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31. 发明授权

US07119953B2 Phase contrast microscope for short wavelength radiation and imaging method 失效
标题翻译：相位显微镜用于短波长辐射和成像方法
公开(公告)号：US07119953B2
公开(公告)日：2006-10-10
申请号：US10331108
申请日：2002-12-27
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02B21/06 , G02K7/00 , G02B21/00 , G02K1/06
CPC分类号： A61B6/484 , A61B6/4092 , G21K7/00 , G21K2207/005 , Y10S359/90 , Y10S438/975
摘要： A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.
摘要翻译：相位X射线显微镜具有相位板，其被放置在物镜附近并刚性地附接到物镜上以形成复合光学元件。这使得显微镜对准的初始和长期维护变得容易。在一个示例中，它们被制造在相同的高透光性基板上。使用这种复合光学器件允许在仪器寿命期内不会改变的基于光刻的对准。而且，在一种配置中，相位板位于测试对象和目标之间。

32. 发明申请

US20060192129A1 Lens Bonded X-Ray Scintillator System and Manufacturing Method Therefor 有权
标题翻译：镜片粘结X射线闪烁体系及其制造方法
公开(公告)号：US20060192129A1
公开(公告)日：2006-08-31
申请号：US11278839
申请日：2006-04-06
申请人： Wenbing Yun , Yuxin Wang , David Trapp
发明人： Wenbing Yun , Yuxin Wang , David Trapp
IPC分类号： G01T1/20
CPC分类号： G01T1/2002 , G01T1/20
摘要： A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.
摘要翻译：用于对X射线成像的闪烁CCD检测器系统使用具有在1至20keV范围内的光子能量的X射线。检测器与现有系统不同之处在于它提供比千分尺更高的分辨率，高达95％的高检测量子效率。该检测器的设计也可以用作能量过滤器，以去除高能X射线。该检测器可用于广泛的应用，包括X射线成像，光谱和衍射。闪烁体光学系统具有闪烁体材料，其具有用于收集闪烁体材料中产生的光的透镜系统。衬底用于将闪烁体材料与透镜系统间隔开。

33. 发明授权

US07057187B1 Scintillator optical system and method of manufacture 有权
标题翻译：闪烁光学系统及其制造方法
公开(公告)号：US07057187B1
公开(公告)日：2006-06-06
申请号：US10704382
申请日：2003-11-07
申请人： Wenbing Yun , Yuxin Wang , David R. Trapp
发明人： Wenbing Yun , Yuxin Wang , David R. Trapp
IPC分类号： G01J1/58
CPC分类号： G01T1/2002 , G01T1/20
摘要： A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.
摘要翻译：用于对X射线成像的闪烁CCD检测器系统使用具有在1至20keV范围内的光子能量的X射线。检测器与现有系统不同之处在于它提供比千分尺更高的分辨率，高达95％的高检测量子效率。该检测器的设计也可以用作能量过滤器，以去除高能X射线。该检测器可用于广泛的应用，包括X射线成像，光谱和衍射。闪烁体光学系统具有闪烁体材料，其具有用于收集闪烁体材料中产生的光的透镜系统。衬底用于将闪烁体材料与透镜系统间隔开。

34. 发明申请

US20050282300A1 Back-end-of-line metallization inspection and metrology microscopy system and method using x-ray fluorescence 审中-公开
标题翻译：后端金属化检测和计量显微镜系统和使用X射线荧光的方法
公开(公告)号：US20050282300A1
公开(公告)日：2005-12-22
申请号：US11177227
申请日：2005-07-08
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Kenneth Nill
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Kenneth Nill
IPC分类号： G01N23/225 , G01R31/26 , G06F19/00 , H01L21/44 , H01L21/66
CPC分类号： G01N23/2252
摘要： Systems and methods for performing inspection and metrology operations on metallization processes such as on back-end-of-line (BEOL) metallization thickness and step coverage are disclosed. Specific examples include measurements of thickness and uniformity of barrier layers, including tantalum for example, and seed layers, including copper for example, in Damascene, including dual-Damascene, trenches during the interconnect fabrication steps of integrated circuit production. The invention also relates to the detection and measurement of void formation during and after copper electroplating. The invention utilizes x-ray fluorescence to measure the absolute thicknesses and the thickness uniformity of the barrier layers in the trenches, the copper seed layers for electroplating, and the final copper interconnects.
摘要翻译：公开了用于对金属化过程进行检查和计量操作的系统和方法，例如在后端（BEOL）金属化厚度和台阶覆盖。具体实例包括例如包括钽的阻挡层的厚度和均匀性的测量，以及例如在镶嵌中的包括铜的种子层（包括双镶嵌），在集成电路生产的互连制造步骤期间的沟槽。本发明还涉及在铜电镀期间和之后的空隙形成的检测和测量。本发明利用x射线荧光来测量沟槽中的势垒层的绝对厚度和厚度均匀性，用于电镀的铜籽晶层和最终的铜互连。

