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31. 发明授权

US08188924B2 RF powder and method for manufacturing the same 有权
标题翻译： RF粉末及其制造方法
公开(公告)号：US08188924B2
公开(公告)日：2012-05-29
申请号：US12153661
申请日：2008-05-22
申请人： Yuji Furumura
发明人： Yuji Furumura
IPC分类号： H01Q1/38
CPC分类号： G06K19/07749 , G06K19/0723 , G06K19/07767
摘要： The present invention provides an RF powder having a characteristic to be used as a powder (powdery substance) which is composed of a large quantity of particles and has a collective form, wherein each of a large quantity of particles composing the powder is smaller in size as compared with a current IC tag chip and is used as a device having a function substantially equivalent to the IC tag chip, use form thereof is not individual device use but powder use, treatment is easy, a manufacturing cost is very low in respect of a unit cost of each particle, and a practical use is very high, and a method for manufacturing the same. An RF powder 11 is used in a powder form, wherein each particle 11a in the powder has an integrated circuit 13 formed on a substrate 12, an insulating layer 14 formed on the integrated circuit, and an antenna element 15 formed on the insulating layer.
摘要翻译：本发明提供了具有作为粉末（粉状物质）特性的RF粉末（粉状物质），其由大量的颗粒组成并且具有集体形式，其中大量构成粉末的颗粒的尺寸较小与目前的IC标签芯片相比，作为具有与IC标签芯片基本相当的功能的器件，其使用形式不是单独的器件用途，而是粉末使用，处理容易，制造成本相当低每个颗粒的单位成本和实际应用非常高，并且其制造方法。 RF粉末11以粉末形式使用，其中粉末中的每个颗粒11a具有形成在基板12上的集成电路13，形成在集成电路上的绝缘层14和形成在绝缘层上的天线元件15。

32. 发明申请

US20090289228A1 RF powder and method for manufacturing the same 有权
标题翻译： RF粉末及其制造方法
公开(公告)号：US20090289228A1
公开(公告)日：2009-11-26
申请号：US12153661
申请日：2008-05-22
申请人： Yuji Furumura
发明人： Yuji Furumura
IPC分类号： H01B1/00 , H05K3/00
CPC分类号： G06K19/07749 , G06K19/0723 , G06K19/07767
摘要： The present invention provides an RF powder having a characteristic to be used as a powder (powdery substance) which is composed of a large quantity of particles and has a collective form, wherein each of a large quantity of particles composing the powder is smaller in size as compared with a current IC tag chip and is used as a device having a function substantially equivalent to the IC tag chip, use form thereof is not individual device use but powder use, treatment is easy, a manufacturing cost is very low in respect of a unit cost of each particle, and a practical use is very high, and a method for manufacturing the same. An RF powder 11 is used in a powder form, wherein each particle 11a in the powder has an integrated circuit 13 formed on a substrate 12, an insulating layer 14 formed on the integrated circuit, and an antenna element 15 formed on the insulating layer.
摘要翻译：本发明提供了具有作为粉末（粉状物质）特性的RF粉末（粉状物质），其由大量的颗粒组成并且具有集体形式，其中大量构成粉末的颗粒的尺寸较小与目前的IC标签芯片相比，作为具有与IC标签芯片基本相当的功能的器件，其使用形式不是单独的器件用途，而是粉末使用，处理容易，制造成本相当低每个颗粒的单位成本和实际应用非常高，并且其制造方法。 RF粉末11以粉末形式使用，其中粉末中的每个颗粒11a具有形成在基板12上的集成电路13，形成在集成电路上的绝缘层14和形成在绝缘层上的天线元件15。

33. 发明授权

US4510177A Method and apparatus for vapor phase deposition 失效
标题翻译：气相沉积的方法和装置
公开(公告)号：US4510177A
公开(公告)日：1985-04-09
申请号：US405082
申请日：1982-08-04
申请人： Yuji Furumura , Takeshi Nishizawa
发明人： Yuji Furumura , Takeshi Nishizawa
IPC分类号： C30B25/02 , B01J12/02 , C23C16/44 , C23C16/455 , C30B25/14 , H01L21/205 , H01L21/365 , H01L21/383
CPC分类号： C23C16/4558 , C30B25/14 , Y10S118/90
摘要： A plurality of wafers on which semiconductor films having a uniform thickness and specific resistivity are obtained by a horizontal type low pressure vapor phase deposition system, i.e., a system using a horizontal reaction tube, in which wafers are aligned in parallel and transverse to a longitudinal axis of the tube. A main gas is introduced from a main inlet into the reaction tube and an auxiliary gas including an impurity gas is introduced from an auxiliary inlet into the reaction tube in such a manner that the impurity gas diffuses toward the main inlet along an inner wall of the reaction tube.
摘要翻译：通过水平型低压气相沉积系统获得具有均匀厚度和电阻率的半导体膜的多个晶片，即，使用水平反应管的系统，其中晶片平行排列并横向于纵向管的轴线。从主入口将主要气体引入反应管中，并且将辅助气体从辅助入口引入到反应管中，使得杂质气体沿主要入口沿主体入口沿内壁扩散反应管。

