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    • 35. 发明申请
    • Method of manufacturing nitride semiconductor light emitting device
    • 制造氮化物半导体发光器件的方法
    • US20070202621A1
    • 2007-08-30
    • US11706267
    • 2007-02-15
    • Satoshi KomadaMayuko Fudeta
    • Satoshi KomadaMayuko Fudeta
    • H01L21/00
    • H01L33/007B82Y20/00H01L21/0242H01L21/02458H01L21/0254H01L21/0262H01S5/0217H01S5/0422H01S5/305H01S5/3063H01S5/34333H01S2304/04
    • A method of manufacturing a nitride semiconductor light emitting device having high light emission output and allowing decrease in forward voltage (Vf) is provided. The invention is directed to a method of manufacturing a nitride semiconductor light emitting device including at least an n-type nitride semiconductor, a p-type nitride semiconductor and an active layer formed between the n-type nitride semiconductor and the p-type nitride semiconductor, wherein the n-type nitride semiconductor includes at least an n-type contact layer and an n-side GaN layer, the n-side GaN layer consists of a single or a plurality of undoped and/or n-type layers, and the method includes the step of forming the n-side GaN layer by organic metal vapor deposition using a nitrogen-containing gas as a carrier gas, such that the n-side GaN layer is formed between the n-type contact layer and the active layer.
    • 提供一种制造具有高发光输出并允许正向电压(Vf)降低的氮化物半导体发光器件的方法。 本发明涉及一种制造氮化物半导体发光器件的方法,所述氮化物半导体发光器件至少包括形成在n型氮化物半导体和p型氮化物半导体之间的n型氮化物半导体,p型氮化物半导体和有源层 其中,所述n型氮化物半导体至少包括n型接触层和n侧GaN层,所述n侧GaN层由单个或多个未掺杂的和/或n型层构成, 方法包括通过使用含氮气体作为载气的有机金属气相沉积来形成n侧GaN层的步骤,使得n型GaN层形成在n型接触层和有源层之间。
    • 39. 发明授权
    • Nitride semiconductor light-emitting element and method for producing same
    • 氮化物半导体发光元件及其制造方法
    • US08742440B2
    • 2014-06-03
    • US13579174
    • 2011-02-17
    • Mayuko FudetaEiji Yamada
    • Mayuko FudetaEiji Yamada
    • H01L33/00H01L33/12H01L33/20
    • H01L33/32H01L33/007H01L33/0075H01L33/025H01L33/04H01L33/12H01L33/20
    • Disclosed is a nitride semiconductor light-emitting element comprising a p-type nitride semiconductor layer 1, a p-type nitride semiconductor layer 2, and a p-type nitride semiconductor layer 3 placed in order above a nitride semiconductor active layer, wherein the p-type nitride semiconductor layer 1 and p-type nitride semiconductor layer 2 each contain Al, the average Al composition of the p-type nitride semiconductor layer 1 is equivalent to the average Al composition of the p-type nitride semiconductor layer 2, the p-type nitride semiconductor layer 3 has a smaller band gap than the p-type nitride semiconductor layer 2, the p-type impurity concentration of the p-type nitride semiconductor layer 2 and the p-type impurity concentration of the p-type nitride semiconductor layer 3 are both lower than the p-type impurity concentration of the p-type nitride semiconductor layer 1, and a method for producing same.
    • 公开了一种氮化物半导体发光元件,其包括在氮化物半导体有源层上顺序放置的p型氮化物半导体层1,p型氮化物半导体层2和p型氮化物半导体层3,其中p p型氮化物半导体层1和p型氮化物半导体层2各自含有Al,p型氮化物半导体层1的平均Al组成等价于p型氮化物半导体层2的平均Al组成,p 型氮化物半导体层3具有比p型氮化物半导体层2更小的带隙,p型氮化物半导体层2的p型杂质浓度和p型氮化物半导体的p型杂质浓度 层3都低于p型氮化物半导体层1的p型杂质浓度,及其制造方法。