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41. 发明授权

US4976843A Particle beam shielding 失效
标题翻译：粒子束屏蔽
公开(公告)号：US4976843A
公开(公告)日：1990-12-11
申请号：US474348
申请日：1990-02-02
申请人： Billy W. Ward , David Edwards, Jr. , Robert A. Casella
发明人： Billy W. Ward , David Edwards, Jr. , Robert A. Casella
IPC分类号： B23K15/06 , H01J37/02 , H01J37/09
CPC分类号： B23K15/06 , H01J37/026 , H01J37/09 , H01J2237/31749
摘要： An apparatus is described for allowing an ion beam and an electron beam to travel toward a predetermined region of a substrate surface during the sputter etching and imaging of insulating and other targets while preventing deflection of the electron beam by sources of stray electrostatic fields on the substrate surface. A metal shield is provided having a funnel-shaped portion leading to an orifice. The incident finely focused ion beam, together with the electron beam, which is used to neutralize the charge created by the incident ion beam, pass to the target through the orifice. The shield also physically supports a gas injection needle that injects a gas through the orifice toward the predetermined region.
摘要翻译：描述了一种装置，用于在溅射蚀刻和绝缘和其它目标的成像期间允许离子束和电子束朝向衬底表面的预定区域行进，同时防止电子束由衬底上的杂散静电场的源偏转表面。设置有通向孔的漏斗形部分的金属屏蔽。与用于中和由入射离子束产生的电荷的电子束一起入射的精细聚焦离子束通过孔传递到靶。护罩还物理地支撑气体注射针，其将气体通过孔朝向预定区域注入。

42. 发明授权

US09159527B2 Systems and methods for a gas field ionization source 有权
标题翻译：气田电离源的系统和方法
公开(公告)号：US09159527B2
公开(公告)日：2015-10-13
申请号：US12100570
申请日：2008-04-10
申请人： Billy W. Ward , Lou Farkas , John A. Notte , Randall Percival
发明人： Billy W. Ward , Lou Farkas , John A. Notte , Randall Percival
IPC分类号： H01J27/00 , H01J37/08 , H01J27/26
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/06341 , H01J2237/065 , H01J2237/0807 , H01J2237/28
摘要： In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
摘要翻译：在一个方面，本发明提供了一种气体离子源组件，其包括与光学柱连接的离子源，使得在离子源处产生的离子束穿过光学柱。离子源包括具有与包含少量原子的尖端逐渐变细的宽度的发射体。在其它方面，该方法提供制造，维持和提高气体离子源的性能，包括原位锐化离子源的尖端。

43. 发明授权

US08461557B2 Ion sources, systems and methods 有权
公开(公告)号：US08461557B2
公开(公告)日：2013-06-11
申请号：US12997371
申请日：2008-06-13
申请人： Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall Percival , Billy W. Ward
发明人： Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall Percival , Billy W. Ward
IPC分类号： H01J27/00 , A61N5/00 , G21G5/00
CPC分类号： H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
摘要： Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

44. 发明授权

US5155368A Ion beam blanking apparatus and method 失效
标题翻译：离子束净化装置和方法
公开(公告)号：US5155368A
公开(公告)日：1992-10-13
申请号：US686043
申请日：1991-04-16
申请人： David Edwards, Jr. , Billy W. Ward
发明人： David Edwards, Jr. , Billy W. Ward
IPC分类号： H01J37/09 , H01J37/04 , H01J37/147 , H01J37/30
CPC分类号： H01J37/045 , H01J2237/028
摘要： Ion beam apparatus provides beam blanking by utilizing an aperture through which the beam passes during unblanked periods, and elements for deflecting the beam during blanking so that the beam is deflected away from the aperture. Electrodes between the aperture element and the deflecting elements generate a potential exceeding the kinetic energy of charged particles emitted from the aperture element due to ions striking the aperture element during blanking. Charged particles emitted from the aperture element are thus prevented from striking the beam deflecting elements, thereby reducing hydrocarbon cracking, insulator accumulation, and charge accumulation on the deflecting elements. Beam stability is thereby enhanced. Charged particles emitted from the aperture element are also returned to the aperture element, so that an accurate measure of ion beam current is obtained by measuring current flow to the aperture element.
摘要翻译：离子束装置通过利用光束在未曝光期间通过的孔而提供光束消隐，以及用于在遮光期间偏转光束的元件，使得光束偏离光圈。孔径元件和偏转元件之间的电极产生超过从孔元件发射的带电粒子的动能的电位，因为在消隐期间由于离子撞击孔元件。因此，防止了从孔元件发射的带电粒子撞击光束偏转元件，从而减少了偏转元件上的碳氢化合物裂缝，绝缘体积聚和电荷积聚。从而增强了梁的稳定性。从孔径元件发射的带电粒子也返回到孔径元件，从而通过测量到孔径元件的电流来获得离子束电流的精确测量。

