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41. 发明申请

US20060115748A1 Sidelobe suppression in radiated patterning 有权
标题翻译：辐射图案中的旁瓣抑制
公开(公告)号：US20060115748A1
公开(公告)日：2006-06-01
申请号：US11336229
申请日：2006-01-20
申请人： William Stanton , Husayn Alvarez-Gomariz
发明人： William Stanton , Husayn Alvarez-Gomariz
IPC分类号： G06F17/50 , G03F1/00
CPC分类号： G03F1/36
摘要： Methods and apparatus for sidelobe suppression in a radiation patterning tool. Sidelobe artifacts are mitigated by identifying elements as a function of the radiation wavelength for forming desired profiles on a semiconductor wafer. Diffraction rings are calculated about each of the elements to identify sidelobe interference zones and intersections of diffraction rings are located. Sidelobe inhibitors are located at the identified locations. A method for forming a mask with the addition of sidelobe inhibitors as well as method for determining the location of placement of sidelobe inhibitors is also disclosed.
摘要翻译：辐射图案工具中旁瓣抑制的方法和装置。通过将元件识别为用于在半导体晶片上形成所需轮廓的辐射波长的函数来减轻旁瓣伪影。计算每个元素的衍射环以识别旁瓣干涉区，并且定位衍射环的交点。旁瓣抑制剂位于识别的位置。还公开了添加旁瓣抑制剂形成掩模的方法以及用于确定旁瓣抑制剂的放置位置的方法。

42. 发明申请

US20060110657A1 Battery assembly for use in an uninterruptible power supply system and method 审中-公开
标题翻译：电池组件用于不间断电源系统和方法
公开(公告)号：US20060110657A1
公开(公告)日：2006-05-25
申请号：US11273157
申请日：2005-11-14
申请人： William Stanton , Nathan Woodard
发明人： William Stanton , Nathan Woodard
IPC分类号： H01M10/50 , H01M2/10
CPC分类号： H01M2/1094 , H01M2/1072 , H01M10/121 , H01M10/613 , H01M10/615 , H01M10/627 , H01M10/63 , H01M10/653 , H01M10/6551 , H01M10/6553 , H01M10/6554 , H01M10/6571 , H01M10/6572 , H01M10/658
摘要： A battery includes a housing and at least one exposed terminal. A thermally conductive mechanism is positioned outside the housing but in close proximity to the terminal, defining a thermally conductive path from the terminal to a point further from the terminal. The mechanism can use thermally conductive brackets that may be electrically isolated from the battery terminals. A heat sink may be positioned to receive heat from the bracket. A heat pump can cooperate with the thermally conductive mechanism and the heat sink for aiding in the movement of heat. A heater can be positioned within the housing for heating the inside of the housing. The battery can be encased by an arrangement of vacuum insulated panels in a way which provides for forming an external electrical connection with the battery terminals. A backup battery assembly and associated uninterruptible power system are described for powering a primary load.
摘要翻译：电池包括壳体和至少一个暴露的端子。导热机构位于壳体的外部，但是紧邻端子，限定了从端子到远离端子的点的导热路径。该机构可以使用可与电池端子电隔离的导热支架。散热器可以被定位成从支架接收热量。热泵可以与导热机构和散热器配合以帮助热量运动。加热器可以定位在壳体内以加热壳体的内部。电池可以通过真空绝热面板的布置来封装，其方式是形成与电池端子的外部电连接。描述了备用电池组件和相关联的不间断电源系统，用于为主负载供电。

43. 发明申请

US20050008951A1 Methods of forming patterned reticles 失效
公开(公告)号：US20050008951A1
公开(公告)日：2005-01-13
申请号：US10912031
申请日：2004-08-04
申请人： H. Dulman , William Stanton , John Futrell
发明人： H. Dulman , William Stanton , John Futrell
IPC分类号： G03C5/00 , G03F1/00 , G03F1/36 , G03F9/00 , G06F17/50
CPC分类号： G03F1/36
摘要： The invention includes methods of forming patterned reticles. Design features can be introduced into a layout for a reticle prior to optical proximity correction, and then removed prior to taping a pattern onto the reticle. Design features can alternatively, or additionally, be introduced after optical proximity correction and asymmetrically relative to one or more parts of a reticle pattern. The introduced features can subsequently be taped to the reticle as part of the formation of the patterned reticle.

