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    • 50. 发明授权
    • Method for formation of conductor using electroless plating
    • 使用化学镀形成导体的方法
    • US5595943A
    • 1997-01-21
    • US495021
    • 1995-06-27
    • Takeyuki ItabashiHaruo AkahoshiAkio Takahashi
    • Takeyuki ItabashiHaruo AkahoshiAkio Takahashi
    • C23C18/36C23C18/40H01L21/288H01L21/768H05K3/18H01L21/28
    • C23C18/36C23C18/405H01L21/288H01L21/76877H05K3/184
    • A method for forming a conductor circuit is provided which comprises depositing and filling a conductor metal in recessions of insulator in the form of grooves or holes using an electroless plating solution, the conductor metal being deposited and filled in the recession to the same level as the surface of the insulator, wherein said electroless plating solution contains an inhibitor which inhibits the cathodic partial reaction which is a metal deposition reaction and the electroless plating is carried out with stirring the plating solution. Since the plating reaction automatically stops when the metal conductor 1 is formed up to the level of the surface of the insulator 2, a conductor circuit in which the surface of the metal conductor 1 and that of the insulator 2 are even and at the same level can be easily obtained. Furthermore, since the conductor circuits differing in thickness can be simultaneously formed on one substrate, the number of lamination in making multilayer circuit can be reduced and a multilayer circuit board of low electric resistance can be obtained.
    • 提供一种用于形成导体电路的方法,其包括使用化学镀溶液沉积并填充凹槽或孔形式的绝缘体凹陷中的导体金属,将导体金属沉积并填充在与经济衰退相同的水平上 表面,其中所述化学镀溶液含有抑制作为金属沉积反应的阴极部分反应的抑制剂,并且通过搅拌电镀液进行化学镀。 由于当金属导体1形成到绝缘体2的表面的高度时,电镀反应自动停止,其中金属导体1的表面和绝缘体2的表面均匀并处于相同水平的导体电路 可以很容易地获得。 此外,由于可以在一个基板上同时形成厚度不同的导体电路,因此可以减少制造多层电路中的层压次数,并且可以获得低电阻的多层电路板。