45. 发明授权

US4673101A Evacuable chamber enclosing 失效
标题翻译：可拆卸的房间封闭
公开(公告)号：US4673101A
公开(公告)日：1987-06-16
申请号：US861046
申请日：1986-05-08
申请人： Nicholas Guarino , Gabriel Onorio , Billy W. Ward
发明人： Nicholas Guarino , Gabriel Onorio , Billy W. Ward
IPC分类号： F16J13/18 , H01J37/18 , H01J37/317 , H01L21/265 , B65D43/24
CPC分类号： F16J13/18
摘要： An evacuable vessel having a heavy cylindrical wall seated on a generally square base has a heavy cover hinged at one end to a hinge support attached to the wall. The cover is bolted to the wall in the closed position and sealed by an O-ring. The hinge bolts are seated in a slotted hole to allow the cover to pivot about the O-ring when closing. Adjustable set screws may be used to tighten the hinge arms and introduce a selected degree of friction. Springs are connected between the outside end of each hinge arm and the base.
摘要翻译：具有安置在大致正方形底座上的重圆柱形壁的可抽空的容器具有一个重叠的盖子，该盖子在一端铰接到附接到墙壁上的铰链支架。盖子在关闭位置用螺栓固定在墙壁上，并用O形圈密封。铰链螺栓位于开槽孔中，以允许盖在关闭时围绕O形环枢转。可以使用可调整的固定螺丝来拧紧铰链臂并引入选定的摩擦程度。弹簧连接在每个铰链臂的外端和底座之间。

46. 发明申请

US20110240853A1 ION SOURCES, SYSTEMS AND METHODS 有权
标题翻译：离子源，系统和方法
公开(公告)号：US20110240853A1
公开(公告)日：2011-10-06
申请号：US12997371
申请日：2008-06-13
申请人： Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall Percival , Billy W. Ward
发明人： Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall Percival , Billy W. Ward
IPC分类号： G01N23/225 , G01N23/00
CPC分类号： H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
摘要： Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
摘要翻译：公开了离子源，系统和方法。在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。这可以提高性能（例如，增加可靠性，稳定性等）。在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端（例如尖端顶点上的原子数）的能力。这可以提高性能（例如，增加可靠性，稳定性等）。

47. 发明授权

US08013300B2 Sample decontamination 有权
标题翻译：样品去污
公开(公告)号：US08013300B2
公开(公告)日：2011-09-06
申请号：US12470316
申请日：2009-05-21
申请人： Lewis A. Stern , Louis S. Farkas, III , Billy W. Ward , William DiNatale , John A. Notte, IV , Lawrence Scipioni
发明人： Lewis A. Stern , Louis S. Farkas, III , Billy W. Ward , William DiNatale , John A. Notte, IV , Lawrence Scipioni
IPC分类号： H01J49/14 , G21K5/00
CPC分类号： G01N23/2202 , G01N1/34 , G01N23/2255 , H01J37/28 , H01J2237/022 , H01J2237/2067
摘要： Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.
摘要翻译：本文公开的方法包括：（a）将室中的样品暴露于第一气体，其中第一气体与样品上的表面污染物反应以形成第二气体; （b）从所述室中去除所述第二气体的至少一部分; 和（c）将样品暴露于带电粒子束以使多个颗粒离开样品并检测多个颗粒中的至少一些。带电粒子束可以包括分子量为40原子质量以下的粒子。

48. 发明申请

US20100136255A1 ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS 审中-公开
标题翻译：充电粒子系统和方法中的冰层
公开(公告)号：US20100136255A1
公开(公告)日：2010-06-03
申请号：US12625912
申请日：2009-11-25
申请人： John A. Notte, IV , Lawrence Scipioni , Billy W. Ward , William B. Thompson
发明人： John A. Notte, IV , Lawrence Scipioni , Billy W. Ward , William B. Thompson
IPC分类号： B05D3/06 , G21K5/00
CPC分类号： G01N1/42 , C23C14/06 , C23C14/5833 , H01J37/3056 , H01J2237/0807 , H01J2237/2001 , H01J2237/2002 , H01J2237/31732 , H01J2237/3174 , H01J2237/31745
摘要： Charged particle sources, systems and methods are disclosed.
摘要翻译：公开了带电粒子源，系统和方法。

49. 发明申请

US20080217555A1 SYSTEMS AND METHODS FOR A GAS FIELD IONIZATION SOURCE 有权
标题翻译：用于气田离子源的系统和方法
公开(公告)号：US20080217555A1
公开(公告)日：2008-09-11
申请号：US12100570
申请日：2008-04-10
申请人： Billy W. Ward , Lou Farkas , John A. Notte , Randall Percival
发明人： Billy W. Ward , Lou Farkas , John A. Notte , Randall Percival
IPC分类号： H01J27/26
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/06341 , H01J2237/065 , H01J2237/0807 , H01J2237/28
摘要： In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
摘要翻译：在一个方面，本发明提供了一种气体离子源组件，其包括与光学柱连接的离子源，使得在离子源处产生的离子束穿过光学柱。离子源包括具有与包含少量原子的尖端逐渐变细的宽度的发射体。在其它方面，该方法提供制造，维持和增强气体离子源的性能，包括原位锐化离子源的尖端。

50. 发明授权

US07414243B2 Transmission ion microscope 有权
标题翻译：透射离子显微镜
公开(公告)号：US07414243B2
公开(公告)日：2008-08-19
申请号：US11146741
申请日：2005-06-07
申请人： Billy W. Ward
发明人： Billy W. Ward
IPC分类号： G01N23/00
CPC分类号： H01J37/26 , H01J2237/08 , H01J2237/0807 , H01J2237/262
摘要： Transmission ion microscope. A bright light ion source generates an ion beam that is focused on a sample by an electrostatic condenser lens means. An objective lens focuses the ion beam transmitted through the sample to form an image. A projector lens enlarges the image and a phosphor screen receives the enlarged image to generate light allowing visualization of the image.
摘要翻译：透射离子显微镜。亮光离子源产生通过静电聚光透镜装置聚焦在样品上的离子束。物镜聚焦透过样品的离子束形成图像。投影仪透镜放大图像，荧光屏接收放大图像以产生允许图像可视化的光。

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