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31. 发明授权

US07126250B2 Apparatus comprising an array of tightly spaced rotatable optical elements with two axes of rotation 有权
标题翻译：装置包括具有两个旋转轴的紧密间隔的可旋转光学元件的阵列
公开(公告)号：US07126250B2
公开(公告)日：2006-10-24
申请号：US11242571
申请日：2005-10-03
申请人： Dennis S. Greywall , Dan M. Marom
发明人： Dennis S. Greywall , Dan M. Marom
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： G02B26/0841 , H04J14/02
摘要： In one embodiment, a rotatable element includes a plate, a plate support, a cradle, and a cradle support. The plate is coupled to the cradle via the plate support. The cradle is coupled to a surrounding frame by the cradle support. The plate and cradle are suspended over a cavity so that, in conjunction with the plate support and the cradle support, both the plate and cradle are capable of freely rotating about different axes of rotation when suitably actuated. Since the plate is capable of rotating independently of the cradle, yet also rotates when the cradle is rotated, the plate is rotatable about two axes of rotation. In some cases, the axis of rotation of the plate is perpendicular to the axis of rotation of the cradle. Since the cradle does not surround the plate, the plates of adjacent rotatable elements can be placed very close to one another (i.e., as close as about 1 micron) to provide, for example, an array of very-closely-spaced mirrors.
摘要翻译：在一个实施例中，可旋转元件包括板，板支撑件，支架和托架支撑件。板通过板支撑件联接到支架。托架通过支架支撑件连接到周围的框架。板和托架悬挂在空腔上，使得与板支撑件和托架支撑件一起，当适当地致动时，板和支架能够绕不同的旋转轴线自由旋转。由于板能够独立于托架旋转，而且当托架旋转时也可旋转，板可绕两个旋转轴线旋转。在某些情况下，板的旋转轴线垂直于支架的旋转轴线。由于托架不围绕板，相邻可旋转元件的板可以彼此非常接近地放置（即，接近约1微米），以提供例如非常紧密间隔的反射镜阵列。

32. 发明授权

US06995895B2 MEMS actuator for piston and tilt motion 有权
标题翻译：用于活塞和倾斜运动的MEMS致动器
公开(公告)号：US06995895B2
公开(公告)日：2006-02-07
申请号：US10772847
申请日：2004-02-05
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A MEMS device having a spring structure formed by two flexible beams attached between a substrate and a movable bar. When non-end sections of the beams are pulled in opposite directions, the beam ends attached to the movable bar pull that bar toward the substrate, thereby transforming in-plane motion of the non-end sections into out-of-plane motion of the movable bar. When the non-end sections are displaced symmetrically, the movable bar translates toward the substrate. Alternatively, when the non-end sections are displaced non-symmetrically, the movable bar rotates with respect to the substrate. In one embodiment, each flexible beam is attached to a comb-shaped portion of a motion actuator, which has two such portions, each portion interleaved with the other portion and adapted to move with respect to the substrate and that other portion. When a voltage differential is applied between the portions, they move substantially parallel to the substrate, thereby deforming the beams and translating/rotating the movable bar.
摘要翻译：具有弹簧结构的MEMS装置，该弹性结构由附接在基板和可动杆之间的两个柔性梁形成。当梁的非端部分被拉向相反方向时，附接到可移动杆的梁端将该杆拉向基板，从而将非端部分的平面内运动转变成平面内的运动活动杆。当非端部对称地移位时，可移动杆朝向基板平移。或者，当非端部非对称地移位时，可移动杆相对于基板旋转。在一个实施例中，每个柔性梁附接到运动致动器的梳状部分，其具有两个这样的部分，每个部分与另一部分交错并且适于相对于基板和另一部分移动。当在这些部分之间施加电压差时，它们基本上平行于基板移动，从而使梁变形并平移/旋转可动杆。