34. 发明授权

US08766802B2 Base data management system 有权
标题翻译：基础数据管理系统
公开(公告)号：US08766802B2
公开(公告)日：2014-07-01
申请号：US12516500
申请日：2007-11-26
申请人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
发明人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
IPC分类号： G08B13/14
CPC分类号： B42D25/29 , B42D2033/46 , G07D7/01
摘要： A base data management system is provided which can grasp specific data recorded in a plate-like or sheet-like object having high property values, such as a variety of cards, paper money, and securities, in real time, and can manage and track circulating paper money or the like. The base data management system includes a base data reader including a reading mechanism that reads specific data or resonance frequency recorded in a base with a magnetic field coupling and a transmitting mechanism that transmits the specific frequency date read by the reading mechanism and reader information. The system also includes a host computer including a data receiving mechanism that receives the specific frequency date and reader information transmitted from the base data reader through a network, a storage device that stores the specific data and reader information received by the data receiving mechanism, and an output mechanism that processes the data stored in the storage device or compares the data with other data and thus outputs the data.
摘要翻译：提供了一种基本数据管理系统，其可以实时掌握记录在具有高性能值的板状或片状物体（例如各种卡片，纸币和证券）中的特定数据，并且可以管理和跟踪循环纸币等。基础数据管理系统包括基本数据读取器，其包括读取机构，其读取记录在基座中的特定数据或谐振频率与磁场耦合;以及发送机构，发送由读取机构读取的特定频率日期和读取器信息。该系统还包括主计算机，其包括接收特定频率日期的数据接收机构和通过网络从基本数据读取器发送的读取器信息，存储由数据接收机构接收的特定数据和读取器信息的存储装置，以及处理存储在存储装置中的数据或将数据与其他数据进行比较的输出机构，从而输出数据。

35. 发明授权

US08686743B2 Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus 有权
标题翻译：基板，基板保持装置，分析装置，程序，检测系统，半导体装置，显示装置和半导体制造装置
公开(公告)号：US08686743B2
公开(公告)日：2014-04-01
申请号：US12592219
申请日：2009-11-19
申请人： Yuji Furumura , Naomi Mura , Koki Tamagawa , Tadayoshi Yoshikawa , Hiroshi Yonekura
发明人： Yuji Furumura , Naomi Mura , Koki Tamagawa , Tadayoshi Yoshikawa , Hiroshi Yonekura
IPC分类号： G01R27/28
CPC分类号： H01L21/67248 , G01K7/32 , G01K11/265 , H01J37/32935
摘要： A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate (e.g., the temperature of the substrate or the amount of charge stored in the substrate) flows through the coil.
摘要翻译：一种包括传感器单元的基板，其中传感器单元包括至少一次布置在传感器表面上或嵌入在其表面内和附近的线圈。通过这种布置，对应于相对于基板的信息（例如，基板的温度或存储在基板中的电荷量）的电流流过线圈。