44. 发明授权

US06465138B1 Method for designing and making photolithographic reticle, reticle, and photolithographic process 失效
标题翻译：光刻掩模版，光罩和光刻工艺的设计和制造方法
公开(公告)号：US06465138B1
公开(公告)日：2002-10-15
申请号：US09377076
申请日：1999-08-19
申请人： William Stanton
发明人： William Stanton
IPC分类号： G03F900
CPC分类号： G03F1/32
摘要： There are provided methods for making a reticle for use in a photolithography process, comprising forming at least two printable features on a reticle substrate, and forming at least one sub-resolution connecting structure on the reticle substrate, the sub-resolution connecting structure connecting at least two of the printable reticle features, as well as reticles formed according to such methods. In addition, there are provided computer-implemented methods for designing such a reticle, as well as computer readable storage media, computer systems and computer programs for use in making such reticles. In addition, there are provided photolithographic processes using such a reticle. The reticle may be a binary mask, a phase shift mask, or an attenuated phase shift mask.
摘要翻译：提供了用于制造用于光刻工艺中的掩模版的方法，包括在掩模版基板上形成至少两个可印刷的特征，并在掩模版基板上形成至少一个分辨率连接结构，至少两个可印刷的掩模版特征，以及根据这种方法形成的掩模版。此外，提供了用于设计这种掩模版的计算机实现的方法，以及用于制作这种掩模版的计算机可读存储介质，计算机系统和计算机程序。此外，提供了使用这种掩模版的光刻工艺。掩模版可以是二进制掩模，相移掩模或衰减相移掩模。

45. 发明授权

US06258489B1 Mask design utilizing dummy features 有权
标题翻译：使用虚拟功能的面具设计
公开(公告)号：US06258489B1
公开(公告)日：2001-07-10
申请号：US09349983
申请日：1999-07-09
申请人： William Stanton , Vishnu K. Agarwal
发明人： William Stanton , Vishnu K. Agarwal
IPC分类号： G03F900
CPC分类号： G03F1/36
摘要： A photolithography mask includes dummy features adjacent to features to be printed (printable features). The dummy features are smaller than the resolution (which is approximately equal to the critical dimension) of the photolithography system so that the resist is not fully developed in the areas of the dummy features. Thus, the dummy features will not be etched into the surface below. However, the proximity effects caused by the dummy features will act to suppress sidelobes and/or increase the depth of focus. Dummy features may be provided adjacent to both isolated and densely-packed printable features, thereby equalizing the proximity effects acting on both types features so that isolated printable features will print approximately the same as densely-packed printable features and the printability of both isolated and closely-packed features will be enhanced. The size and shape of the dummy features may be adjusted for the particular application.
摘要翻译：光刻掩模包括与要打印的特征相邻的虚拟特征（可打印特征）。虚拟特征小于光刻系统的分辨率（其大致等于临界尺寸），使得抗蚀剂在虚拟特征的区域中未完全显影。因此，虚拟特征将不会被蚀刻到下面的表面中。然而，由虚拟特征引起的邻近效应将起到抑制旁瓣和/或增加焦点深度的作用。可以在隔离和密集打印的特征附近提供虚拟特征，从而平衡作用在两种类型特征上的邻近效应，使得可隔离的可打印特征将打印出与密集打印的可印刷特征大致相同的印刷特性和两者的印刷性包装功能将得到增强。虚拟特征的尺寸和形状可以针对特定应用进行调整。

