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    • 45. 发明授权
    • Reflection preventing film and process for forming resist pattern using
the same
    • 防反射膜和使用其形成抗蚀剂图案的工艺
    • US5525457A
    • 1996-06-11
    • US354847
    • 1994-12-09
    • Hiroaki NemotoMasayuki EndoYoshiji YumotoTakao Miura
    • Hiroaki NemotoMasayuki EndoYoshiji YumotoTakao Miura
    • G03F7/09G03F7/26
    • G03F7/091
    • A reflection preventing film for forming a resist pattern and a process for forming the resist pattern using the film. The film comprises a copolymer was copolymerized of monomers which comprise at least one unsaturated carboxylic acid monomer, at least one epoxy group-containing unsaturated monomer, and at least one cinnamoylphenyl group-containing unsaturated monomer. The reflection preventing film exhibits a high halation preventing effect, involves no sublimation of radiation absorbing components contained therein, is free from occurrence of intermixing, possesses excellent heat resistance, exhibits a superb dry etching performance and storage stability, and produces resist patterns with excellent resolution and precision. The resist pattern forming process comprises forming the reflection preventing film on a substrate, forming a resist coating film on said reflection preventing film, irradiating the resist film with a radiation, and developing the resist coating film.
    • 用于形成抗蚀剂图案的防反射膜和使用该膜形成抗蚀剂图案的工艺。 该膜包含共聚物,其包含至少一种不饱和羧酸单体,至少一种含环氧基的不饱和单体和至少一种含肉桂酰基苯基的不饱和单体的单体。 防反射膜具有高的防晕效果,不包含其中包含的辐射吸收组分的升华,不会发生混合,具有优异的耐热性,表现出极好的干蚀刻性能和储存稳定性,并且产生具有优异分辨率的抗蚀剂图案 和精度。 抗蚀剂图形形成工艺包括在基板上形成反射防止膜,在所述反射防止膜上形成抗蚀剂涂膜,用辐射照射抗蚀剂膜,以及显影抗蚀剂涂膜。
    • 46. 发明授权
    • Perpendicular magnetic recording medium and magnetic recording/reproducing apparatus using the same
    • 垂直磁记录介质和使用其的磁记录/再现装置
    • US08771849B2
    • 2014-07-08
    • US12288654
    • 2008-10-21
    • Hiroaki NemotoIkuko TakekumaIchiro TamaiYoshiyuki Hirayama
    • Hiroaki NemotoIkuko TakekumaIchiro TamaiYoshiyuki Hirayama
    • G11B5/66
    • G11B5/732G11B5/65G11B5/66G11B5/667G11B5/7325
    • Embodiments of the present invention help allow accurate control of the magnetization reversal in a magnetic recording layer in small reversal units, whereby high-density recording can be achieved. According to one embodiment, by forming an intermediate layer having a granular structure similar to that of the magnetic recording layer below the magnetic recording layer, a continuous crystal grain boundary is formed at the interface between the magnetic recording layer and the intermediate layer, thereby preventing incomplete formation of the crystal grain boundary found in the initial growth layer of the magnetic recording layer. The intermediate layer comprises a non-magnetic alloy comprising Co and Cr as its main components and an oxide such as Al, Cr, Hf. Mg, Nb, Si, Ta, Ti and Zr. Further, the average content of the oxygen element in the intermediate layer is in the range from 6 at % to 20 at %.
