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31. 发明授权

US08930156B2 Metrology through use of feed forward feed sideways and measurement cell re-use 有权
标题翻译：通过使用前馈饲料进行横向计量和测量细胞再利用
公开(公告)号：US08930156B2
公开(公告)日：2015-01-06
申请号：US12502112
申请日：2009-07-13
申请人： Michael Adel , Leonid Poslavsky , John Fielden , John Madsen , Robert Peters
发明人： Michael Adel , Leonid Poslavsky , John Fielden , John Madsen , Robert Peters
IPC分类号： G06F19/00 , H01L21/66
CPC分类号： H01L22/12 , H01L22/20 , H01L22/30 , H01L2924/0002 , H01L2924/00
摘要： Metrology may be implemented during semiconductor device fabrication by a) modeling a first measurement on a first test cell formed in a layer of a partially fabricated device; b) performing a second measurement on a second test cell in the layer; c) feeding information from the second measurement into the modeling of the first measurement; and after a lithography pattern has been formed on the layer including the first and second test cells, d) modeling a third and a fourth measurement on the first and second test cells respectively using information from a) and b) respectively.
摘要翻译：可以在半导体器件制造期间通过以下步骤来实现计量：a）对形成在部分制造的器件的层中的第一测试单元上的第一测量进行建模; b）对所述层中的第二测试单元执行第二测量; c）将第二测量中的信息馈送到第一测量的建模中; 并且在包括第一和第二测试单元的层上形成光刻图案之后，d）分别使用来自a）和b）的信息对第一和第二测试单元上的第三和第四测量进行建模。

32. 发明授权

US08111376B2 Feedforward/feedback litho process control of stress and overlay 有权
标题翻译：前馈/反馈光刻过程控制应力和覆盖
公开(公告)号：US08111376B2
公开(公告)日：2012-02-07
申请号：US12130699
申请日：2008-05-30
申请人： Michael Adel , John Fielden , Amir Widmann , John Robinson , Dongsub Choi
发明人： Michael Adel , John Fielden , Amir Widmann , John Robinson , Dongsub Choi
IPC分类号： G03B27/42
CPC分类号： G03F7/70258 , G03F7/705 , G03F7/70525 , G03F7/70616 , G03F7/70783
摘要： A method and apparatus for process control in a lithographic process are described. Metrology may be performed on a substrate either before or after performing a lithographic patterning process on the substrate. One or more correctables to the lithographic patterning process may be generated based on the metrology. The lithographic patterning process performed on the substrate (or a subsequent substrate) may be adjusted with the correctables.
摘要翻译：描述了光刻工艺中的工艺控制的方法和装置。在基板上执行光刻图案化处理之前或之后，可以在基板上进行计量。可以基于计量产生光刻图案化过程的一个或多个可校正的方法。可以用可校正的方法来调整在衬底（或随后的衬底）上执行的光刻图案化工艺。

33. 发明申请

US20100017005A1 METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT CELL RE-USE 有权
标题翻译：通过使用饲料前进饲料的方法和测量细胞再次使用
公开(公告)号：US20100017005A1
公开(公告)日：2010-01-21
申请号：US12502112
申请日：2009-07-13
申请人： Michael Adel , Leonid Poslavsky , John Fielden , John Madsen , Robert Peters
发明人： Michael Adel , Leonid Poslavsky , John Fielden , John Madsen , Robert Peters
IPC分类号： G06F19/00 , H01L21/66 , H01L23/58
CPC分类号： H01L22/12 , H01L22/20 , H01L22/30 , H01L2924/0002 , H01L2924/00
摘要： Metrology may be implemented during semiconductor device fabrication by a) modeling a first measurement on a first test cell formed in a layer of a partially fabricated device; b) performing a second measurement on a second test cell in the layer; c) feeding information from the second measurement into the modeling of the first measurement; and after a lithography pattern has been formed on the layer including the first and second test cells, d) modeling a third and a fourth measurement on the first and second test cells respectively using information from a) and b) respectively.
摘要翻译：可以在半导体器件制造期间通过以下步骤来实现计量：a）对形成在部分制造的器件的层中的第一测试单元上的第一测量进行建模; b）对所述层中的第二测试单元执行第二测量; c）将第二测量中的信息馈送到第一测量的建模中; 并且在包括第一和第二测试单元的层上形成光刻图案之后，d）分别使用来自a）和b）的信息对第一和第二测试单元上的第三和第四测量进行建模。

