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    • 34. 发明授权
    • Apparatus and methods for de-embedding through substrate vias
    • 用于通过衬底通孔去嵌入的装置和方法
    • US08809073B2
    • 2014-08-19
    • US13197602
    • 2011-08-03
    • Hsiao-Tsung YenYu-Ling LinChin-Wei KuoVictor Chih Yuan ChangMin-Chie Jeng
    • Hsiao-Tsung YenYu-Ling LinChin-Wei KuoVictor Chih Yuan ChangMin-Chie Jeng
    • H01L21/66G01R31/26
    • G01R31/2644H01L22/34H01L23/481H01L2924/0002H01L2924/00
    • A method includes providing on a substrate having at least two through substrate vias (“TSVs”) a plurality of test structures for de-embedding the measurement of the intrinsic characteristics of a device under test (DUT) including at least two of the TSVs; measuring the intrinsic characteristics [L] for a first and a second test structure on the substrate including two pads coupled with a transmission line of length L; using simultaneous solutions of ABCD matrix or T matrix form equations, and the measured intrinsic characteristics, solving for the intrinsic characteristics of the pads and the transmission lines; de-embedding the measurements of the third and fourth test structures using the intrinsic characteristics of the pads and the transmission lines; and using simultaneous solutions of ABCD matrix or T matrix form equations for BM_L and BM_LX, and the measured intrinsic characteristics, solving for the intrinsic characteristics of the TSVs.
    • 一种方法包括在具有至少两个通过衬底通孔(“TSV”)的衬底上提供多个测试结构,用于对包括至少两个TSV的待测器件(DUT)的固有特性的测量进行解嵌入; 测量包括与长度为L的传输线耦合的两个焊盘的衬底上的第一和第二测试结构的固有特性[L] 使用ABCD矩阵或T矩阵形式方程的同时解,以及测量的固有特性,求解焊盘和传输线的固有特性; 使用焊盘和传输线的固有特性来解嵌第三和第四测试结构的测量; 并且对于BM_L和BM_LX使用ABCD矩阵或T矩阵形式方程的同时解,以及测量的固有特性,求解TSV的固有特性。