    • 本发明的实施例有助于在小的反转单元中精确地控制磁记录层中的磁化反转,由此可以实现高密度记录。 根据一个实施例,通过在磁记录层下方形成具有类似于磁记录层的颗粒结构的中间层,在磁记录层和中间层之间的界面处形成连续的晶界,从而防止 在磁记录层的初始生长层中发现的晶界的不完全的形成。 中间层包括以Co和Cr为主要成分的非磁性合金和Al,Cr,Hf等氧化物。 Mg,Nb,Si,Ta,Ti和Zr。 此外,中间层中的氧元素的平均含量在6at%至20at%的范围内。
    • 48. 发明申请
    • MAGNETIC RECORDING MEDIUM USING LAYERS HAVING HIGHER- AND LOWER-HK ANISOTROPIC MAGNETIC FIELDS
    • 使用具有高,低HK HKS磁场的层的磁记录介质
    • US20110122525A1
    • 2011-05-26
    • US12938214
    • 2010-11-02
    • Hiroaki NemotoKiwamu TanahashiHiroyuki Nakagawa
    • Hiroaki NemotoKiwamu TanahashiHiroyuki Nakagawa
    • G11B5/66G11B21/02
    • G11B5/65G11B5/66
    • According to one embodiment, a magnetic recording medium includes a magnetic recording layer formed above a substrate, comprising: a first magnetic layer formed from a [Co/Pt]n multilayered film, wherein the first magnetic layer has a face-centered cubic (fcc) (111) crystal structure, the (111) direction being perpendicular to a film surface thereof, and a second magnetic layer comprising a CoCrPt or CoCrPt alloy film formed above the first magnetic layer, wherein the second magnetic layer has a hexagonal close packed (hcp) (00.1) crystal structure, the (00.1) direction being perpendicular to a film surface thereof. According to another embodiment, a system includes a magnetic recording medium as described above, a magnetic head for reading from and/or writing to the magnetic recording medium, a magnetic head slider for supporting the magnetic head, and a control unit coupled to the magnetic head for controlling operation of the magnetic head.
    • 根据一个实施例,磁记录介质包括形成在衬底上的磁记录层,包括:由[Co / Pt] n多层膜形成的第一磁性层,其中第一磁性层具有面心立方(fcc )(111)晶体结构,(111)方向垂直于其膜表面,以及第二磁性层,其包含形成在第一磁性层上方的CoCrPt或CoCrPt合金膜,其中第二磁性层具有六方密堆积 hcp)(00.1)晶体结构,(00.1)方向垂直于其膜表面。 根据另一个实施例,一种系统包括如上所述的磁记录介质,用于从磁记录介质读取和/或写入磁头的磁头,用于支撑磁头的磁头滑块,以及耦合到磁头的控制单元 用于控制磁头的操作。
    • 50. 发明申请
    • Perpendicular magnetic recording medium and magnetic recording and reproducing apparatus using the same
    • 垂直磁记录介质和使用其的磁记录和再现设备
    • US20090073599A1
    • 2009-03-19
    • US12231513
    • 2008-09-02
    • Hiroaki NemotoIkuko TakekumaZhengang Zhang
    • Hiroaki NemotoIkuko TakekumaZhengang Zhang
    • G11B5/596G11B5/62
    • G11B5/66G11B5/65G11B5/82
    • Embodiments of the present invention provide a perpendicular magnetic recording medium suitable for high density recording. According to one embodiment, a magnetic recording layer comprises four layers in which a first magnetic layer, a magnetic coupling layer, a second magnetic layer, and a third magnetic layer are formed above a substrate. The first magnetic layer and the second magnetic layer are perpendicular magnetization films containing an oxide, and ferromagnetically coupled with each other by way of the magnetic coupling layer, and they are, more preferably, a Co alloy layer containing an oxide. The third magnetic layer is ferromagnetically coupled with the second magnetic layer. The concentration of the oxide contained in the third magnetic layer is lower than the concentration of the oxide in the second recording layer, or the third magnetic layer does not contain the oxide. In this case, magnetic property is set for the anisotropic magnetic field Hk1 of the first magnetic layer and the anisotropic magnetic field Hk2 of the second magnetic layer, so as to satisfy: Hk1>Hk2.
    • 本发明的实施例提供适用于高密度记录的垂直磁记录介质。 根据一个实施例,磁记录层包括四个层,其中在衬底上形成第一磁性层,磁耦合层,第二磁性层和第三磁性层。 第一磁性层和第二磁性层是含有氧化物的垂直磁化膜,并且通过磁耦合层铁磁耦合,更优选是含有氧化物的Co合金层。 第三磁性层与第二磁性层铁磁耦合。 包含在第三磁性层中的氧化物的浓度低于第二记录层中的氧化物的浓度,或者第三磁性层不含氧化物。 在这种情况下,对于第一磁性层的各向异性磁场Hk1和第二磁性层的各向异性磁场Hk2设定磁特性,以满足:Hk1> Hk2。