33. 发明授权

US06984917B2 Optical element having two axes of rotation for use in tightly spaced mirror arrays 有权
标题翻译：具有两个旋转轴的光学元件用于紧密间隔的镜阵列
公开(公告)号：US06984917B2
公开(公告)日：2006-01-10
申请号：US10164537
申请日：2002-06-06
申请人： Dennis S. Greywall , Dan M. Marom
发明人： Dennis S. Greywall , Dan M. Marom
IPC分类号： H02N1/00 , G02B26/08 , G02B26/10
CPC分类号： G02B26/0841 , H04J14/02
摘要： A rotatable element includes a plate, a plate support, a cradle and a cradle support. The plate is coupled to the cradle via the plate support. The cradle is coupled to a surrounding frame by the cradle support. The plate and cradle are suspended over a cavity so that, in conjunction with the plate support and the cradle support, both the plate and cradle are capable of freely rotating about different axes of rotation when suitably actuated. Since the plate is capable of rotating independently of the cradle, yet also rotates when the cradle is rotated, the plate is rotatable about two axes of rotation. In some cases, the axis of rotation of the plate is perpendicular to the axis of rotation of the cradle. Since the cradle does not surround the plate, the plates of adjacent rotatable elements can be placed very close to one another (i.e., as close as about 1 micron) to provide, for example, an array of very-closely-spaced mirrors.
摘要翻译：可旋转元件包括板，板支撑件，支架和托架支撑件。板通过板支撑件联接到支架。托架通过支架支撑件连接到周围的框架。板和托架悬挂在空腔上，使得与板支撑件和托架支撑件一起，当适当地致动时，板和支架能够绕不同的旋转轴线自由旋转。由于板能够独立于托架旋转，而且当托架旋转时也可旋转，板可绕两个旋转轴线旋转。在某些情况下，板的旋转轴线垂直于支架的旋转轴线。由于托架不围绕板，相邻可旋转元件的板可以彼此非常接近地放置（即，接近1微米），以提供例如非常紧密间隔的反射镜阵列。

34. 发明授权

US06876484B2 Deformable segmented MEMS mirror 有权
标题翻译：可变形分段MEMS镜
公开(公告)号：US06876484B2
公开(公告)日：2005-04-05
申请号：US10395362
申请日：2003-03-24
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： G02B26/06 , G02B26/00
CPC分类号： G02B26/06
摘要： A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring vertex. The MEMS device also has a plurality of electrodes, each of which can be individually biased. A movable segment moves in response to a voltage applied to an electrode located beneath that segment while the deformed springs attached to the segment provide a restoring force. Due to the fixed plates, motion of each movable segment is substantially decoupled from that of the adjacent segments, which makes the shape of the segmented mirror relatively easy to control. In addition, segments in a deformable mirror of the invention can be displaced by a distance that is significantly larger than the maximum deformation amplitude for a membrane mirror of the prior art. The MEMS device can be fabricated using two silicon-on-insulator (SOI) wafers and an etch fabrication technique.
摘要翻译：具有可变形分段镜的MEMS器件。反射镜包括使用弹簧顶点支撑在基板上的多个可动部分，每个顶点具有固定板和一个或多个弹簧。在代表性的实施例中，三个弹簧支撑每个可动部分，其中每个弹簧将可动部分连接到不同的弹簧顶点。 MEMS器件还具有多个电极，每个电极可以被单独偏置。响应于施加到位于该段下方的电极的电压，可移动段移动，而附接到段的变形弹簧提供恢复力。由于固定板，每个可移动段的运动与相邻段的运动基本上分离，这使得分段镜的形状相对容易控制。此外，本发明的可变形反射镜中的片段可以移位一个远大于现有技术的膜镜的最大变形幅度的距离。可以使用两个绝缘体上硅（SOI）晶片和蚀刻制造技术来制造MEMS器件。

