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41. 发明申请

US20100148086A1 MAGNETIC DEFLECTOR FOR AN ELECTRON COLUMN 有权
标题翻译：用于电子柱的磁性偏转器
公开(公告)号：US20100148086A1
公开(公告)日：2010-06-17
申请号：US12600266
申请日：2008-05-15
申请人： Ho Seob Kim , Young Chul Kim
发明人： Ho Seob Kim , Young Chul Kim
IPC分类号： H01J3/26 , H01F7/00
CPC分类号： H01J37/147 , H01J37/153 , H01J37/28 , H01J2237/1205 , H01J2237/152 , H01J2237/1532
摘要： The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
摘要翻译：本发明一般涉及用于产生电子束的微柱偏转器，更具体地，涉及一种能够扫描或移动电子束或用作使用磁场的标称器的偏转器。根据本发明的偏转器（100）包括一个或多个偏转器电极。每个偏转器电极包括由导体或半导体制成的芯体（12）和缠绕在芯部（12）上的线圈（11）。

42. 发明申请

US20090224650A1 DEVICE FOR SUSTAINING DIFFERENTIAL VACUUM DEGREES FOR ELECTRON COLUMN 有权
标题翻译：用于维持电子柱的差分真空度的装置
公开(公告)号：US20090224650A1
公开(公告)日：2009-09-10
申请号：US12278219
申请日：2007-02-02
申请人： Ho Seob Kim
发明人： Ho Seob Kim
IPC分类号： H01J33/00
CPC分类号： H01J37/18 , H01J2237/1205 , H01J2237/188
摘要： Disclosed is a device for sustaining different vacuum degrees for an electron column, including an electron emitter, a lens part, and a housing for securing them, to maintain the electron column and a sample under different vacuum degrees. The device comprises a column housing coupling part coupled to the housing to isolate a vacuum; a hollow part defined through the center portion of the device to allow an electron beam emitted from the electron column to pass therethrough; and a vacuum isolation part having a structure of a gasket for vacuum coupling, wherein a difference of no less than 10 torr in a vacuum degree is maintained between both sides of the device by selecting an appropriate diameter of a lens electrode layer which is finally positioned in a path along which the electron beam is emitted or by using the hollow part.
摘要翻译：公开了一种用于维持用于电子柱的不同真空度的装置，包括电子发射器，透镜部分和用于固定它们的壳体，以保持电子柱和样品处于不同的真空度。该装置包括一个联接到壳体上的柱壳体联接部分以隔离真空; 通过装置的中心部分限定出允许从电子塔发射的电子束通过的中空部分; 以及具有用于真空联接的衬垫的结构的真空隔离部分，其中通过选择最终定位的透镜电极层的适当直径，在装置的两侧之间保持真空度不小于10托的差异在发射电子束的路径中或通过使用中空部分。

43. 发明申请

US20090014650A1 DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN 有权
标题翻译：电子探针检测器及检测电子束电子的方法
公开(公告)号：US20090014650A1
公开(公告)日：2009-01-15
申请号：US12064071
申请日：2006-08-18
申请人： Ho Seob Kim
发明人： Ho Seob Kim
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J2237/2444
摘要： In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
摘要翻译：在传统的微通道板（MCP），二次电子（SE）检测器或半导体检测器中，电子数通过其自身的结构被放大。对于这种放大，由于其自身的结构和材料，外部施加小的电压差或产生。经过上述步骤的电子的电流被外部放大电路放大。在本发明中，由微柱产生的电子束的碰撞产生的电子通过周围的导电布线来检测。使用外部的放大电路来检测检测到的电子，与常规的检测方法类似。

44. 发明申请

US20080277584A1 Method for Changing Energy of Electron Beam in Electron Column 审中-公开
标题翻译：电子束中电子束能量的改变方法
公开(公告)号：US20080277584A1
公开(公告)日：2008-11-13
申请号：US12064076
申请日：2006-08-18
申请人： Ho Seob Kim
发明人： Ho Seob Kim
IPC分类号： G01N23/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/063 , H01J2237/06375 , H01J2237/1205 , H01J2237/28
摘要： The present invention relates to a method of effectively changing the energy of an electron beam in an electron column for generating an electron beam. This includes the step of additionally applying voltage to an electrode such that the electron beam finally has the desired energy so as to freely control the energy when the electron beam reaches a sample.
摘要翻译：本发明涉及一种有效地改变用于产生电子束的电子束中的电子束的能量的方法。这包括向电极附加施加电压的步骤，使得电子束最终具有期望的能量，以便当电子束到达样品时自由地控制能量。

45. 发明授权

US6077417A Silicon microlens cleaning system 失效
标题翻译：硅微透镜清洗系统
公开(公告)号：US6077417A
公开(公告)日：2000-06-20
申请号：US195843
申请日：1998-11-19
申请人： Kim Y. Lee , T. H. Philip Chang , Ho-Seob Kim
发明人： Kim Y. Lee , T. H. Philip Chang , Ho-Seob Kim
IPC分类号： G01N20060101 , G01N13/12 , G01N30/00 , G12B21/00 , H01J37/12 , H01J37/26
CPC分类号： B82Y15/00
摘要： A method and system for cleaning the silicon microlenses in an electron-beam microcolumn in situ. The microlenses individually are heated by passing a current through each microlens. The current is utilized to heat the microlens to at least two hundred degrees Centigrade to prevent contamination and occasionally to a temperature on the order of six to seven hundred degrees Centigrade to remove any builtup or potential contamination.
摘要翻译：一种电子束微柱原位清洗硅微透镜的方法和系统。通过使电流通过每个微透镜来单独地加热微透镜。该电流用于将微透镜加热至至少二百摄氏度以防止污染，并且偶尔达到六至七百摄氏度的温度以除去任何积聚或潜在的污染物。

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