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    • 33. 发明授权
    • Concave diffraction grating device, reflective dispersion device, and spectral device
    • 凹面衍射光栅装置,反射色散装置和光谱装置
    • US07916292B2
    • 2011-03-29
    • US12042651
    • 2008-03-05
    • Kenji KonnoKenji ImuraMasayuki Yamada
    • Kenji KonnoKenji ImuraMasayuki Yamada
    • G01J3/28
    • G01J3/04G01J3/18G01J3/1838G02B5/1861
    • A concave diffraction grating device, a reflective dispersion device, and a spectral device of the invention include a diffraction grating plane having an aspherical configuration, wherein the diffraction grating plane is symmetrical in a predetermined direction, and asymmetrical in a direction orthogonal to the predetermined direction in such a manner that the curvature of one end portion of the diffraction grating plane in the direction orthogonal to the predetermined direction is gradually decreased, and the curvature of the other end portion thereof is gradually increased. The concave diffraction grating device, the reflective dispersion device, and the spectral device with the above arrangement have desirable slit image forming performance with respect to all the wavelengths in a visible region, and are suitable for mass-production.
    • 本发明的凹面衍射光栅装置,反射色散装置和光谱装置包括具有非球面形状的衍射光栅平面,其中衍射光栅平面在预定方向上是对称的,并且在与预定方向正交的方向上不对称 使得衍射光栅平面的与预定方向正交的方向的一端部的曲率逐渐减小,另一端部的曲率逐渐增大。 具有上述结构的凹衍射光栅装置,反射色散装置和光谱装置相对于可视区域中的所有波长具有希望的狭缝成像性能,并且适合于批量生产。
    • 34. 发明授权
    • Substrate processing apparatus and method of manufacturing semiconductor device
    • 基板处理装置及半导体装置的制造方法
    • US07883581B2
    • 2011-02-08
    • US12421117
    • 2009-04-09
    • Naoharu NakaisoKiyohiko MaedaMasayuki Yamada
    • Naoharu NakaisoKiyohiko MaedaMasayuki Yamada
    • C23C16/52C23C16/56C23F1/00H01L21/306C23C16/06C23C16/22
    • H01L21/3185C23C16/345C23C16/4412C23C16/45546C23C16/52
    • Provided are a substrate processing apparatus and a method of manufacturing a semiconductor device. The substrate processing apparatus includes a reaction vessel configured to process a substrate, a heater configured to heat an inside of the reaction vessel, a gas supply line configured to supply gas into the reaction vessel, a first valve installed at the gas supply line, a flow rate controller installed at the gas supply line, a main exhaust line configured to exhaust the inside of the reaction vessel, a second valve installed at the main exhaust line, a slow exhaust line installed at the main exhaust line, a third valve installed at the slow exhaust line, a throttle part installed at the slow exhaust line, a vacuum pump installed at the main exhaust line, and a controller configured to control the valves and the flow rate controller.
    • 提供了一种基板处理装置和半导体装置的制造方法。 基板处理装置包括:配置成对基板进行处理的反应容器,构造成加热反应容器内部的加热器,将气体供给到反应容器内的气体供给管线,设置在气体供给管路上的第一阀, 安装在气体供给管路上的流量控制器,配置成排出反应容器内部的主排气管线,安装在主排气管路上的第二阀,安装在主排气管路上的慢排气管路,安装在主排气管路的第三阀门 慢排气管路,安装在慢排气管路处的节流部件,安装在主排气管线处的真空泵,以及控制器,其被配置为控制阀门和流量控制器。
    • 37. 发明授权
    • Paper discharge tray
    • 出纸托盘
    • US07748705B2
    • 2010-07-06
    • US11167223
    • 2005-06-28
    • Masayuki Yamada
    • Masayuki Yamada
    • B65H31/00
    • B65H31/02B65H2405/1111B65H2405/1412B65H2801/06
    • A paper discharge tray 6 includes: a paper loading portion 7 provided in a bent form including a first tray surface 7a and a second tray surface 7b; a rear wall 8 for supporting and aligning the trailing end of paper discharged on the paper loading portion 7; and an installation portion 10 provided along the paper loading portion 7. On two portions of the first tray surface 7a, there are provided guide members 11 each having a first slope 11a that inclines upward in the paper discharge direction (direction indicated by an arrow A in the figure). When paper of a predetermined size is discharged on the guide members 11, the paper slides down along the first slopes 11a and the second tray surface 7c, and then is loaded with the trailing end of the paper aligned by the rear wall 8.
    • 排纸托盘6包括:设置成弯曲形式的纸张装载部分7,其包括第一托盘表面7a和第二托盘表面7b; 后壁8,用于支撑并对准排出在纸张装载部分7上的纸张尾端; 以及沿着纸张装载部分7设置的安装部分10.在第一托盘表面7a的两个部分上设置有引导构件11,每个引导构件11具有沿纸张排出方向向上倾斜的第一斜面11a(箭头A所示的方向 在图中)。 当预定尺寸的纸张在引导构件11上排出时,纸沿着第一斜面11a和第二托盘表面7c向下滑动,然后装载由后壁8对齐的纸张尾端。