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    • 35. 发明授权
    • Multi-layer capacitive transducer
    • 多层电容式换能器
    • US07046497B1
    • 2006-05-16
    • US10849363
    • 2004-05-17
    • Wayne Allen Bonin
    • Wayne Allen Bonin
    • H01G5/16
    • H01G5/14G01D5/2417
    • A capacitive transducer of multi-layer construction includes two rotor plates supported by flexible springs, the plates being spaced apart and rigidly connected by a stem. One rotor plate my be used as either a pickup electrode or a grounded target electrode for determining position, displacement, or load force. The second rotor plate may be used for electrostatic actuation without interfering with or destroying circuitry associated with the first rotor plate. A number of improvements are disclosed including a hollow rotor plate structure for reduced moving mass, buckling resistant features for the springs, improved spring anchor joint design for reduced creep and hysteresis, and material selection and matching for reduced thermal sensitivity.
    • 多层结构的电容换能器包括由柔性弹簧支撑的两个转子板,这些板由杆间隔开并刚性地连接。 一个转子板我用作拾取电极或接地目标电极,用于确定位置,位移或负载力。 第二转子板可用于静电致动而不干扰或破坏与第一转子板相关联的电路。 公开了一些改进,包括用于减小运动质量的中空转子板结构,用于弹簧的抗弯曲特征,用于减小蠕变和滞后的改进的弹簧锚接头设计,以及降低的热敏感性的材料选择和匹配。
    • 36. 发明授权
    • Microactuator suspension with multiple “I” shaped microbeams
    • 具有多个“I”形微束的微致动器悬架
    • US06452755B2
    • 2002-09-17
    • US09834163
    • 2001-04-12
    • Wayne Allen Bonin
    • Wayne Allen Bonin
    • G11B2124
    • G11B5/5552
    • A suspension supports a slider for use with a microactuator. The suspension includes a suspension arm attachment pad and a slider attachment pad, connected together by microbeams. A first plurality of microbeams run side-by-side and extend on one side of the suspension, and a second plurality of microbeams run side-by-side and extending on the other side of the suspension. The microbeams preferably include a web and at least one flange which is wider than the web, such as in an “I” shape. The suspension is fabricated out of a single crystal silicon wafer with photolithographic techniques, including doping a surface of the wafer and etching the interior of the wafer to form the “I” shaped microbeams. The microbeams of the present invention make the suspension more flexible in the lateral direction while supporting the preload force on the slider in the vertical direction.
    • 悬架支撑用于微型致动器的滑块。 悬架包括悬臂臂附接垫和滑块附接垫,通过微束连接在一起。 第一多个微束并排运行并在悬架的一侧延伸,并且第二多个微束并排运行并且在悬架的另一侧上延伸。 微梁优选地包括腹板和至少一个比腹板更宽的凸缘,例如为“I”形。 悬浮液由具有光刻技术的单晶硅晶片制成,包括掺杂晶片的表面并蚀刻晶片的内部以形成“I”形微束。 本发明的微束体使得悬架在横向方向上更加柔性,同时在垂直方向上支撑滑块上的预载力。