34. 发明申请

US20120094400A1 FEEDFORWARD/FEEDBACK LITHO PROCESS CONTROL OF STRESS AND OVERLAY 有权
标题翻译：反应/反馈LITHO过程控制应力和覆盖
公开(公告)号：US20120094400A1
公开(公告)日：2012-04-19
申请号：US13336370
申请日：2011-12-23
申请人： Michael Adel , John Fielden , Amir Widmann , John Robinson , Dongsub Choi
发明人： Michael Adel , John Fielden , Amir Widmann , John Robinson , Dongsub Choi
IPC分类号： H01L21/66 , G06F19/00
CPC分类号： G03F7/70258 , G03F7/705 , G03F7/70525 , G03F7/70616 , G03F7/70783
摘要： A method and apparatus for process control in a lithographic process are described. Metrology may be performed on a substrate either before or after performing a patterning process on the substrate. One or more correctables to the lithographic patterning process may be generated based on the metrology. The patterning process performed on the substrate (or a subsequent substrate) may be adjusted with the correctables.
摘要翻译：描述了光刻工艺中的工艺控制的方法和装置。可以在对基板进行图案化处理之前或之后在基板上进行计量。可以基于计量产生光刻图案化过程的一个或多个可校正的方法。可以用可校正物调整在基板（或随后的基板）上执行的图案化工艺。

35. 发明授权

US09558978B2 Material handling with dedicated automated material handling system 有权
标题翻译：采用专用自动化材料处理系统进行材料处理
公开(公告)号：US09558978B2
公开(公告)日：2017-01-31
申请号：US13874764
申请日：2013-05-01
申请人： Amir Widmann , Michael Adel , Pati Sekula
发明人： Amir Widmann , Michael Adel , Pati Sekula
IPC分类号： H01L21/677
CPC分类号： H01L21/67733 , H01L21/67727 , H01L21/6773 , Y10T29/49826
摘要： An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated AMHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport wafer carriers among the plurality of tools.
摘要翻译：一种设备包括专用材料处理模块，其具有专用的自动材料处理系统（AMHS），其定义了在制造设备中从多个工具中选择的第一工具和第二工具之间的输送路径。专用AMHS被配置为在第一工具和第二工具之间运输晶片载体，或者反之亦然，而不管制造设备AMHS被配置为在多个工具之间传输晶片载体。

36. 发明申请

US20150075517A1 SYSTEM AND METHOD FOR TEMPERATURE LIMITING IN A SEALED SOLAR ENERGY COLLECTOR 有权
标题翻译：密封太阳能收集器温度限制的系统和方法
公开(公告)号：US20150075517A1
公开(公告)日：2015-03-19
申请号：US14483207
申请日：2014-09-11
申请人： Shimon KLIER , Zvika Klier , Michael Adel , Royi Efron
发明人： Shimon KLIER , Zvika Klier , Michael Adel , Royi Efron
IPC分类号： F24J2/32 , F24J2/44 , F24J2/51
CPC分类号： F24S10/90 , F24S40/55 , F24S80/60 , F24S90/10 , Y02E10/40
摘要： Insulated solar panels that provide a solar thermal collector with means for limiting stagnation temperatures and preventing damage include: temperature limiting is provided by the insulated solar panel, isolating internal components from the environment, using passive closed systems within the sealed solar thermal collector, while also allowing alternative implementations as active systems and/or portions of the temperature limiting system outside the sealed solar thermal collector. A heat pipe can be used as a passive thermal switch, where the temperature induced action at a predetermined temperature causes an abrupt transition from a state of thermal isolation to a state of strong thermal coupling. Additionally, a set of siphon circulation pipes provides a passive closed system for temperature limiting.
摘要翻译：提供太阳能热收集器的绝缘太阳能电池板具有限制停滞温度和防止损坏的手段包括：通过绝缘太阳能电池板提供温度限制，使用密封的太阳能集热器内的被动封闭系统将环境内部组件与环境隔离，同时允许作为活动系统的替代实现和/或密封的太阳能热收集器外部的温度限制系统的部分。热管可以用作被动热开关，其中在预定温度下的温度诱导作用导致从热隔离状态到强热耦合状态的突然转变。此外，一套虹吸循环管道提供了一种用于温度限制的被动封闭系统。

