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    • 32. 发明授权
    • Photomask, method of lithography, and method for manufacturing the photomask
    • 光掩模,光刻方法和制造光掩模的方法
    • US08068213B2
    • 2011-11-29
    • US12314404
    • 2008-12-10
    • Takashi SatoTakashi Sakamoto
    • Takashi SatoTakashi Sakamoto
    • G03B27/32G03C5/00
    • G03F7/70641B64D47/08G03F1/32
    • A photomask has a monitoring pattern configured to obtain information required for adjusting optical system of a projection lithography tool. The monitoring pattern encompasses a mask substrate and an asymmetrical diffraction grating delineated on the mask substrate, configured to generate a positive first order diffracted light and a negative first order diffracted light in different diffraction efficiencies. The asymmetrical diffraction grating includes a plurality of probing-phase shifters, disposed periodically on the mask substrate in parallel, and a plurality of opaque strips disposed on light-shielding faces of the probing-phase shifters. An asymmetrically recessed ridge implements each of the probing-phase shifters.
    • 光掩模具有被配置为获得调整投影光刻工具的光学系统所需的信息的监视图案。 监测图案包括掩模基板和掩模基板上描绘的非对称衍射光栅,被配置为产生不同衍射效率的正一级衍射光和负一级衍射光。 不对称衍射光栅包括平行地周期性地设置在掩模基板上的多个探测移相器,以及设置在探测移相器的光屏蔽面上的多个不透明条。 不对称凹入的脊部实现每个探测移相器。
    • 33. 发明授权
    • Chromatic aberration compensating image optics
    • 色差补偿图像光学
    • US08014081B2
    • 2011-09-06
    • US11500985
    • 2006-08-09
    • Yuko WatanabeTakashi SakamotoHiroyuki TairaSeigou Nakai
    • Yuko WatanabeTakashi SakamotoHiroyuki TairaSeigou Nakai
    • G02B9/08
    • G02B27/0025
    • An imaging optics capable of compensating for chromatic aberration is provided with a light shielding means in a surface peripheral area of a certain lens element in a lens system so as to block a light flux of a specified wavelength range, thereby eliminating chromatic aberration in halo of the light flux of the specified wavelength range when it passes the periphery of the lens system. Thus, the invention provides the imaging optics that, without an increase in the number of pieces of lens elements and without a use of an expensive specified low-dispersion glass material, in contrast with the prior art imaging optics of the same optical performances, well compensates for chromatic aberration, especially, in halo.
    • 能够补偿色像差的成像光学元件在透镜系统中的特定透镜元件的表面周边区域中设置有遮光装置,以阻挡特定波长范围的光束,从而消除光晕中的色差 当通过透镜系统的周边时,指定波长范围的光通量。 因此,本发明提供了成像光学器件,与现有技术的相同光学性能的成像光学器件相比,在不增加透镜元件数量并且不使用昂贵的指定的低分散玻璃材料的情况下, 补偿色差,特别是在光晕中。
    • 39. 发明申请
    • Communication terminal performance measurement system having effective trace information display function and communication terminal performance measurement method
    • 通信终端性能测量系统具有有效的跟踪信息显示功能和通信终端性能测量方法
    • US20060270398A1
    • 2006-11-30
    • US10554568
    • 2005-02-28
    • Shoichi NakamuraTsuyoshi SatoHiroyuki TsudaTsutomu TokukeHiroki ShiinaTakashi SakamotoYoichi Katsuki
    • Shoichi NakamuraTsuyoshi SatoHiroyuki TsudaTsutomu TokukeHiroki ShiinaTakashi SakamotoYoichi Katsuki
    • H04Q7/20H04B17/00
    • H04W24/06
    • A trace information acquisition section acquires trace information including a plurality of log information which have information on contents and types of log information based on predetermined message information of each of a series of test signals transmitted to a communication terminal for being evaluated by a communication terminal test measuring instrument and a series of reply signals from the communication terminal for being evaluated received by the communication terminal test measuring instrument, and provides clock time information at which the respective message information have been acquired. A trace information display processing control section displays the trace information including the plurality of log information in predetermined formats. The trace information display processing control section has an indication bar display section which displays an indication bar on which the plurality of log information are arranged in a time series based on the clock time at which the respective message information have been acquired so as to be identifiable by being sorted in accordance with the types of the predetermined message information, and a log sequence display section which displays a predetermined number of log information among the plurality of log information as log sequences having time stamps based on the clock time information at which the respective log information have been acquired so as to be associated with the indication bar.
    • 跟踪信息获取部基于通过发送给通信终端的一系列测试信号中的每一个的预定消息信息,通过通信终端测试来评估包括具有关于日志信息的内容和类型的信息的多个日志信息 测量仪器和来自通信终端的一系列应答信号,用于由通信终端测试仪器接收评估,并且提供已经获取了各个消息信息的时钟时间信息。 跟踪信息显示处理控制部分以预定格式显示包括多个日志信息的跟踪信息。 跟踪信息显示处理控制部分具有指示条显示部分,其基于已经获取相应消息信息的时钟时间,以时间序列显示多个日志信息在其上的指示条,以便被识别 通过根据预定消息信息的类型进行排序,以及日志序列显示部分,其在多个日志信息中显示预定数量的日志信息,作为具有时间戳的日志序列,其中基于时间信息, 已经获取日志信息以便与指示栏相关联。