36. 发明申请

US20100072426A1 METHOD FOR PROVIDING RF POWDER AND RF POWDER-CONTAINING LIQUID 有权
标题翻译：用于提供RF粉末和含有RF粉末的液体的方法
公开(公告)号：US20100072426A1
公开(公告)日：2010-03-25
申请号：US12516705
申请日：2007-11-26
申请人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
发明人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
IPC分类号： H01B1/00
CPC分类号： G06K19/07749 , G06K19/07775 , G06K19/07779 , G07D7/01 , G07D7/04 , H01Q1/2283 , H01Q7/005
摘要： Provided are a method for providing an RF powder that is easily handled because it is used as a powder (powdery state), not used as individual elements, and is high in applicability and extensibility, extremely low in manufacturing cost in respect of the unit price of each particle, and extremely high in practicability; and an RF powder-containing liquid. In the method for providing an RF powder, an RF powder composed of a large number of RF powder particles 11a is provided to a user in a state of being stored in a container 1. The RF powder is stored in the container 1 together with a medium that prevents the large number of RF powder particles 11a from adhering to one another. The medium is a liquid having a specific color determined so as to correspond to the characteristic frequency of the RF powder.
摘要翻译：提供一种用于提供易于处理的RF粉末的方法，因为它被用作粉末（粉末状态），不用作单独元件，并且具有高适用性和可扩展性，制造成本在单价方面极低的颗粒，实用性极高; 和含有RF粉末的液体。在提供RF粉末的方法中，以存储在容器1中的状态向用户提供由大量RF粉末颗粒11a组成的RF粉末.RF粉末与容器1一起存储在容器1中可防止大量RF粉末颗粒11a彼此附着的介质。介质是具有确定为与RF粉末的特征频率相对应的特定颜色的液体。

37. 发明申请

US20100071746A1 RF POWDER PARTICLES, RF POWDER, AND METHOD FOR EXCITING RF POWDER 有权
标题翻译： RF粉末颗粒，RF粉末和用于提炼RF粉末的方法
公开(公告)号：US20100071746A1
公开(公告)日：2010-03-25
申请号：US12516715
申请日：2007-11-26
申请人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
发明人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
IPC分类号： H01L31/042
CPC分类号： B42D25/369 , B42D25/29 , B42D2033/16 , B42D2033/20 , B42D2033/46 , G06K19/0704 , G06K19/07749 , G06K19/07775 , G06K19/07779 , G07D7/01
摘要： RF particles that can render more difficult fabrication of counterfeit notes and the like, can generate radiofrequency magnetic fields by oscillation of a tank circuit having a particular resonant frequency, and that can easily and reliably supply electric power for oscillation, RF powder, and a method for exciting the RF powder are provided.In an RF powder particle 21, a coil 24 (inductance element) serving as an antenna and a capacitor 25 (capacitance element) connected to the coil are formed on an insulating film surface of a substrate 22. The inductance element and the capacitance element form a tank circuit 34, and a photovoltaic cell 30 for supplying power to the tank circuit 34 is disposed on the substrate 22.
摘要翻译：可以使制造伪钞等更加困难的射频粒子能够通过具有特定共振频率的振荡电路的振荡而产生射频磁场，能够容易且可靠地供给振荡用电力，RF粉末和方法为激励RF粉末提供。在RF粉末颗粒21中，在基板22的绝缘膜表面上形成有用作天线的线圈24（电感元件）和连接到线圈的电容器25（电容元件）。电感元件和电容元件形式一个储能电路34和一个用于向储能电路34供电的光伏电池30设置在基板22上。

38. 发明申请

US20100060427A1 BASE DATA MANAGEMENT SYSTEM 有权
标题翻译：基础数据管理系统
公开(公告)号：US20100060427A1
公开(公告)日：2010-03-11
申请号：US12516500
申请日：2007-11-26
申请人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
发明人： Yuji Furumura , Naomi Mura , Shinji Nishihara , Katsuhiro Fujino , Katsuhiko Mishima , Susumu Kamihashi
IPC分类号： H04Q5/22
CPC分类号： B42D25/29 , B42D2033/46 , G07D7/01
摘要： A base data management system is provided which can grasp specific data recorded in a plate-like or sheet-like object having high property values, such as a variety of cards, paper money, and securities, in real time, and can manage and track circulating paper money or the like. The base data management system 100 includes a base data reader 201 including reading means 203 that reads specific data or resonance frequency recorded in a base 10 with a magnetic field coupling and transmitting means 205 that transmits the specific frequency date read by the reading means and reader information. The system also includes a host computer 101 including data receiving means 102 that receives the specific frequency date and reader information transmitted from the base data reader through a network 300, storage means 103 that stores the specific data and reader information received by the data receiving means, and output means 104 that processes the data stored in the storage means or compares the data with other data and thus output the data.
摘要翻译：提供了一种基本数据管理系统，其可以实时掌握记录在具有高性能值的板状或片状物体（例如各种卡片，纸币和证券）中的特定数据，并且可以管理和跟踪循环纸币等。基本数据管理系统100包括基本数据读取器201，其包括读取装置203，读取装置203利用磁场耦合读取记录在基座10中的特定数据或共振频率，并且发送装置205发送由读取装置读取的特定频率日期信息。该系统还包括主计算机101，其包括数据接收装置102，其接收通过网络300从基本数据读取器发送的特定频率日期和读取器信息;存储装置103，存储由数据接收装置接收的特定数据和读取器信息以及处理存储在存储装置中的数据或将数据与其他数据进行比较并由此输出数据的输出装置104。