35. 发明申请

US20050168820A1 ACHROMATIC FRESNEL OPTICS FOR ULTRAVIOLET AND X-RAY RADIATION 有权
标题翻译：用于超紫外线和X射线辐射的高光谱光学
公开(公告)号：US20050168820A1
公开(公告)日：2005-08-04
申请号：US10134026
申请日：2002-04-25
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02B3/08 , G02B27/44 , G03F7/20
CPC分类号： G03F7/70308 , G02B3/08 , G02B27/4211 , G02B27/4216 , G02B27/4222 , G03F7/70316
摘要： An achromatic Fresnel optic that combines a Fresnel zone plate and a refractive Fresnel lens. The zone plate provides high resolution for imaging and focusing, while the refractive lens takes advantage of the refraction index change properties of appropriate elements near absorption edges to recombine the electromagnetic radiation of different energies dispersed by the zone plate. This compound lens effectively solves the high chromatic aberration problem of zone plates. The AFO has a wide range of potential applications in lithography, microimaging with various contrast mechanisms and measurement techniques.
摘要翻译：一种消色差菲涅耳光学器件，其结合了菲涅尔波带板和折射菲涅尔透镜。区域板提供用于成像和聚焦的高分辨率，而折射透镜利用靠近吸收边缘的适当元件的折射率变化特性来重新组合由区域板分散的不同能量的电磁辐射。该复合透镜有效地解决了区域板的高色差问题。 AFO在光刻，各种对比度机制和测量技术的微成像中具有广泛的潜在应用。

36. 发明授权

US06914723B2 Reflective lithography mask inspection tool based on achromatic Fresnel optics 失效
标题翻译：基于消色差菲涅尔光学的反光光刻掩模检测工具
公开(公告)号：US06914723B2
公开(公告)日：2005-07-05
申请号：US10427723
申请日：2003-04-29
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02B3/08 , G02B27/44 , G03F7/20
CPC分类号： G02B27/4272 , G01N21/956 , G01N2021/8822 , G01N2021/95676 , G02B3/08 , G02B27/4211 , G03F1/84
摘要： A mask blank inspection tool includes an AFO having a diffractive lens and a refractive lens formed on a common substrate. The diffractive lens is a Fresnel zone plate and the refractive lens is a refractive Fresnel lens. The AFO is used to image light from a defect particle on a multilayer mask blank or the surface of the multilayer mask blank to a detector.
摘要翻译：掩模检查工具包括具有衍射透镜和形成在公共基板上的折射透镜的AFO。衍射透镜是菲涅耳带片，折射透镜是折射菲涅耳透镜。 AFO用于将来自多层掩模坯料上的缺陷颗粒或多层掩模坯料的表面的光成像到检测器。

37. 发明授权

US09083400B2 Multi-antenna signal processing method and device in uplink system 有权
标题翻译：上行系统中的多天线信号处理方法和装置
公开(公告)号：US09083400B2
公开(公告)日：2015-07-14
申请号：US14131321
申请日：2011-12-28
申请人： Chunli Liang , Shuqiang Xia , Weiwei Yang , Yuxin Wang , Peng Hao
发明人： Chunli Liang , Shuqiang Xia , Weiwei Yang , Yuxin Wang , Peng Hao
IPC分类号： H04L27/00 , H04B7/04 , H04B7/06 , H04L1/06
CPC分类号： H04B7/0456 , H04B7/0413 , H04B7/0619 , H04B7/068 , H04L1/06
摘要： The disclosure discloses a multi-antenna signal processing method in an uplink system. The method includes that: after scrambling, modulation, layer mapping, pre-coding, transmission pre-coding, resource mapping and Single Carrier Frequency Division Multiple Access (SC-FDMA) signal generation are performed successively on a coded bit sequence corresponding to each codeword, a resulted signal is transmitted from each transmitting antenna port. The disclosure also provides a multi-antenna signal processing device in an uplink system. With the method and the device according to the disclosure, a lower Peak-to-Average Power Ratio (PAPR) or Cubic Metric (CM) of a signal to be sent can be ensured without imposing any constraint on a pre-coding matrix, thus reducing the cost and power consumption of a terminal whiling increasing transmission performance of the system.
摘要翻译：本公开公开了一种上行链路系统中的多天线信号处理方法。该方法包括：在对每个码字对应的编码比特序列上连续执行加扰后的调制，层映射，预编码，传输预编码，资源映射和单载波频分多址（SC-FDMA）信号生成从每个发送天线端口发送得到的信号。本公开还提供了一种在上行链路系统中的多天线信号处理设备。利用根据本公开的方法和装置，可以确保要发送的信号的较低的峰值平均功率比（PAPR）或立方度量（CM），而不对预编码矩阵施加任何约束，因此降低终端的成本和功耗，提高系统的传输性能。