37. 发明申请

US20060197951A1 Diffraction order controlled overlay metrology 有权
$Diffraction order controlled overlay metrology$
标题翻译：衍射顺序控制重叠度量
公开(公告)号：US20060197951A1
公开(公告)日：2006-09-07
申请号：US11363755
申请日：2006-02-27
申请人： Aviv Frommer , Vladimir Levinski , Mark Smith , Jeffrey Byers , Chris Mack , Michael Adel
发明人： Aviv Frommer , Vladimir Levinski , Mark Smith , Jeffrey Byers , Chris Mack , Michael Adel
IPC分类号： G01B11/00
CPC分类号： G03F9/7049 , G03F7/70633 , G03F9/7088
摘要： In one embodiment, a system for imaging an acquisition target or an overlay or alignment semiconductor target is disclosed. The system includes a beam generator for directing at least one incident beam having a wavelength λ towards a periodic target having structures with a specific pitch p. A plurality of output beams are scattered from the periodic target in response to the at least one incident beam. The system further includes an imaging lens system for passing only a first and a second output beam from the target. The imaging system is adapted such that the angular separation between the captured beams, λ, and the pitch are selected to cause the first and second output beams to form a sinusoidal image. The system also includes a sensor for imaging the sinusoidal image or images, and a controller for causing the beam generator to direct the at least one incident beam towards the periodic target or targets, and for analyzing the sinusoidal image or images. In one application the detector detects a sinusoidal image of an acquisition target with the same pitch as the designed target and the controller analyzes the pitch of the sinusoidal image compared to design data to determine whether the target has been successfully acquired. In a second application a first and second periodic target that each have a specific pitch p are imaged so that the detector detects a first sinusoidal image of the first target and a second sinusoidal image of the second target and the controller analyzes the first and second sinusoidal image to determine whether the first and second targets have an overlay or alignment error.
摘要翻译：在一个实施例中，公开了一种用于对采集目标或覆盖或对准半导体目标进行成像的系统。该系统包括用于将具有波长λ的至少一个入射光束朝向具有特定间距p的结构的周期性目标引导的光束发生器。响应于至少一个入射光束，多个输出光束从周期性靶标散射。该系统还包括用于仅从目标通过第一和第二输出光束的成像透镜系统。成像系统被适配成使得捕获的光束λ和间距之间的角度间隔被选择为使得第一和第二输出光束形成正弦图像。该系统还包括用于对正弦图像或图像进行成像的传感器，以及控制器，用于使光束发生器将至少一个入射光束引向周期性目标或目标，并用于分析正弦图像或图像。在一个应用中，检测器以与设计目标相同的间距检测采集目标的正弦图像，并且控制器分析与设计数据相比的正弦图像的间距，以确定目标是否已被成功获取。在第二应用中，每个具有特定间距p的第一和第二周期性目标成像，使得检测器检测第一目标的第一正弦图像和第二目标的第二正弦图像，并且控制器分析第一和第二正弦曲线图像以确定第一和第二目标是否具有覆盖或对齐错误。

38. 发明授权

US06556853B1 Spectral bio-imaging of the eye 失效
标题翻译：眼睛的光谱生物成像
公开(公告)号：US06556853B1
公开(公告)日：2003-04-29
申请号：US09194196
申请日：1998-11-20
申请人： Dario Cabib , Michael Adel , Robert A. Buckwald , Eli Horn
发明人： Dario Cabib , Michael Adel , Robert A. Buckwald , Eli Horn
IPC分类号： A61B500
CPC分类号： A61B5/14555 , A61B3/10 , A61B5/411 , A61B5/7257 , C12Q1/6816 , C12Q1/6841 , C12Q1/6883 , G01J3/02 , G01J3/12 , G01J3/1256 , G01J3/26 , G01J3/2823 , G01J3/4406 , G01J3/453 , G01J3/4535 , G01J2003/2866 , G01N21/6428 , G01N21/6456 , G01N21/6458 , G01N33/5005 , G01N33/56966 , G01N33/582 , G01N2021/6417 , G01N2021/6423 , G01N2021/6441 , G06K9/00127 , G06K9/76
摘要： A spectral bio-imaging method for enhancing pathologic, physiologic, metabolic and health related spectral signatures of an eye tissue, the method comprising the steps of (a) providing an optical device for eye inspection being optically connected to a spectral imager; (b) illuminating the eye tissue with light via the iris, viewing the eye tissue through the optical device and spectral imager and obtaining a spectrum of light for each pixel of the eye tissue; and (c) attributing each of the pixels a color or intensity according to its spectral signature, thereby providing an image enhancing the spectral signatures of the eye tissue.
摘要翻译：一种用于增强眼组织的病理，生理，代谢和健康相关光谱特征的光谱生物成像方法，所述方法包括以下步骤：（a）提供用于眼睛检查的光学装置，光学连接到光谱成像器; （b）通过光圈照射眼组织，通过光学装置和光谱成像器观察眼组织，并为眼组织的每个像素获得光谱; 和（c）根据其光谱特征将每个像素归为颜色或强度，由此提供增强眼组织的光谱特征的图像。