39. 发明申请

US20090289229A1 RF powder-containing base 有权
标题翻译：含RF粉末的基体
公开(公告)号：US20090289229A1
公开(公告)日：2009-11-26
申请号：US12153662
申请日：2008-05-22
申请人： Yuji Furumura
发明人： Yuji Furumura
IPC分类号： H01B1/00
CPC分类号： H01Q9/27 , G06K19/072 , G06K19/07749 , G07D7/01 , H01Q1/2208 , H01Q9/16
摘要： The present invention provides an RF powder-containing base including functional components, wherein forged cards, documents, bills, or the like are hard to be produced with respect to sheet-like subjects with high proprietary nature, such as various kinds of cards, bills, and securities, and each of a large number of particles can memorize information such as an identification number or the like. An RF powder-containing base 10 contains an RF powder (particles 11, 12, and 13), in which each particle of the RF powder provides an integrated circuit 15 formed on a substrate 14, an insulating layer 16 formed on the integrated circuit, and an antenna element 17 formed on the insulating layer, wherein each of the particles of the RF powder contained in the base has sensitivity to an electromagnetic waves having any of a plurality of different frequencies.
摘要翻译：本发明提供了一种包含功能部件的含RF粉末的基体，其中相对于具有高专利性的片状物体，如各种卡片，纸币，纸币，纸币等都难以制造伪造的卡片，文件，纸币等和证券，并且大量的粒子中的每一个可以记忆诸如识别号码等的信息。含RF粉末的基体10包含RF粉末（颗粒11,12和13），其中RF粉末的每个颗粒提供形成在基板14上的集成电路15，形成在集成电路上的绝缘层16，以及形成在所述绝缘层上的天线元件17，其中包含在所述基座中的所述RF粉末的每个颗粒对具有多个不同频率中的任何一个的电磁波具有敏感性。

40. 发明授权

US5314724A Process for forming silicon oxide film 失效
标题翻译：氧化硅膜形成工艺
公开(公告)号：US5314724A
公开(公告)日：1994-05-24
申请号：US923882
申请日：1992-08-27
申请人： Atuhiro Tsukune , Yuji Furumura , Hatanaka Masanobu
发明人： Atuhiro Tsukune , Yuji Furumura , Hatanaka Masanobu
IPC分类号： H01L21/312 , H01L21/316 , H01L21/768 , B05D3/06
CPC分类号： H01L21/02164 , H01L21/02126 , H01L21/02274 , H01L21/0228 , H01L21/0234 , H01L21/3121 , H01L21/3122 , H01L21/316 , H01L21/76819
摘要： A process for the formation of a silicon oxide film, comprising the steps of exciting a gas comprising an organosilane or organosiloxane gas and a gas containing H and OH above a substrate in a reaction chamber to react them with each other in a gaseous phase or on the substrate, thereby depositing a thin film of an organic-group-containing silanol, silanol polymer, or siloxane-bonded polymer on the substrate, and removing the organic groups from the thin film to form a silicon oxide film. Preferably, the formation of a film is conducted while repeating the step of deposition and the step of removing the organic groups through a plasma treatment within an identical chamber, and the film is further heat-treated at a temperature of 450.degree. C. or below. Thus, a good insulating film having a flatness comparable to that of an SOG film can be obtained.
摘要翻译： PCT No.PCT / JP91 / 01739 Sec。 371日期：1992年8月27日 102（e）日期1992年8月27日PCT 1991年12月19日PCT PCT。出版物WO92 / 12535 日期：1992年7月23日。一种形成氧化硅膜的方法，包括以下步骤：在反应室中激发包含有机硅烷或有机硅氧烷气体的气体和在基底上方含有H和OH的气体，以使它们与每个其它在气相中或在基板上，由此在基板上沉积含有机基团的硅烷醇，硅烷醇聚合物或与硅氧烷键合的聚合物的薄膜，并从薄膜中除去有机基团以形成氧化硅电影。优选地，在重复沉积步骤和通过在相同的室内等离子体处理除去有机基团的步骤的同时进行膜的形成，并且在450℃或更低的温度下进一步热处理该膜。因此，可以获得与SOG膜相当的平坦度的良好的绝缘膜。

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