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31. 发明授权

US5225888A Plasma constituent analysis by interferometric techniques 失效
标题翻译：通过干涉技术进行等离子体成分分析
公开(公告)号：US5225888A
公开(公告)日：1993-07-06
申请号：US633811
申请日：1990-12-26
申请人： Gary S. Selwyn , Robert E. Walkup
发明人： Gary S. Selwyn , Robert E. Walkup
IPC分类号： G01J3/26 , G01N21/62 , G01N21/63 , H05H1/00
CPC分类号： G01J3/26 , G01N21/62
摘要： An interferometer (18 or 40) is used to identify trace constituents in a plasma during processing semiconductor devices such as transistors. Light emissions collected from the processing chamber (10) are collimated by lens (14) and transmitted to the interferometer (18 or 40) which selectively allows therethrough particular wavelengths of light which are characteristic of the excitation emissions of certain atoms such as sodium and copper. The light intensity at the selected wavelengths is sensed by a photomultiplier tube (30). In one embodiment, the interferometer (18) is a Fabry-Perot type interferometer and the separation of the plates (20 and 22) which form the Fabry-Perot etalon is controlled using a piezoelectric driver (26). A signal processor (34) correlates the sensed light emissions from the photomultiplier tube (30) with the selected wavelength that is determined by the piezoelectric driver (26). In another embodiment, the interferometer (40) is a narrow bandpass interferometric filter which is tiltable with respect to the collimated incident light from the processing chamber (10). Tilting a narrow bandpass interferometric filter (42) with respect to incident light changes the path length through the filter (42) and allows for the selective transmission of certain wavelengths of light. By rapidly tilting the narrow bandpass interferometric filter (42) at a rate between 5-300 Hz with respect to the incident light, a narrow range of wavelengths on the order of 3 nm can be scanned.
摘要翻译：在处理诸如晶体管的半导体器件期间，使用干涉仪（18或40）来识别等离子体中的微量成分。从处理室（10）收集的光发射被透镜（14）准直并传输到干涉仪（18或40），干涉仪选择性地允许特定波长的光，这些特定波长的光是某些原子的激发发射的特征，例如钠和铜。所选波长处的光强度由光电倍增管（30）感测。在一个实施例中，干涉仪（18）是法布里 - 珀罗型干涉仪，并且使用压电驱动器（26）来控制形成法布里 - 珀罗标准具的板（20和22）的分离。信号处理器（34）使来自光电倍增管（30）的感测光发射与由压电驱动器（26）确定的所选择的波长相关联。在另一个实施例中，干涉仪（40）是相对于来自处理室（10）的准直入射光可倾斜的窄带通干涉滤光器。相对于入射光倾斜窄带通干涉滤光器（42）改变通过滤光器（42）的路径长度，并且允许选择性地传输某些波长的光。通过以相对于入射光的5-300Hz之间的速率快速倾斜窄带通干涉滤光器（42），可以扫描约3nm量级的窄范围的波长。

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