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    • 43. 发明授权
    • Method of etching and etching apparatus
    • 蚀刻和蚀刻装置的方法
    • US07943524B2
    • 2011-05-17
    • US11780797
    • 2007-07-20
    • Noriyuki KobayashiKenji Adachi
    • Noriyuki KobayashiKenji Adachi
    • H01L21/302
    • H01L21/76897H01L21/31116
    • Silicon oxide film having, as a sublayer, a silicon nitride film layer serving as a protective film layer for 5 gate formed on silicon substrate is etched by introducing a processing gas including a gaseous mixture containing at least C4F6, Ar, O2 and N2 into an airtight processing chamber and carrying out a plasma treatment in a self-alignment contact process, thereby forming contact hole. For the 10 processing gas, e.g., the ratio of N2 gas flow rate to C4F6 gas flow rate ranges from 25/8 to 85/8, the ratio of O2 and N2 gas flow rate to C4F6 gas flow rate ranges from 15/4 to 45/4 and the ratio of N2 gas flow rate to O2 gas flow rate ranges from 5 to 17. Accordingly, stable contact holes of 15 high aspect ratio exhibiting desirable control characteristics is formed while minimizing etching the silicon nitride film, a protective film layer for gate.
    • 通过将包括至少包含C 4 F 6,Ar,O 2和N 2的气态混合物的处理气体引入到气密性中,作为子层,具有作为子层的用作在硅衬底上形成的栅极保护膜层的氮化硅膜层的氧化硅膜 处理室,并在自对准接触工艺中进行等离子体处理,从而形成接触孔。 对于处理气体,例如,N2气体流量与C4F6气体流量的比例范围为25/8至85/8,O 2和N 2气体流量与C 4 F 6气体流量的比率为15/4至45 / 4,N2气体流量与O 2气体流量的比率为5〜17。因此,在最小化氮化硅膜蚀刻的同时,形成具有期望的控制特性的高纵横比的稳定的接触孔,用于栅极的保护膜层 。
    • 47. 发明申请
    • PRINTING SYSTEM, INFORMATION PROCESSING APPARATUS, MAIL PROCESSING METHOD, AND STORAGE MEDIUM
    • 印刷系统,信息处理设备,邮件处理方法和存储介质
    • US20080068646A1
    • 2008-03-20
    • US11855410
    • 2007-09-14
    • Noriyuki Kobayashi
    • Noriyuki Kobayashi
    • H04N1/00
    • H04N1/00204H04N1/00212H04N1/00244H04N1/00307H04N1/32614H04N1/32625H04N1/32651H04N1/32678
    • A printing system includes an information processing apparatus to receive mail information transmittable to a mail receiving apparatus, and a printer communicating with the information processing apparatus. The information processing apparatus includes a unit to store transfer target printer information obtained from the mail receiving apparatus, a unit to determine whether the mail receiving apparatus can process the mail information, and a unit to transmit the mail information to the mail receiving apparatus if the determining unit determines that the mail receiving apparatus can process the received mail information, and to transfer the mail information to a printer corresponding to the transfer target printer information if the determining unit determines that the mail receiving apparatus cannot process the received mail information.
    • 打印系统包括用于接收可发送到邮件接收装置的邮件信息的信息处理装置和与信息处理装置通信的打印机。 信息处理装置包括:存储从邮件接收装置获得的传送目标打印机信息的单元,用于确定邮件接收装置是否可以处理邮件信息的单元;以及将邮件信息发送到邮件接收装置的单元,如果 确定单元确定邮件接收设备可以处理接收到的邮件信息,并且如果确定单元确定邮件接收设备不能处理接收到的邮件信息,则将邮件信息传送到与传送目标打印机信息相对应的打印机。
    • 48. 发明授权
    • Flexible disk drive having an eject base usable as a cover
    • 具有可用作盖的弹出基座的柔性盘驱动器
    • US07271979B2
    • 2007-09-18
    • US11065912
    • 2005-02-25
    • Hisateru KomatsuMakoto KonnoNoriyuki Kobayashi
    • Hisateru KomatsuMakoto KonnoNoriyuki Kobayashi
    • G11B17/02
    • G11B17/043
    • In a flexible disk drive for a flexible disk, a main frame defines a receiving portion for receiving the flexible disk. The main frame has a principal surface which faces the receiving portion and extends in a first direction and a second direction perpendicular to the first direction. A carriage assembly is mounted on the main frame and has a magnetic head for accessing the flexible disk. The carriage assembly is movable to carry the magnetic head along the principal surface. An eject base is coupled to the main frame and has a main portion facing the principal surface and side plates opposite to each other in the first direction. Between the main frame and the eject base, an eject plate is placed movable in the second direction for ejecting the flexible disk from the receiving portion. The eject plate has side plates facing the side plates of the eject base in the first direction, respectively. A guiding mechanism is coupled to the side plates of the eject base and to the side plates of the eject plate and guides movement of the eject plate in the second direction.
    • 在用于软盘的软盘驱动器中,主框架限定用于接收软盘的接收部分。 主框架具有面向接收部分的主表面,并且在垂直于第一方向的第一方向和第二方向上延伸。 托架组件安装在主框架上并具有用于访问软盘的磁头。 托架组件是可移动的,以沿着主表面携带磁头。 弹出基座联接到主框架,并且具有面向主表面的主要部分和在第一方向上彼此相对的侧板。 在主框架和排出基座之间,弹出板被放置成可沿第二方向移动以从接收部分弹出软盘。 排出板分别具有朝向第一方向的排出基板侧板的侧板。 引导机构联接到排出基座的侧板和排出板的侧板,并且引导排出板沿第二方向的移动。