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    • 31. 发明授权
    • Electron beam exposure system
    • 电子束曝光系统
    • US4119854A
    • 1978-10-10
    • US852435
    • 1977-11-17
    • Kazumitsu TanakaNobuo Goto
    • Kazumitsu TanakaNobuo Goto
    • H01L21/027H01J37/304H01J37/00
    • H01J37/3045
    • A reference mark, common to both an electron beam and a workpiece, is arranged above and away from, but in the vicinity of, the workpiece exposure area. The position of the workpiece with respect to the reference mark is ascertained by an optical measuring means such as a Michelson type laser interferometer and the position of the electron beam with respect to the reference mark is ascertained by scanning the electron beam over said reference mark. The relative positions of the electron beam and the exposed workpiece is obtained by comparing the respective positions of the electron beam and workpiece with the reference mark. By so doing, the error between specified and actual positions of the points of impingement of the electron beam on the surface of the workpiece may be corrected.
    • 电子束和工件共同的参考标记布置在工件曝光区域的上方并且远离工件曝光区域。 相对于参考标记的工件的位置由诸如迈克尔逊型激光干涉仪的光学测量装置确定,并且通过在所述参考标记上扫描电子束来确定电子束相对于参考标记的位置。 通过将电子束和工件的各个位置与参考标记进行比较,可以获得电子束和暴露的工件的相对位置。 通过这样做,可以校正电子束在工件表面上的撞击点的指定位置和实际位置之间的误差。
    • 33. 发明授权
    • Loading cam apparatus for toroidal type continuously variable transmission
    • 加载环形无级变速器的凸轮装置
    • US06520888B1
    • 2003-02-18
    • US09419116
    • 1999-10-15
    • Hiroyuki ItohKiyoshi OkuboNobuo GotoMakoto FujinamiHiroshi Kato
    • Hiroyuki ItohKiyoshi OkuboNobuo GotoMakoto FujinamiHiroshi Kato
    • F16H1538
    • F16H15/38
    • A loading cam apparatus for a toroidal type continuously variable transmission includes: a first cam surface formed to have concave and convex portions thereon along a circumferential direction thereo, a second cam surface formed to have concave and convex portions thereon along a circumferential direction thereof and to oppose to the first cam surface along an axial direction thereof, a plurality of rolling elements sandwiched between the first cam surface and the second cam surface, and a retainer for holding the plurality of rolling elements in a freely rotatable state. The retainer includes a retainer main body of a circular annular shape, and pockets provided at outer periphery portions of the retainer main body for holding the plurality of rolling elements, respectively. The retainer main body is formed by carbonitriding material of iron system with a carbon concentration in a range from 0.02 to 0.20 wt % both inclusive.
    • 一种用于环形无级变速器的装载凸轮装置,包括:第一凸轮表面,沿其圆周方向形成为具有凹凸部,第二凸轮面沿其圆周方向形成为具有凹凸部, 与第一凸轮面沿其轴向对置,夹在第一凸轮表面和第二凸轮表面之间的多个滚动元件以及用于将多个滚动元件保持在可自由旋转状态的保持器。 保持器包括圆形环形保持器主体和设置在保持器本体的外周部分上的用于保持多个滚动元件的凹穴。 保持器主体由碳浓度为0.02〜0.20重量%的铁系的碳氮共渗材料形成。