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31. 发明授权

US07099259B2 Exposure apparatus, exposure method, recording and/or reproducing apparatus, and recording and/or reproducing method 失效
公开(公告)号：US07099259B2
公开(公告)日：2006-08-29
申请号：US10373490
申请日：2003-02-24
申请人： Shingo Imanishi
发明人： Shingo Imanishi
IPC分类号： G11B7/00
CPC分类号： G11B7/13927 , B82Y10/00 , G03F7/70325 , G11B7/0908 , G11B7/0937 , G11B7/1275 , G11B7/1362 , G11B7/1374 , G11B7/1378 , G11B7/1387 , G11B7/1395 , G11B7/1398 , G11B7/261 , G11B2007/13725 , G11B2007/13727
摘要： An exposure apparatus has an exposure laser light source, a detection laser light source, a converging lens assembly, detector and a controller. The exposure laser light source emits an exposure laser beam. The detection laser light source emits a detection laser beam. The converging lens assembly receives the exposure laser beam and the detection laser beam, and is disposed in a near-field region of the exposure surface of a negative. The detector detects a linearly polarized component of a detection laser beam reflected off the distal end surface of the converging lens assembly. The controller controls the distance between the distal end surface of the converging lens assembly and the exposure surface on the basis of a detection signal from the detector.

32. 发明授权

US06717896B1 Controlling a gap length in a near-field area in an exposure apparatus 失效
标题翻译：控制曝光装置中的近场区域中的间隙长度
公开(公告)号：US06717896B1
公开(公告)日：2004-04-06
申请号：US09606709
申请日：2000-06-29
申请人： Shingo Imanishi
发明人： Shingo Imanishi
IPC分类号： G11B7095
CPC分类号： G11B7/261 , B82Y10/00 , G03F7/70325 , G11B7/0908 , G11B7/122 , G11B7/1387
摘要： To control the gap length in the near-field area with a high accuracy, the exposure apparatus includes an exposure light source (11) to emit an exposure laser light, a gap length controlling light source (16) to emit a gap length controlling laser light different in wavelength from the exposure laser light, a condenser lens (17a), collimator lens (17b) and a dichroic mirror (12) to project the gap length controlling laser light to a condenser lens (14) and solid immersion lens (SIL) (15), and a photodetector (22) to detect the intensity of a return part of the gap length controlling laser light from an outgoing surface (15b) of the SIL (15). Thus in the exposure apparatus, the gap between the SIL (15) and object (100) is controlled based on the detected return light intensity from the photodetector (22).
摘要翻译：为了以高精度控制近场区域中的间隙长度，曝光装置包括发射曝光激光的曝光光源（11），间隙长度控制光源（16），以发射间隙长度控制激光将曝光激光的波长不同的光，聚光透镜（17a），准直透镜（17b）和分色镜（12），将间隙长度控制激光投影到聚光透镜（14）和固体浸没透镜（SIL ）（15），以及光检测器（22），用于检测来自SIL（15）的出射表面（15b）的控制激光的间隙长度的返回部分的强度。因此，在曝光装置中，基于来自光电检测器（22）的检测到的返回光强度来控制SIL（15）与物体（100）之间的间隙。

33. 发明授权

US06320839B1 Optical information recording medium, optical information recording method and optical information recording apparatus 失效
标题翻译：光信息记录介质，光信息记录方法和光信息记录装置
公开(公告)号：US06320839B1
公开(公告)日：2001-11-20
申请号：US09178750
申请日：1998-10-27
申请人： Minoru Tobita , Goro Fujita , Shingo Imanishi
发明人： Minoru Tobita , Goro Fujita , Shingo Imanishi
IPC分类号： G11B724
CPC分类号： G11B7/127 , G11B7/007 , G11B7/00718 , G11B7/128 , G11B7/261 , G11B27/19 , G11B27/24 , G11B27/3027 , G11B2220/213 , G11B2220/2525 , G11B2220/2545 , G11B2220/2562
摘要： An optical information recording medium, an optical information recording method and an optical information recording apparatus are able to prevent one laser beam of two laser beams from affecting the other laser beam by an offset. In an optical disc in which a groove whose one-side is wobbled or modulated only is sequentially formed by turning on or off one laser beam of two laser beams in accordance with a modulation signal and desired data is recorded by the groove, since the groove is formed by wobbling the one laser beam in such a manner that the one laser beam may not affect the other laser beam, a light intensity of the one laser beam is not added to a light intensity of the other laser beam, which is not wobbled by a wobbled amount so that the other-side of groove may be protected from the influence of the offset.
摘要翻译：光学信息记录介质，光学信息记录方法和光学信息记录装置能够防止两个激光束的一个激光束偏移而影响另一个激光束。在其中通过根据调制信号和期望数据通过接通或断开两个激光束的一个激光束来顺序地形成单侧摆动或调制的槽的光盘由凹槽记录，因为凹槽通过以一个激光束不影响另一个激光束的方式摆动一个激光束而形成，一个激光束的光强度不被加到不是摆动的另一个激光束的光强度通过摆动量使得凹槽的另一侧可以被保护免受偏移的影响。

