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    • 31. 发明申请
    • INDUCTIVELY-COUPLED RF POWER SOURCE
    • 电感耦合射频电源
    • WO2007061879A1
    • 2007-05-31
    • PCT/US2006/044752
    • 2006-11-16
    • THERMO FISHER SCIENTIFIC INC.MATTABONI, Paul, J.MELLOR, RobertFLETCHER, Roger
    • MATTABONI, Paul, J.MELLOR, RobertFLETCHER, Roger
    • H03L7/06H03L5/02H05H1/46G01N21/73H05H1/30
    • H03L7/06G01N21/73H01J37/321H01J37/32174H03L5/02H05H1/46
    • A system and method are disclosed for implementing a power source including a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency. The power amplifier also generates a reference phase signal that is derived from the radio-frequency power signal. An impedance match provides the radio-frequency power signal to a plasma coil that has a variable resonance condition. A phase probe is positioned adjacent to the plasma coil to generate a coil phase signal corresponding to the adjustable operating frequency. A phase-locked loop then generates an RF drive signal that is based upon a phase relationship between the reference phase signal and the coil phase signal. The phase-locked loop provides the RF drive signal to the power amplifier to control the adjustable operating frequency, so that the adjustable operating frequency then tracks the variable resonance condition.
    • 公开了一种用于实现包括产生具有可调工作频率的射频功率信号的功率放大器的电源的系统和方法。 功率放大器还产生从射频功率信号导出的参考相位信号。 阻抗匹配为具有可变谐振条件的等离子体线圈提供射频功率信号。 相位探针定位成与等离子体线圈相邻以产生对应于可调工作频率的线圈相位信号。 然后,锁相环产生基于参考相位信号和线圈相位信号之间的相位关系的RF驱动信号。 锁相环将RF驱动信号提供给功率放大器以控制可调节的工作频率,从而可调整的工作频率然后跟踪可变谐振条件。