38. 发明授权

US08718001B2 System and method for allocating sounding reference signal resource 有权
标题翻译：用于分配探测参考信号资源的系统和方法
公开(公告)号：US08718001B2
公开(公告)日：2014-05-06
申请号：US13497297
申请日：2010-06-30
申请人： Rong Zhang , Peng Hao , Bin Yu , Bo Jin , Peng Zhu , Yuxin Wang
发明人： Rong Zhang , Peng Hao , Bin Yu , Bo Jin , Peng Zhu , Yuxin Wang
IPC分类号： H04W72/04
CPC分类号： H04L1/0027 , H04L5/0048 , H04W72/042
摘要： A system and a method for allocating Sounding Reference Signal (SRS) resources are provided in the present invention, the method includes: an e-Node-B (eNB) allocating a SRS bandwidth with 4n Resource Blocks (RBs) to a terminal, and equally dividing a time domain sequence of a SRS into t portions in the SRS bandwidth; the eNB configuring a time domain RePetition Factor (RPF) used by the UE, and the eNB configuring the UE to use one or more cyclic shifts in L cyclic shifts for each UE; then the eNB notifying the UE of a value of the time domain RPF, a location of a used frequency comb and a used cyclic shift by signaling, wherein n is a positive integer; the RPF satisfies a following condition: 48 × n RPF can be exactly divided by 12; t is an integer by which 48 × n RPF can be exactly divided; and L≦t.
摘要翻译：本发明提供了一种用于分配探测参考信号（SRS）资源的系统和方法，该方法包括：向终端分配具有4n个资源块（RB）的SRS带宽的e-Node-B（eNB），以及将SRS的时域序列等分成SRS带宽中的t个部分; 所述eNB配置所述UE使用的时域RePetition Factor（RPF），所述eNB配置所述UE对每个UE使用L个循环移位中的一个或多个循环移位; 然后eNB通过UE通知信令的时域RPF的值，所使用的频率梳的位置和使用的循环移位，其中n是正整数; RPF满足以下条件：48×n RPF可以精确地除以12; t是48×n RPF可以精确分割的整数; 和L＆nlE; t。

39. 外观设计

USD691903S1 Sheet inspection machine 有权
标题翻译：纸张检验机
公开(公告)号：USD691903S1
公开(公告)日：2013-10-22
申请号：US29419436
申请日：2012-04-27
申请人： Yonggang Tong , Yuxin Wang , Tingting Sun
设计人： Yonggang Tong , Yuxin Wang , Tingting Sun

40. 发明授权

US08531323B2 Pipelined analog-to-digital converter and its single redundancy bit digital correction technique 有权
标题翻译：流水线模数转换器及其单冗余位数字校正技术
公开(公告)号：US08531323B2
公开(公告)日：2013-09-10
申请号：US13142367
申请日：2010-06-21
申请人： Ting Li , Yuxin Wang , Xiaofeng Shen , Shutao Zhou , Tao Liu , Mingyuan Xu , Ruzhang Li , Kaiquan He
发明人： Ting Li , Yuxin Wang , Xiaofeng Shen , Shutao Zhou , Tao Liu , Mingyuan Xu , Ruzhang Li , Kaiquan He
IPC分类号： H03M1/06
CPC分类号： H03M1/0695 , H03M1/168
摘要： A pipeline A/D converter and its single redundancy bit digital correction are provided. The single redundancy bit digital correction includes the following steps: substages except for the last one quantizes input voltage, calculates the residual voltage, which is amplified and shifted to the middle part of the reference voltage range, and outputs to the following substage until the last one, which only quantizes the input voltage; the code and offset code of each substage corresponding to the quantized thermometer code are calculated; the offset codes of all stages are added by weight to get total offset code; and codes of all substages are added by weight, to which the total offset code is added. The comparator offset error is corrected to obtain an output code which identifies the negative or positive overflow of input signals. The A/D converter adopting the above digital correction is provided.
摘要翻译：提供流水线A / D转换器及其单个冗余位数字校正。单个冗余位数字校正包括以下步骤：除最后一个以外的子步长量化输入电压，计算被放大并转移到参考电压范围中间部分的剩余电压，并输出到下一个子站直到最后一个一个，仅量化输入电压; 计算与量化温度计代码相对应的每个子级的代码和偏移代码; 所有阶段的偏移代码通过权重相加得到总偏移代码; 并且通过加权添加所有子级的代码，添加总偏移代码。校正比较器偏移误差以获得识别输入信号的负或正溢出的输出代码。提供采用上述数字校正的A / D转换器。

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