39. 发明授权

US08857426B2 System and method for temperature limiting in a sealed solar energy collector 有权
标题翻译：密封太阳能收集器中温度限制的系统和方法
公开(公告)号：US08857426B2
公开(公告)日：2014-10-14
申请号：US13522714
申请日：2011-01-18
申请人： Shimon Klier , Zvika Klier , Michael Adel , Royi Efron
发明人： Shimon Klier , Zvika Klier , Michael Adel , Royi Efron
IPC分类号： F24J2/30 , F24J2/46
CPC分类号： F24S10/90 , F24S40/55 , F24S80/60 , F24S90/10 , Y02E10/40
摘要： Insulated solar panels provide that provide a solar thermal collector with means for limiting stagnation temperatures and preventing damage include: temperature limiting is provided by the insulated solar panel, isolating internal components from the environment, using passive closed systems within the sealed solar thermal collector, while also allowing alternative implementations as active systems and/or portions of the temperature limiting system outside the sealed solar thermal collector. A heat pipe can be used as a passive thermal switch, where the temperature induced action at a predetermined temperature causes an abrupt transition from a state of thermal isolation to a state of strong thermal coupling. Additionally, a set of siphon circulation pipes provides a passive closed system for temperature limiting.
摘要翻译：绝缘太阳能电池板提供了一种用于限制停滞温度并防止损坏的太阳能集热器，包括：隔热太阳能电池板提供温度限制，使用密封的太阳能集热器内的被动封闭系统将环境内部组件与环境隔离，同时还允许作为密封太阳能热收集器外部的有源系统和/或温度限制系统的部分的替代实施方式。热管可以用作被动热开关，其中在预定温度下的温度诱导作用导致从热隔离状态到强热耦合状态的突然转变。此外，一套虹吸循环管道提供了一种用于温度限制的被动封闭系统。

40. 发明申请

US20140166044A1 Method of removal of snow or ice coverage from solar collectors 审中-公开
标题翻译：从太阳能收集器去除雪或冰覆盖的方法
公开(公告)号：US20140166044A1
公开(公告)日：2014-06-19
申请号：US13698052
申请日：2011-05-12
申请人： Zvika Klier , Roy Efron , Michael Adel , Shimon Klier
发明人： Zvika Klier , Roy Efron , Michael Adel , Shimon Klier
IPC分类号： F24J2/46 , E01H5/10 , B08B7/02
CPC分类号： F24S40/20 , B08B7/02 , E01H5/10 , Y02E10/40
摘要： A system and method for prevention and removal of snowpack from solar panels increases the collection efficiency of solar panels by using one or more techniques, alone or in combination including: vibrating a vibrationally isolated surface of the solar panel; flexing a flexible sheet attached to the solar panel; inducing vibrations via extenial circulation piping for detaching the snowpack from at least one solar thermal collector of a solar array; activating a heat-pipe to transfer heat from an absorber plate to the surface of the collection panel; and using a PZT to generate vibrations for detaching the snowpack from the solar panel.
摘要翻译：用于防止和去除太阳能电池板的积雪的系统和方法通过使用一种或多种单独或组合的技术来提高太阳能电池板的收集效率，包括：振动太阳能电池板的振动隔离表面; 弯曲附接到太阳能电池板的柔性片; 通过外围循环管道引起振动，以将雪堆从太阳能阵列的至少一个太阳能热收集器分离; 激活热管以将热量从吸收板传递到收集板的表面; 并且使用PZT来产生用于将雪堆从太阳能电池板分离的振动。

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