35. 发明授权

US06872947B1 MEMS-based spectrophotometric system 有权
标题翻译：基于MEMS的分光光度法
公开(公告)号：US06872947B1
公开(公告)日：2005-03-29
申请号：US10667937
申请日：2003-09-22
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： G01J3/433 , G01N21/35 , G01J5/02
CPC分类号： G01J3/02 , G01J3/0202 , G01J3/0229 , G01J3/433 , G01N21/3504
摘要： A portable spectrophotometric system for detecting one or more target substances. In a representative embodiment, a system of the invention has an optical grating, an array of photo-detectors, and a MEMS device having a movable plate positioned between the grating and the array. Light transmitted through a gaseous sample is dispersed by the grating and is imaged onto the movable plate, which has a plurality of openings corresponding to selected infrared absorption lines of the target substance. A small-amplitude oscillation is imparted onto the plate such that the openings periodically move in and out of alignment with the corresponding intensity features in the image, which modulates electrical signals generated by the corresponding photo-detectors. A lock-in signal processor analyzes the modulation pattern by comparing it to the pattern expected in the presence of the target substance. When a positive correlation between the patterns is established, the system warns the user about the presence of the target substance.
摘要翻译：一种用于检测一种或多种目标物质的便携式分光光度测定系统。在代表性实施例中，本发明的系统具有光栅，光电检测器阵列和具有位于光栅与阵列之间的可动板的MEMS器件。通过气体样品透过的光被光栅分散，并被成像到具有对应于目标物质的所选红外吸收线的多个开口的可动板上。小板振荡被施加到板上，使得开口周期性地移动到与图像中对应的强度特征对齐的位置上，该特征调制由相应光电检测器产生的电信号。锁定信号处理器通过将调制模式与目标物质存在期望的模式进行比较来分析调制模式。当建立模式之间的正相关性时，系统向用户警告目标物质的存在。

36. 发明授权

US06850354B2 Monolithic MEMS device for optical switches 有权
标题翻译：用于光开关的单片MEMS器件
公开(公告)号：US06850354B2
公开(公告)日：2005-02-01
申请号：US10261089
申请日：2002-09-30
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： B81C1/00 , B81C3/00 , G02B26/08 , G02B26/00
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/058 , B81C1/00198
摘要： A MEMS device for an optical switch may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The device has a movable plate, which may act as a mirror, supported on a stationary substrate. The plate rotates with respect to the substrate in response to a voltage applied to a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate. Electrodes may be arranged with respect to each other and/or the plate to form a fringe-field (FF) actuator, which may alleviate the snap-down problem associated with the prior art design. Multiple MEMS devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.
摘要翻译：可以使用单个晶片制造用于光学开关的MEMS装置，其减轻与两件式现有技术设计相关联的对准问题。该装置具有可移动的板，其可以用作支撑在固定基板上的反射镜。响应于施加到刚性地连接到衬底的固定电极的电压，板相对于衬底旋转。可以实现附加的可移动和/或固定电极以使板的双向旋转。电极可以相对于彼此和/或板布置以形成边缘场（FF）致动器，其可以减轻与现有技术设计相关联的塌陷问题。本发明的多个MEMS器件可以被排列成单个整体结构以形成反射镜的线性，径向或二维阵列。

37. 发明授权

US06771850B1 Article comprising a MEMS device and method therefor 有权
标题翻译：一种MEMS器件及其方法
公开(公告)号：US06771850B1
公开(公告)日：2004-08-03
申请号：US09715575
申请日：2000-11-18
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： G02B626
CPC分类号： G02B6/357 , G02B6/3512 , G02B6/353 , G02B6/3546 , G02B6/3566 , G02B6/358 , G02B6/3584
摘要： An article comprising a support portion that is coupled to an element portion, both of which portions are formed from some of the layers of a multi-layer substrate. In one embodiment, the support portion comprises a torsional member, an actuating plate and a beam, wherein the beam mechanically links the actuating plate and the element portion. At least one torsional member attaches the support portion to the multi-layer substrate and allows the element portion to move independently of the substrate, such as when actuated by an underlying electrode. When actuated, the actuating plate of the support portion is drawn toward the underlying electrode while the element portion rises from a first (unactuated) position within the substrate toward a second (actuated) position outside of the substrate, in see-saw like fashion. The present article is useful in a variety of applications, such as, for example, optical applications where it can be used to form improved chopper switches and optical cross connects.
摘要翻译：一种制品，其包括耦合到元件部分的支撑部分，这两个部分由多层基板的一些层形成。在一个实施例中，支撑部分包括扭转构件，致动板和梁，其中梁将致动板和元件部分机械连接。至少一个扭转构件将支撑部分附接到多层基底，并允许元件部分独立于基底移动，例如当由下面的电极致动时。当致动时，支撑部分的致动板被拉向下面的电极，同时元件部分以基板的方式从衬底内的第一（未致动）位置朝向衬底外部的第二（致动）位置升高。本文在各种应用中是有用的，例如，其可以用于形成改进的斩波开关和光学交叉连接的光学应用。

