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    • 38. 发明授权
    • Method of generating X-ray diffraction data for integral detection of twin defects in super-hetero-epitaxial materials
    • 产生X射线衍射数据的方法,用于整体检测超异质外延材料中的双缺陷
    • US07558371B2
    • 2009-07-07
    • US12254150
    • 2008-10-20
    • Yeonjoon ParkSang Hyouk ChoiGlen C. KingJames R. Elliott
    • Yeonjoon ParkSang Hyouk ChoiGlen C. KingJames R. Elliott
    • G01N23/20
    • G01N23/207
    • A method provides X-ray diffraction data suitable for integral detection of a twin defect in a strained or lattice-matched epitaxial material made from components having crystal structures having symmetry belonging to different space groups. The material is mounted in an X-ray diffraction (XRD) system. In one embodiment, the XRD system's goniometer angle Ω is set equal to (θB−β) where θB is a Bragg angle for a designated crystal plane of the alloy that is disposed at a non-perpendicular orientation with respect to the {111) crystal plane, and β is the angle between the designated crystal plane and a {111} crystal plane of one of the epitaxial components. The XRD system's detector angle is set equal to (θB+β). The material can be rotated through an angle of azimuthal rotation φ about the axis aligned with the material. Using the detector, the intensity of the X-ray diffraction is recorded at least at the angle at which the twin defect occurs.
    • 一种方法提供了适用于由具有属于不同空间群的对称性的晶体结构的组分制成的应变或晶格匹配的外延材料中的双缺陷的积分检测的X射线衍射数据。 该材料安装在X射线衍射(XRD)系统中。 在一个实施例中,XRD系统的测角仪角度Ω被设置为等于(θB-β),其中θB是相对于{111)晶体以非垂直取向设置的合金的指定晶面的布拉格角 平面,β是指定的晶面与外延成分之一的{111}晶面之间的角度。 XRD系统的检测器角度设置为等于(θB+β)。 材料可以围绕与材料对准的轴线旋转方位角旋转角度。 使用检测器,至少以发生双瑕疵的角度记录X射线衍射的强度。
    • 39. 发明申请
    • Method Of Generating X-Ray Diffraction Data For Integral Detection Of Twin Defects In Super-Hetero-Epitaxial Materials
    • 产生X射线衍射数据的方法,用于在超异质外延材料中双缺陷的积分检测
    • US20090103680A1
    • 2009-04-23
    • US12254150
    • 2008-10-20
    • Yeonjoon ParkSang Hyouk ChoiGlen C. KingJames R. Elliott
    • Yeonjoon ParkSang Hyouk ChoiGlen C. KingJames R. Elliott
    • G01N23/207
    • G01N23/207
    • A method provides X-ray diffraction data suitable for integral detection of a twin defect in a strained or lattice-matched epitaxial material made from components having crystal structures having symmetry belonging to different space groups. The material is mounted in an X-ray diffraction (XRD) system. In one embodiment, the XRD system's goniometer angle Ω is set equal to (θB−β) where θB is a Bragg angle for a designated crystal plane of the alloy that is disposed at a non-perpendicular orientation with respect to the {111) crystal plane, and β is the angle between the designated crystal plane and a {111} crystal plane of one of the epitaxial components. The XRD system's detector angle is set equal to (θB+β). The material can be rotated through an angle of azimuthal rotation φ about the axis aligned with the material. Using the detector, the intensity of the X-ray diffraction is recorded at least at the angle at which the twin defect occurs.
    • 一种方法提供了适用于由具有属于不同空间群的对称性的晶体结构的组分制成的应变或晶格匹配的外延材料中的双缺陷的积分检测的X射线衍射数据。 该材料安装在X射线衍射(XRD)系统中。 在一个实施例中,XRD系统的测角仪角度Ω被设置为等于(θB-β),其中θB是相对于{111)晶体以非垂直取向设置的合金的指定晶面的布拉格角 平面,β是指定的晶面与外延成分之一的{111}晶面之间的角度。 XRD系统的检测器角度设置为等于(θB+β)。 材料可以围绕与材料对准的轴线旋转方位角旋转角度。 使用检测器,至少以发生双瑕疵的角度记录X射线衍射的强度。