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    • 31. 发明授权
    • Semiconductor device having multi-bit nonvolatile memory cell and methods of fabricating the same
    • 具有多位非易失性存储单元的半导体器件及其制造方法
    • US07521750B2
    • 2009-04-21
    • US12017239
    • 2008-01-21
    • Bo-Young SeoHee-Seog JeonSung-Taeg Kang
    • Bo-Young SeoHee-Seog JeonSung-Taeg Kang
    • H01L29/76
    • G11C16/0475G11C11/5621G11C11/5692G11C16/0458H01L27/115H01L27/11521H01L27/11524H01L27/11568
    • A nonvolatile semiconductor device includes a pair of multi-bit nonvolatile memory unit cells. Each unit cell includes a grid type semiconductor body in which a plurality of parallel semiconductor bodies extend in a first direction and a plurality of parallel semiconductor bodies extend in a second direction perpendicular to the first direction, a channel region formed in a partial region of the semiconductor body along circumferences of the semiconductor bodies that extend in the first direction, a charge storage region formed on the channel region, a plurality of control gates, which are formed on the charge storage region and wherein each of the plurality of control gates is adapted to receive separate control voltages. Each unit cell further includes source and drain regions aligned on both sides of the plurality of control gates and formed in the semiconductor bodies, wherein the pair of unit cells share the source region, and the source region is formed at a cross point of the grid.
    • 非易失性半导体器件包括一对多位非易失性存储单元。 每个单电池包括栅格型半导体本体,其中多个平行的半导体本体在第一方向上延伸,并且多个平行的半导体本体在垂直于第一方向的第二方向上延伸,沟道区形成在 半导体本体沿着在第一方向上延伸的半导体本体的周边,形成在沟道区上的电荷存储区域,形成在电荷存储区域上的多个控制栅极,并且其中多个控制栅极中的每一个被适配 以接收单独的控制电压。 每个单元还包括在多个控制栅极的两侧对准并形成在半导体主体中的源极和漏极区域,其中该对单元电池共享源极区域,并且源极区域形成在栅极的交叉点处 。
    • 36. 发明授权
    • Method of manufacturing a thin dielectric layer using a heat treatment and a semiconductor device formed using the method
    • 使用热处理制造薄介电层的方法和使用该方法形成的半导体器件
    • US07041557B2
    • 2006-05-09
    • US10832952
    • 2004-04-27
    • Sung-Taeg KangJeong-Uk HanSung-Woo ParkSeung-Beom YoonJi-Hoon ParkBo-Young Seo
    • Sung-Taeg KangJeong-Uk HanSung-Woo ParkSeung-Beom YoonJi-Hoon ParkBo-Young Seo
    • H01L21/366
    • H01L21/0214H01L21/02249H01L21/02252H01L21/28273H01L21/3144
    • In a method for forming a semiconductor device and a semiconductor device formed in accordance with the method, a thin dielectric layer is provided between a lower conductive layer and an upper conductive layer. In one embodiment, the thin dielectric layer comprises an inter-gate dielectric layer, the lower conductive layer comprises a floating gate and the upper dielectric layer comprises a control gate of a transistor, for example, a non-volatile memory cell transistor. The thin dielectric layer is formed using a heat treating process that results in reduction of surface roughness of the underlying floating gate, and results in a thin silicon oxy-nitride layer being formed on the floating gate. In this manner, the thin dielectric layer provides for increased capacitive coupling between the lower floating gate and the upper control gate. This also leads to a lowered programming voltage, erasing voltage and read voltage for the transistor, while maintaining the threshold voltage in a desired range. In addition, the size of the transistor and resulting storage cell can be minimized and the need for a high-voltage region in the circuit is mitigated, since, assuming a lowered programming voltage, pumping circuitry is not required.
    • 在根据该方法形成的半导体器件和半导体器件的形成方法中,在下导电层和上导电层之间设置有薄的电介质层。 在一个实施例中,薄介电层包括栅极间电介质层,下导电层包括浮动栅极,上介电层包括晶体管的控制栅极,例如非易失性存储单元晶体管。 使用导致下面的浮置栅极的表面粗糙度降低的热处理工艺形成薄介电层,并且导致在浮动栅极上形成薄的氧氮化硅层。 以这种方式,薄介电层提供在下浮动栅极和上控制栅极之间增加的电容耦合。 这也导致降低的编程电压,擦除晶体管的电压和读取电压,同时将阈值电压保持在期望的范围内。 此外,晶体管和所得到的存储单元的尺寸可以被最小化,并且减轻了对电路中的高电压区域的需要,因为假设降低的编程电压,不需要泵浦电路。