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    • 33. 发明专利
    • Heat treatment equipment, heat treatment method, control program and computer readable storage medium
    • 热处理设备,热处理方法,控制程序和计算机可读存储介质
    • JP2007201037A
    • 2007-08-09
    • JP2006015926
    • 2006-01-25
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • AOKI SHIGEKISAKAI YUICHIYAMASHITA MITSUOSHINYA HIROSHI
    • H01L21/027
    • F26B3/20F26B9/103F26B21/001G03F7/168G03F7/40H01L21/67109H01L21/67178H01L21/67248H01L21/677H01L21/67748
    • PROBLEM TO BE SOLVED: To provide heat treatment equipment and a heat treatment method in which high uniformity and high product yield are provided, and also to provide heat treatment equipment in which both a processing attaching importance to high uniformity and a processing attaching importance to high product yield are carried out. SOLUTION: The heat treatment equipment comprises: a plate 121 for heating a substrate W; a cover 123 surrounding the upper space of the heating plate 121; mechanisms 135 and 149 for forming an exhaust air flow in the upper space of the heating plate 121 by exhausting the inside of the cover 123; mechanisms 144 and 153 for forming a down flow supplied uniformly for the upper surface of the substrate W on the heating plate 121; and a control mechanism 155 for switching a mode heating the substrate W while forming a down flow by the down flow forming mechanisms 144, 153, and a mode heating the substrate W while forming an exhaust air flow by the exhaust air flow forming mechanisms 135 and 149. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供热处理设备和提供高均匀性和高产品收率的热处理方法,并且还提供热处理设备,其中兼具高均匀性的加工和加工附着 对产品产量的重要性进行了研究。 解决方案:热处理设备包括:用于加热衬底W的板121; 围绕加热板121的上部空间的盖123; 用于通过排出盖123的内部在加热板121的上部空间中形成排气的机构135和149; 用于形成用于加热板121上的基板W的上表面均匀地供给的下流的机构144和153; 以及控制机构155,用于在通过下流形成机构144,153形成下流的同时切换加热基板W的模式,以及通过排气流形成机构135形成排气流的同时加热基板W, 149.版权所有(C)2007,JPO&INPIT
    • 36. 发明专利
    • System for curing composite material and method therefor
    • 用于固化复合材料的方法及其方法
    • JP2003340837A
    • 2003-12-02
    • JP2003109113
    • 2003-04-14
    • Northrop Grumman Corpノースロップ グラマン コーポレイション
    • LAMB MICHAEL SWYATT FORREST D
    • B64F5/00B29C35/04B29C35/16B29L31/30F26B9/00F26B21/00F26B25/06
    • F26B25/066B29C73/34B29C2035/046F26B9/003F26B21/001
    • PROBLEM TO BE SOLVED: To provide a system for curing a composite material, and a method therefor.
      SOLUTION: The system for curing the composite material includes an oven having an inner wall for clearly deciding an inner chamber, an outer wall for defining the outer chamber between the inner and outer walls, a hot air distribution manifold arranged in the inner chamber, a cooling air distribution manifold arranged in the outer chamber and an exhaust flue having a cold air distribution conduit connected to the outer chamber. The system further includes the hot air supply system connected to the hot air distribution manifold of the oven operable so as to supply hot air to the hot air distribution manifold, a cold air distribution manifold, the cold air supply system connected to the cold air distribution conduit operable so as to supply cold air to them and a plurality of hot air exhaust conduits formed to the inner wall of the oven. The hot air exhaust conduit is fitted so as to transport hot air in the inner chamber to the outer chamber.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种用于固化复合材料的系统及其方法。 解决方案:用于固化复合材料的系统包括具有用于清楚地确定内室的内壁的烘箱,用于在内壁和外壁之间限定外室的外壁,布置在内壁中的热空气分配歧管 布置在外室中的冷却空气分配歧管和排气烟道,其具有连接到外室的冷空气分配导管。 该系统还包括连接到烤箱的热空气分配歧管的热空气供应系统,其可操作以便将热空气供应到热空气分配歧管,冷空气分配歧管,冷空气供应系统连接到冷空气分配 可操作以便向其供应冷空气的导管和形成到烘箱内壁的多个热空气排气导管。 热排气导管被装配成将内室中的热空气输送到外室。 版权所有(C)2004,JPO