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    • 34. 发明申请
    • EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
    • 曝光装置和装置制造方法
    • WO2011162146A4
    • 2012-04-05
    • PCT/JP2011063753
    • 2011-06-09
    • CANON KKUCHIDA SHINJI
    • UCHIDA SHINJI
    • G03F7/20
    • G03F7/70716G03F7/70858
    • The present invention provides an exposure apparatus which forms a pattern on a substrate, the apparatus including an electron optical system (10) configured to guide a charged particle beam onto the substrate (ST), a stage (20) configured to hold the substrate, an electromagnetic actuator (32) configured to drive the stage, a magnetic shield (34) which is placed in the stage so as to surround the electromagnetic actuator, a measurement member (50) configured to measure a position of the stage, a coil member (60) configured to generate a magnetic field on a path of the charged particle beam between the electron optical system and the substrate, and a control member (90) configured to control the coil member so as to reduce a fluctuation of the magnetic field on the path, the magnetic field on the path fluctuating while the stage being driven by the electromagnetic actuator, based on the position of the stage measured by the measurement member.
    • 本发明提供了一种在基板上形成图案的曝光装置,该装置包括:电子光学系统(10),其将带电粒子束引导到基板(ST)上;阶段(20),被配置为保持基板; 被配置为驱动所述平台的电磁致动器(32),放置在所述台中以围绕所述电磁致动器的磁屏蔽(34),配置成测量所述台的位置的测量构件(50),线圈构件 (60),被配置为在所述电子光学系统和所述基板之间的所述带电粒子束的路径上产生磁场;以及控制部件(90),被配置为控制所述线圈部件,以减少所述磁场的波动 该路径,基于由测量构件测量的台架的位置,路径上的磁场在由电磁致动器驱动的台阶上波动。
    • 35. 发明申请
    • POWER SOURCE CIRCUIT
    • 电源电路
    • WO2012011602A2
    • 2012-01-26
    • PCT/JP2011067012
    • 2011-07-15
    • CANON KKIDE TAKESHISEKIJIMA DAISHIRO
    • IDE TAKESHISEKIJIMA DAISHIRO
    • H02M1/12
    • H02M1/32H02M1/12H02M7/217H02M2001/123
    • In a power source circuit including a switching circuit 8 as a power conversion circuit for converting by a switching operation at least one of a frequency and a voltage of an alternating voltage from an alternating power source 2 via a pair of supply lines 3 and 4, one supply line 3 includes a fuse 5 as an excess current protection element, and between a ground line 10 and one supply line 3, a first line bypass capacitor 6 is connected. Between the ground line 10 and another supply line 4, a second line bypass capacitor 7 is connected, and another supply line 4 includes an inductor 9. With this configuration, an unbalanced state of the circuit due to the excess current protection element is reduced so as to restrain the common mode noise.
    • 在包括作为功率转换电路的开关电路8的电源电路中,通过经由一对电源线3和4从交流电源2的交流电压的频率和电压中的至少一个进行开关操作来转换, 一个电源线3包括作为过电流保护元件的保险丝5,并且在地线10和一个电源线3之间连接有第一线路旁路电容器6。 在地线10与另一根电源线4之间连接有第二线路旁路电容器7,另一条电源线4包括电感器9.由此,由于过电流保护元件导致的电路的不平衡状态减少, 以抑制共模噪声。
    • 36. 发明申请
    • X-RAY IMAGING APPARATUS
    • X射线成像装置
    • WO2011105306A1
    • 2011-09-01
    • PCT/JP2011053585
    • 2011-02-14
    • CANON KKOUCHI CHIDANE
    • OUCHI CHIDANE
    • A61B6/03G01N23/04G01N23/20G21K1/06
    • G21K1/06A61B6/484G01N23/046G01N23/20075G01N2223/064G01N2223/419G21K2207/005
    • An X-ray imaging apparatus which takes an image of an object to be detected, comprises: a first grating to form a periodic bright-dark pattern by a Talbot effect, based on an X-ray from an X-ray source; a second grating, disposed at a position where the bright-dark pattern is formed, to block a part of the bright-dark pattern; a detector to detect an X-ray intensity distribution of the X-ray which passed through the second grating; and a calculator to calculate phase information of the X-ray based on the detected X-ray intensity distribution, wherein the second grating includes a first region having a first blocking pattern and a second region having a second blocking pattern, and a direction in which the first blocking pattern blocks a bright section of the bright-dark pattern is different from a direction in which the second blocking pattern blocks the bright section of the bright-dark pattern.
    • 一种拍摄待检测物体的图像的X射线成像设备包括:第一光栅,基于来自X射线源的X射线,通过Talbot效应形成周期性的明暗图案; 布置在形成所述明暗图案的位置处的第二光栅,以遮挡所述明暗图案的一部分; 检测器,用于检测穿过第二光栅的X射线的X射线强度分布; 以及计算器,用于基于检测到的X射线强度分布来计算X射线的相位信息,其中第二光栅包括具有第一阻挡图案的第一区域和具有第二阻挡图案的第二区域,以及方向 第一阻挡图案阻挡亮暗图案的明亮部分的方向不同于第二阻挡图案阻挡明暗图案的明亮部分的方向。
    • 39. 发明申请
    • MEASURING APPARATUS
    • 测量装置
    • WO2010137451A3
    • 2011-03-17
    • PCT/JP2010057916
    • 2010-04-28
    • CANON KKYODA HARUOOIKAWA KATSUYANAGAE KENICHI
    • YODA HARUOOIKAWA KATSUYANAGAE KENICHI
    • G01S7/52G01S15/89G10K11/34G10K11/35
    • G01S7/52046A61B8/483G01S7/52085G01S15/8909G01S15/8915G01S15/8934G01S15/8945G01S15/8993G01S15/8997G10K11/346G10K11/352
    • Provided is a measuring apparatus, including: a moving mechanism for moving a probe (1) in an elevation direction; a first delay and sum circuit (9) for performing delay and sum of reception signals at individual positions along the elevation direction to output a first add signal (10); a signal extraction circuit (24) for letting an output of the first delay and sum circuit (9) to pass through delay circuits (23a, 23b) to output in parallel first add signals obtained at different positions; a second delay and sum circuit (27) for performing delay and sum of the first add signals output from the signal extraction circuit (24) to output a second add signal; and an image processing circuit (11,12,CPU) for generating image data by using the second add signal. Accordingly, image resolution in the elevation direction may be improved with a simple structure without deteriorating an image acquisition speed in the measuring apparatus for obtaining an ultrasonic image.
    • 提供一种测量装置,包括:移动机构,用于沿探测方向移动探测器(1); 第一延迟和和电路(9),用于在沿着高度方向的各个位置处执行接收信号的延迟和和,以输出第一加法信号(10); 信号提取电路(24),用于使第一延迟和和电路(9)的输出通过延迟电路(23a,23b)并行输出在不同位置获得的第一加法信号; 第二延迟和和电路(27),用于执行从信号提取电路(24)输出的第一加法信号的延迟和和,以输出第二加法信号; 以及用于通过使用第二加法信号产生图像数据的图像处理电路(11,12,CPU)。 因此,通过简单的结构可以提高仰角方向的图像分辨率,而不会使用于获得超声波图像的测量装置中的图像获取速度恶化。