46. 发明授权

US6049148A Integrated magnetic levitation and rotation system 有权
标题翻译：集成磁悬浮和旋转系统
公开(公告)号：US6049148A
公开(公告)日：2000-04-11
申请号：US166064
申请日：1998-10-02
申请人： Stephen B. Nichols , Shankar Jagannathan , Kevin Leary , David Eisenhaure , William Stanton , Richard Hockney , James Downer , Vijay Gondhalekar
发明人： Stephen B. Nichols , Shankar Jagannathan , Kevin Leary , David Eisenhaure , William Stanton , Richard Hockney , James Downer , Vijay Gondhalekar
IPC分类号： H02K17/08 , F16C39/06 , H01L21/687 , H02K7/09 , H02K17/12 , H02K17/30 , H02K19/10 , H02K21/38 , H02K11/00
CPC分类号： H01L21/68792 , F16C32/0448 , F16C32/047 , F16C32/0493 , H02K21/44 , H02K7/09 , H02K17/12
摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly that is contact-less. A stator assembly surrounds a ferromagnetic rotor with an annular air gap which can accommodate a cylindrical wall, e.g. of a chamber for semiconductor wafer processing. The stator assembly has a permanent magnet or magnets sandwiched between vertically spaced magnetic stator plates with plural pole segments. The rotor is preferably a ring of a magnetic stainless steel with complementary pole teeth. The stator assembly (i) levitates and passively centers the rotor along a vertical axis and against tilt about either horizontal axis, (ii) provides a radial position bias for the rotor, and (iii) establishes a motor flux field at the rotor poles. Polyphase coils wound on the stator plates produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller energizes control coils wound on each stator pole segment in response to a sensed physical position of the rotor. The control coils provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.
摘要翻译：旋转电机和旋转磁性轴承集成在一个无接触的紧凑组件中。定子组件围绕铁磁转子，其具有可容纳圆柱形壁的环形空气间隙，例如，的半导体晶片处理室。定子组件具有夹在具有多个极段的垂直间隔的磁性定子板之间的永磁体或磁体。转子优选为具有互补极齿的磁性不锈钢的环。定子组件（i）使转子沿垂直轴线悬浮和被动地居中并且绕着水平轴线倾斜，（ii）为转子提供径向位置偏压，（iii）在转子极点处建立电动机磁通场。缠绕在定子板上的多相线圈产生旋转磁通场，其驱动转子作为同步单极电动机。无极齿的转子允许使用异步感应驱动器进行操作。控制器响应于感测到的转子的物理位置而激励缠绕在每个定子极段上的控制线圈。控制线圈提供主动的径向位置控制，并且可以主动地抑制可能克服被动对中的尖端和倾斜振荡。

47. 发明授权

US4015344A Audio visual teaching method and apparatus 失效
标题翻译：视听教学方法与设备
公开(公告)号：US4015344A
公开(公告)日：1977-04-05
申请号：US429152
申请日：1973-12-28
申请人： Herbert Michaels , William Stanton , Edward Roll
发明人： Herbert Michaels , William Stanton , Edward Roll
IPC分类号： A63B69/00 , A63B69/36 , G09B5/06
CPC分类号： A63B24/0003 , A63B69/00 , G09B5/06 , A63B2024/0012 , A63B2220/806 , A63B2220/807 , A63B2225/12 , A63B69/36
摘要： A method and apparatus for teaching physical arts by establishing an image of an instructor in a virtual optical plane, and simultaneously establishing an image of an action-imitating pupil also in a virtual optical plane, to enable the pupil to compare his virtual image with that of the instructor.A commercial tape, for visual reproduction, shows an instructor performing before a mirror to demonstrate the action to be taught, and shows a view of his back and a view of his reflection in the mirror. When the tape is visually reproduced on an appropriate surface, an auxiliary pupil's mirror disposed edgewise adjacent the surface, lets a practicing pupil see his own image for comparison with the instructor's image.
摘要翻译：一种用于通过在虚拟光学平面中建立指导者的图像来教导物理艺术的方法和装置，并且同时在虚拟光学平面中建立动作模仿光瞳的图像，以使瞳孔能够将其虚拟图像与的教练。

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