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    • 33. 发明授权
    • Method of fabricating piezoelectric vibrating pieces
    • 制造压电振动片的方法
    • US08214982B2
    • 2012-07-10
    • US12360435
    • 2009-01-27
    • Takashi Kobayashi
    • Takashi Kobayashi
    • H04R17/10H01L41/047
    • H03H9/1021H03H3/02H03H9/0547H03H9/21Y10T29/42Y10T29/49147Y10T29/49155Y10T29/49574
    • To carry out frequency adjustment easily, accurately and efficiently without being influenced by a size of a piezoelectric vibrating piece and achieve low cost formation and promotion of maintenance performance, there is provided a method of fabricating a piezoelectric vibrating piece which is a method of fabricating a piezoelectric vibrating piece having a piezoelectric vibrating plate 11, a pair of exciting electrodes 12, 13, and a pair of mount electrodes 15, 16 by utilizing a wafer S, the method including an outer shape forming step of forming a frame portion S1 at a wafer and forming a plurality of piezoelectric plates at the frame portion to be connected thereto by way of a connecting portion 11a, an electrode forming step of forming pairs of exciting electrodes and pairs of mount electrodes respectively at the plurality of piezoelectric plates and forming a common electrode S2 respectively electrically connected to a plurality of the pairs of mount electrodes 15 on one side by way of the connecting portion, a frequency adjusting step of adjusting a frequency of the piezoelectric plate by applying a drive voltage between the common electrode and the mount electrode 16 on other side, and a cutting step of fragmenting the plurality of piezoelectric plates.
    • 为了容易地,准确而有效地进行频率调整而不受压电振动片的尺寸的影响,并且实现低成本形成和提高维护性能,提供了一种制造压电振动片的方法,该方法是制造 具有压电振动板11的压电振动片,利用晶片S的一对激励电极12,13和一对安装电极15,16,该方法包括:外形形成步骤,以在 晶片,并通过连接部分11a在框架部分形成多个压电板,电极形成步骤分别在多个压电板上形成一对激励电极和一对安装电极,并形成共同的 电极S2分别电连接到一对侧的多对安装电极15上 连接部分的ay;频率调节步骤,通过在公共电极和另一侧的安装电极16之间施加驱动电压来调节压电板的频率,以及分割多个压电板的切割步骤。
    • 34. 发明授权
    • Sample stage apparatus and method of controlling the same
    • 样品台装置及其控制方法
    • US08174229B2
    • 2012-05-08
    • US12420358
    • 2009-04-08
    • Masashi FujitaShuichi NakagawaTakashi Kobayashi
    • Masashi FujitaShuichi NakagawaTakashi Kobayashi
    • B64C17/06
    • H01J37/20H01J2237/20228H01J2237/20285H01J2237/20292
    • The present invention provides a stage apparatus capable of reducing a positioning time without increasing a positional deviation. A positioning control method of a sample stage apparatus includes: a high-speed movement step of moving a table to a high-speed movement target position at a first movement speed; a positional deviation correcting step of moving the table to a low-speed positioning step start position at a second movement speed that is lower than the first movement speed; a low-speed positioning step of moving the table to a target position at a third movement speed that is lower than the second movement speed. After the low-speed positioning step is completed, a rod connected to a motor returns to its original position to separate a pin of the rod side from a concave portion of the table side.
    • 本发明提供一种能够在不增加位置偏差的情况下减少定位时间的舞台装置。 采样台装置的定位控制方法包括:以第一移动速度将桌子移动到高速移动目标位置的高速移动步骤; 位置偏差校正步骤,以低于第一移动速度的第二移动速度将桌子移动到低速定位步骤开始位置; 低速定位步骤,以低于第二移动速度的第三移动速度将桌子移动到目标位置。 在低速定位步骤完成之后,连接到电动机的杆返回到其原始位置,以将杆侧的销与台侧的凹部分开。
    • 38. 发明授权
    • Ultrasound probe
    • 超声探头
    • US07969067B2
    • 2011-06-28
    • US12161962
    • 2006-11-14
    • Takanori AonoTatsuya NagataKatsunori AsafusaTakashi KobayashiNaoya Kanda
    • Takanori AonoTatsuya NagataKatsunori AsafusaTakashi KobayashiNaoya Kanda
    • H01L41/08
    • G10K11/002A61B8/00
    • There is provided an ultrasound probe including a first substrate having a silicon substrate and an ultrasound transmit-receive element, an acoustic lens disposed over an upper surface of the first substrate, and a damping layer disposed under the first substrate, in which a second substrate is disposed between a lower surface of the first substrate and an upper surface of the damping layer, and the second substrate is made of a material having approximately the same linear expansion coefficient and acoustic impedance as the silicon substrate of the first substrate. With this structure, it is possible to provide the ultrasound probe which can prevent damage to the silicon substrate due to temperature change and has excellent transmission/reception performance and structure reliability while reducing noise by reflected waves in transmission and reception.
    • 提供一种超声波探头,其包括具有硅衬底和超声波发射接收元件的第一衬底,设置在第一衬底的上表面上的声透镜,以及设置在第一衬底下方的阻尼层,其中第二衬底 设置在第一基板的下表面和阻尼层的上表面之间,第二基板由具有与第一基板的硅基板大致相同的线膨胀系数和声阻抗的材料制成。 利用这种结构,可以提供能够防止由于温度变化而损坏硅基板的超声波探头,并且在发送和接收中减少反射波的噪声的同时具有优异的发送/接收性能和结构可靠性。