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41. 发明专利

FR2589290B1 未知
公开(公告)号：FR2589290B1
公开(公告)日：1990-08-17
申请号：FR8610632
申请日：1986-07-22
申请人： QUANTRONIX CORP
发明人： LIU KUO-CHING
IPC分类号： G02F1/37 , H01S3/109 , H01S3/11 , H01S3/10

42. 发明专利

DE3631909A1 未知
公开(公告)号：DE3631909A1
公开(公告)日：1987-04-30
申请号：DE3631909
申请日：1986-09-19
申请人： QUANTRONIX CORP
发明人： LIU KUO-CHING
IPC分类号： G02F1/37 , H01S3/109 , H01S3/11 , H01S3/106

43. 发明专利

GB8624607D0 LASER BEAM 未知
公开(公告)号：GB8624607D0
公开(公告)日：1986-11-19
申请号：GB8624607
申请日：1986-10-14
申请人： QUANTRONIX CORP
IPC分类号： G02F1/37 , H01S3/109 , H01S3/11 , H01S3/106

44. 发明专利

DE3144396A1 未知
公开(公告)号：DE3144396A1
公开(公告)日：1982-08-05
申请号：DE3144396
申请日：1981-11-07
申请人： QUANTRONIX CORP
发明人： COHEN MARTIN G , LIU KUO-CHING
IPC分类号： G02F1/37 , H01S3/109 , H01S3/10

45. 发明专利

FR2494513A1 未知
公开(公告)号：FR2494513A1
公开(公告)日：1982-05-21
申请号：FR8114580
申请日：1981-07-27
申请人： QUANTRONIX CORP
IPC分类号： G02F1/37 , H01S3/109 , H01S3/10

46. 发明专利

FR2086509A1 未知
公开(公告)号：FR2086509A1
公开(公告)日：1971-12-31
申请号：FR7115565
申请日：1971-04-30
申请人： QUANTRONIX CORP
IPC分类号： B23K26/08 , B23K26/14 , B23K26/16 , B23K26/18 , H01S3/00 , H01L7/00
摘要： 1305527 Scribing by laser beams QUANTRONIX CORP 19 April 1971 [30 April 1970] 10008/71 Heading B5E [Also in Divisions B3 and H1] Apparatus for scribing an object, such as a semi-conductor wafer 6, comprises means 7 for holding the object, a device 3 for producing a Q-switched pulsed laser beam 4 of sufficient energy to vaporize a portion of the object, means 5 for focusing the laser beam, drive means for effecting relative movement between the holding means and the focusing means to cause the laser beam to make a series of overlapping holes and thereby inscribe a continuous line on the surface of the object, and means for preventing globules of material ejected from the object by the laser beam from falling back upon the surface of the object or depositing on the focusing means. The object 6 may be a wafer on which are a plurality of semi-conductor devices arranged in a grid pattern and which are to be separated into individual dies. The wafer is mounted on a vacuum chuck 7 which can be rotated by a knob 8 to align the dies with the laser beam and can be moved by X and Y motors relative to the beam to effect the scribing between the dies. The beam 4 is reflected by prisms (62, 64, Fig. 3, not shown) from the laser device, which may be Neodymium doped Yttrium-Aluminium-Gamet solid state laser, through a focusing device 5 on to the wafer, the focusing device being part of a binocular microscope 2. The means for preventing molten globules of the material of the wafer falling back on the wafer and also from depositing on the surface of the focusing device 5 consists of a first shroud 71, Fig. 4, which surrounds the device 5 and tapers at its lower end to an aperture 72 through which the laser beam passes, the interior of the shroud being connected by inlets 73 to atmosphere. A second shroud 75 surrounds the first and has a larger aperture 76 than that of the first and is connected by conduits 77 to a vacuum source so that globules produced by the laser beam are entrained in the flow of air from shroud 71 and carried through annular passage 78 between the shrouds and through the conduits 77. In another embodiment, the globules are blown by a jet from a nozzle towards a pipe connected to a vacuum source. In a further embodiment, a plastic film 91, Fig. 6, which is transparent to the laser beam 4, is fed by rollers 92, 93, 94 over the surface of the wafer, the globules adhering to the film. The laser is operative in pulses so that the scribed line consists of a number of overlapping holes and the beam may be elongated in the direction of the line. The wavelength of the Nd:YAG laser is 1À06 microns and produces a focused spot of 1 mil. The laser is controlled by a Q-switch to produce pulses at a frequency of 2-5 KHZ.