38. 发明授权

US06487001B2 Article comprising wedge-shaped electrodes 有权
标题翻译：文章包括楔形电极
公开(公告)号：US06487001B2
公开(公告)日：2002-11-26
申请号：US09736011
申请日：2000-12-13
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： G02B2600
CPC分类号： B81B3/0043 , B81B2201/042 , B81B2203/0384 , B81B2203/04 , B81C1/00103 , G02B26/0841
摘要： An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.
摘要翻译：用于致动MEMS元件的电极。电极的长度从其第一端到第二端的高度下降。在使用中，电极的第一端靠近上覆MEMS元件的旋转轴线或弯曲轴设置。在一个实施例中，沿其长度的电极的高度的下降是线性的，使得电极具有楔形轮廓。在另一个实施例中，电极的高度以离散步骤下降，使得电极具有阶梯形轮廓。

39. 发明授权

US5963857A Article comprising a micro-machined filter 失效
标题翻译：文章包括微加工过滤器
公开(公告)号：US5963857A
公开(公告)日：1999-10-05
申请号：US9599
申请日：1998-01-20
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： H03H9/24 , H04B1/10
CPC分类号： H03H9/24 , H03H9/2457
摘要： An article comprising a micro-machined filter advantageously comprises a micro-machined resonator, a drive circuit and a detection circuit, at least a portion of which are circuits are disposed on the resonator within a magnetic field. In operation, an input signal is delivered to the drive circuit. The resonator is excited to movement by the Lorentz force that is generated as signal current varies. Due to the resonator's movement, a voltage is induced in the detection circuit, which moves with the resonator. Using well-known micro-machining techniques, a resonator can be made that has mechanical resonance frequencies extending into the GHz regime. Under proper conditions, such resonances advantageously exhibit very high Q-values, so that the resonator shows a significant physical response (e.g., movement) over a very narrow range of excitation frequency. When the frequency of the input signal matches such a frequency (i.e., the resonant frequency), the device generates a voltage having such a frequency.
摘要翻译：包括微加工过滤器的制品有利地包括微加工谐振器，驱动电路和检测电路，其至少一部分电路在磁场内设置在谐振器上。在操作中，输入信号被传送到驱动电路。谐振器由于信号电流变化而产生的洛伦兹力激发而运动。由于谐振器的运动，在与谐振器一起移动的检测电路中感应出电压。使用众所周知的微加工技术，可以制造具有延伸到GHz状态的机械共振频率的谐振器。在适当的条件下，这种谐振有利地表现出非常高的Q值，使得谐振器在非常窄的激励频率范围内显示出显着的物理响应（例如移动）。当输入信号的频率与这样的频率（即谐振频率）匹配时，器件产生具有这种频率的电压。

40. 发明授权

US5787914A Hunting canopy 失效
标题翻译：狩猎篷
公开(公告)号：US5787914A
公开(公告)日：1998-08-04
申请号：US833695
申请日：1997-04-08
申请人： Dennis S. Greywall
发明人： Dennis S. Greywall
IPC分类号： A01M31/02 , A45B11/00 , E04H15/00 , E04H15/04
CPC分类号： E04H15/001 , A01M31/02 , A45B11/00 , E04H15/04 , Y10S135/901
摘要： A portable, collapsible, water proof canopy especially adapted for use in a tree is provided. A flexible, collapsible frame is detachably coupled to the canopy along its perimeter. Means for suspending the canopy from a tree is disposed near the center of the canopy. Sufficient canopy material is provided so that when the canopy is suspended from the tree at said means, the canopy assumes an approximately conical shape. A user perched in a tree underneath the canopy is thereby partially protected from inclement weather.
摘要翻译：提供了一种特别适用于树木的便携式，可折叠，防水的树冠。柔性的可折叠框架沿其周边可拆卸地联接到罩盖。从树顶悬挂树冠的手段靠近树冠中心附近。提供足够的冠层材料，使得当在所述装置上将树冠悬挂在树上时，盖子呈现近似圆锥形的形状。因此，栖息在树冠下的用户可以部分保护免受恶劣天气的影响。

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