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    • 39. 发明专利
    • Information recording method
    • 信息记录方法
    • JPS5755591A
    • 1982-04-02
    • JP12930880
    • 1980-09-19
    • Hitachi Ltd
    • MUNAKATA TADASUKEYAGI KUNIHIROMIYAZAKI MASARUYONEDA SHIYOUZOU
    • G11C17/00G03C1/705G11B7/241G11B9/08G11B11/00G11C11/23G11C11/30G11C11/42G11C13/04H01L31/08H04N1/21
    • H01L31/08G03C1/705G11B7/241G11B9/08G11B11/00G11B2007/2571G11B2007/25715G11C11/23G11C13/04H04N1/2108
    • PURPOSE: To produce in an easy process a recording medium which is capable of the recording with high denisity, by forming an oxidized film on a semiconductor single substrate made of GaAs or CdS and irradiating an electron beam to a specific region on the substrate to reduce the photovoltage on the surface of the specific region.
      CONSTITUTION: An oxidized film 12 is formed on a semiconductor single substrate 3 made of GaAs or CdS, and then a light beam hν is irradiated on the film 12. Thus the surface of the film 12 is electrically carged negatively owing to an electric field caused by the surface potential; while the rear surface of the substrate 3 is electrically charged positively. Then the surface photovoltage is produced between the upper and rear surfaces of the substrate 3. Under such conditions, an electron beam is irradiated to a specific region on the substrate 3 to cause the impairment of irradiation. As a result, the surface photovoltage can be extremely reduced at the impaired area although the beam hν is irradiated there. Accordingly the output can be greatly reduced for the surface photovoltage at the region where the electron beam is irradiated. In such way, a recording medium which is capable of the information recording with high density with use of an electron beam can be produced in a simple process under which just an oxidized film is formed.
      COPYRIGHT: (C)1982,JPO&Japio
    • 目的:通过在由GaAs或CdS制成的半导体单个衬底上形成氧化膜并且将电子束照射到衬底上的特定区域,以便于以易于制造的方式制造能够高度记录的记录介质,以减少 特定区域表面的光电压。 构成:在由GaAs或CdS制成的半导体单片基板3上形成氧化膜12,然后将光束hnu照射在膜12上。因此,由于电场引起的膜12的表面被电气堵塞 由表面电位; 同时衬底3的后表面被正电充电。 然后在基板3的上表面和后表面之间产生表面光电压。在这种条件下,电子束被照射到基板3上的特定区域以造成照射损坏。 结果,尽管在其上照射光束hnu,但是在损伤区域处的表面光电压可以极大地降低。 因此,对于电子束照射的区域的表面光电压,可以大大降低输出。 以这样的方式,可以在仅形成氧化膜的简单工艺中制造能够利用电子束进行高密度信息记录的记录介质。