47. 发明专利

CA2332864C SCALABLE VERTICALLY DIODE-PUMPED SOLID-STATE LASERS 未知
公开(公告)号：CA2332864C
公开(公告)日：2008-06-10
申请号：CA2332864
申请日：1999-05-24
申请人： QUANTRONIX CORP
发明人： BULL DOUGLAS J , FU QIANG
IPC分类号： H01S3/09 , H01S3/094 , H01S3/02 , H01S3/042 , H01S3/0941
摘要： A method and apparatus pump a laser gain medium of a laser rod having a first longidunal axis. At least one pump light source (42) emits pump light to the laser rod (12), and the pump light source has a second longitudinal axis (46) which is perpendicular to the first longitudinal axis (14). Radiation from various laser diode arrays is collimated and uniquely arranged in a vertical orientation in relation to the laser gain medium. Reflectors (38) focus the collimated radiation from the diode arrays onto the laser gain medium to achieve fundamental mode operation or Transverse Electromagnetic mode (TEM00 mode) operation. Both laser gain medium and reflectors may be simultaneously cooled with appropriate fluids in the apparatus. The assembly of the apparatus may be extended to hold a plurality of vertically oriented laser diode arrays to increase the laser pump power.

48. 发明专利

DE69927686T2 未知
公开(公告)号：DE69927686T2
公开(公告)日：2006-06-29
申请号：DE69927686
申请日：1999-05-24
申请人： QUANTRONIX CORP
发明人： BULL J , FU QIANG
IPC分类号： H01S3/09 , H01S3/094 , H01S3/02 , H01S3/042 , H01S3/0941
摘要： A method and apparatus pump a laser gain medium of a laser rod having a first longitudinal axis. At least one pump light source emits pump light to the laser rod, and the pump light source has a second longitudinal axis which is perpendicular to the first longitudinal axis. Radiation from various laser diode arrays is collimated and uniquely arranged in a vertical orientation in relation to the laser gain medium. Reflectors focus the collimated radiation from the diode arrays onto the laser gain medium to achieve fundamental mode operation or Transverse Electromagnetic mode (TEM00 mode) operation. Both laser gain medium and reflectors may be simultaneously cooled with appropriate fluids in the apparatus. The assembly of the apparatus may be extended to hold a plurality of vertically oriented laser diode arrays to increase the laser pump power.

49. 发明专利

CA2289670C INTRA-CAVITY AND INTER-CAVITY HARMONICS GENERATION IN HIGH POWER LASERS 未知
公开(公告)号：CA2289670C
公开(公告)日：2005-06-21
申请号：CA2289670
申请日：1998-05-14
申请人： EXCEL QUANTRONIX CORP
发明人： ZHOU FUZHENG , FU QIANG , MAIKOWSKI MICHAEL
IPC分类号： G02F1/37 , G02F1/35 , H01S3/109 , H01S3/10
摘要： Intra-cavity and/or inter-cavity sub-resonators (10, 20, 22, 50, 52, 32, 54) with dielectric coated mirrors (10, 50, 52, 54) have anti-reflection and high-reflection coatings to attain high efficiency third (32) and higher order harmonics generation of laser radiation. Main-resonators and sub-resonators enhance the fundamental and harmonic oscillation, respectively, which result is high conversion efficiency of third harmonics (32) and higher, such improved lasing efficien cy may be implemented in higher power lasers for improved power performance to attain over 8 W of UV output power with a high repetiti on rate. The use of intra-cavity THG techniques provide high efficiency by using existing high intensities of the input fundamental frequencies available in the intra-cavity region of the laser to avoid damage to components of the laser, such as the laser crystal. The THG utilizes a double-pass and/or multi-pass arrangement, which results in about a 60 % increase in output power compared to a single pass configuration. Also, blocking of UV energy generated in a return pass is performed to eliminate damage by the UV to components in the main cavity.

50. 发明专利

AU4312199A Scalable vertically diode-pumped solid-state lasers 未知
公开(公告)号：AU4312199A
公开(公告)日：1999-12-13
申请号：AU4312199
申请日：1999-05-24
申请人： QUANTRONIX CORP
发明人： BULL DOUGLAS J , FU QIANG
IPC分类号： H01S3/094 , H01S3/02 , H01S3/042 , H01S3/0941 , H01S3/09
摘要： A method and apparatus pump a laser gain medium of a laser rod having a first longitudinal axis. At least one pump light source emits pump light to the laser rod, and the pump light source has a second longitudinal axis which is perpendicular to the first longitudinal axis. Radiation from various laser diode arrays is collimated and uniquely arranged in a vertical orientation in relation to the laser gain medium. Reflectors focus the collimated radiation from the diode arrays onto the laser gain medium to achieve fundamental mode operation or Transverse Electromagnetic mode (TEM00 mode) operation. Both laser gain medium and reflectors may be simultaneously cooled with appropriate fluids in the apparatus. The assembly of the apparatus may be extended to hold a plurality of vertically oriented laser diode arrays to increase the laser pump power.

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