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    • 31. 发明授权
    • Semiconductor storage device and method of manufacturing the same
    • 半导体存储装置及其制造方法
    • US07291530B2
    • 2007-11-06
    • US11202032
    • 2005-08-12
    • Takashi NakagawaTakashi Hase
    • Takashi NakagawaTakashi Hase
    • H01L21/8234H01L21/00
    • H01L28/55H01L28/65
    • A method of manufacturing a semiconductor storage device having a capacitive element having a dielectric layer having a perovskite-type crystal structure represented by general formula ABO3 and a lower electrode and an upper electrode disposed so as to sandwich the dielectric layer therebetween; in the method are carried out forming, on a lower electrode conductive layer, using a MOCVD method, an initial nucleus containing at least one metallic element the same as a metallic element in the dielectric layer, forming, on the initial nucleus, using a MOCVD method, a buffer layer containing at least one metallic element the same as the metallic element contained in both the initial nucleus and the dielectric layer, in a higher content than the content of this metallic element contained in the initial nucleus, and forming, on the buffer layer, using a MOCVD method, the dielectric layer having a perovskite-type crystal structure.
    • 一种具有电容元件的半导体存储器件的制造方法,所述半导体存储器件具有具有由通式ABO 3 3表示的钙钛矿型晶体结构的电介质层,以及下电极和上电极, 介电层; 在该方法中,使用MOCVD方法在下电极导电层上形成初始核,该初始核包含至少一个与电介质层中的金属元素相同的金属元素,在初始核上使用MOCVD 方法,包含与包含在初始核和电介质层中的金属元素相同的至少一种金属元素的缓冲层的含量高于初始核中包含的该金属元素的含量,并且在 缓冲层,使用MOCVD法,电介质层具有钙钛矿型晶体结构。
    • 33. 发明申请
    • Thickness extensional piezoelectric resonator
    • 厚度拉伸压电谐振器
    • US20070069608A1
    • 2007-03-29
    • US11605412
    • 2006-11-29
    • Hiroaki KaidaHitoshi SakaguchiTakashi HaseJiro Inoue
    • Hiroaki KaidaHitoshi SakaguchiTakashi HaseJiro Inoue
    • H01L41/00
    • H03H9/177H03H9/02102
    • An energy-trapping-type thickness extensional piezoelectric resonator using a thickness extensional vibration mode having first and second resonance electrodes formed on portions of the top surface and the bottom surface of a piezoelectric substrate that is polarized in the thickness direction thereof, respectively, in which a portion where the first and second resonance electrodes oppose each other is formed as an energy-trapping-type vibration section, wherein, in order to suppress frequency changes of the thickness extensional vibration mode due to temperature, which is a main response using resonance characteristics, a suppression response having a frequency-temperature-change tendency for suppressing frequency changes of the main response due to temperature is brought into close proximity with the main response.
    • 一种使用厚度延伸振动模式的能量捕获型厚度延伸压电谐振器,其具有分别在其厚度方向上被偏振的压电基板的顶表面和底表面的部分上形成的第一和第二谐振电极,其中, 第一和第二谐振电极彼此相对的部分形成为能量捕获型振动部分,其中为了抑制作为使用谐振特性的主要响应的温度引起的厚度延伸振动模式的频率变化 具有用于抑制由于温度导致的主响应的频率变化的频率 - 温度变化趋势的抑制响应与主要响应紧密相关。