06
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MAEDA KAZUAKI , TAKAHASHI YOSHIMIZU , SEKI MASAYA , KUSA HIROAKI
IPC分类号： B24B41/06 , B24B21/00 , H01L21/304
CPC分类号： B24B21/002 , B24B9/065 , B24B21/004 , B24B21/06 , B24B21/08 , B24B37/04 , B24B41/06
摘要： PROBLEM TO BE SOLVED: To provide a polishing apparatus that can polish a periphery on one side of a substrate while keeping an original face angle of the substrate.
SOLUTION: This substrate equipment comprises: a substrate holding mechanism 1 for holding and rotating the substrate W; a polishing mechanism 2 for polishing the periphery of the substrate W by pressing a polishing tool 10 to the periphery; and a periphery support mechanism 3 for supporting the periphery of the substrate W by fluid. The periphery support mechanism 3 is constituted so that either the substrate face opposite to the substrate periphery or the substrate face on the same side of the substrate periphery is supported.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在保持基板的原始面角的同时在基板的一侧上的周边抛光的抛光装置。解决方案：该基板设备包括：用于保持和旋转基板W的基板保持机构1; 抛光机构2，用于通过将研磨工具10压向周边来抛光基板W的周边; 以及用于通过流体支撑基板W的周边的周边支撑机构3。周边支撑机构3被构造成使得与基板周边相对的基板面或与基板周边的同一侧的基板面相支撑。版权所有（C）2009，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式