34. 发明授权

US08780338B2 Optical measuring device and optical measuring method 有权
标题翻译：光学测量装置和光学测量方法
公开(公告)号：US08780338B2
公开(公告)日：2014-07-15
申请号：US13042930
申请日：2011-03-08
申请人： Shunpei Suzuki , Shingo Imanishi , Gakuji Hashimoto , Suguru Dowaki
发明人： Shunpei Suzuki , Shingo Imanishi , Gakuji Hashimoto , Suguru Dowaki
IPC分类号： G01N21/00
CPC分类号： G01N15/1434 , G01N15/1459 , G01N21/64 , G01N21/645 , G01N2015/1493 , G01N2021/4716
摘要： Disclosed herein is an optical measuring device including: a light applying section configured to apply exciting light to a sample flowing in a channel; and a scattered light detecting section configured to detect scattered light generated from the sample irradiated with the exciting light on the downstream side of the sample in the traveling direction of the exciting light; the scattered light detecting section including a scattered light separating mask for separating the scattered light into a low numerical aperture component having a numerical aperture not greater than a specific value and a high numerical aperture component having a numerical aperture greater than the specific value; a first detector for detecting the low numerical aperture component; and a second detector for detecting the high numerical aperture component.
摘要翻译：本发明公开了一种光学测量装置，包括：光施加部，被配置为向在通道中流动的样品施加激发光; 以及散射光检测部，被配置为检测在激发光的行进方向上在样品的下游侧照射的激光的样品产生的散射光; 散射光检测部分包括用于将散射光分离成具有不大于特定值的数值孔径的低数值孔径分量的散射光分离掩模和具有大于该特定值的数值孔径的高数值孔径分量; 用于检测低数值孔径分量的第一检测器; 以及用于检测高数值孔径分量的第二检测器。

35. 发明授权

US08309000B2 Method for manufacturing microlens and method for manufacturing solid-state image sensor 失效
标题翻译：制造微透镜的方法和制造固态图像传感器的方法
公开(公告)号：US08309000B2
公开(公告)日：2012-11-13
申请号：US12358737
申请日：2009-01-23
申请人： Goro Fujita , Seiji Kobayashi , Kimihiro Saito , Shingo Imanishi
发明人： Goro Fujita , Seiji Kobayashi , Kimihiro Saito , Shingo Imanishi
IPC分类号： B29D11/00
CPC分类号： B29D11/00365 , G02B3/0031
摘要： A method for manufacturing a microlens includes forming a microlens by pressing a microlens mold having a reverse shape of a microlens formed therein on a microlens-forming film formed on a substrate to transfer the reverse shape of the microlens to the microlens-forming film. The microlens mold is formed by irradiating an inorganic resist film which is formed on a mold substrate with exposure light by relative two-dimensional scanning, and etching an exposed region of the inorganic resist film to form the reverse shape of the microlens. The irradiation intensity of the exposure light is adjusted to correspond to the depth of the reverse shape of the microlens from the surface of the inorganic resist film on the basis of profile data of the reverse shape of the microlens.
摘要翻译：用于制造微透镜的方法包括通过将形成在其上的微透镜的反向形状的微透镜模具压在形成于基板上的微透镜形成膜上来形成微透镜，以将微透镜的反向形状转印到微透镜形成膜。通过相对二维扫描用曝光光照射形成在模具基板上的无机抗蚀剂膜，并且蚀刻无机抗蚀剂膜的暴露区域以形成微透镜的反向形状来形成微透镜模具。基于微透镜的反向形状的轮廓数据，将曝光光的照射强度根据无机抗蚀剂膜的表面的微透镜的倒置形状的深度进行调整。

36. 发明申请

US20100096560A1 OPTICAL MEASURING DEVICE 有权
标题翻译：光学测量装置
公开(公告)号：US20100096560A1
公开(公告)日：2010-04-22
申请号：US12579754
申请日：2009-10-15
申请人： Shingo Imanishi , Takeo Arai , Suguro Dowaki
发明人： Shingo Imanishi , Takeo Arai , Suguro Dowaki
IPC分类号： G01J1/58
CPC分类号： G01J3/4406 , G01J3/02 , G01J3/0208 , G01J3/0224 , G01J3/10 , G01J3/14 , G01N21/6445 , G01N21/645 , G01N2021/6417 , G01N2021/6421 , G01N2021/6482
摘要： An optical measuring device includes: a light applying section configured to apply laser light to a sample flowing in a channel; and a fluorescence detecting section configured to detect fluorescence generated from the sample irradiated with the laser light; the fluorescence detecting section including a multichannel photomultiplier tube having a plurality of detection channels capable of simultaneously detecting a plurality of light beams, a light separator configured to separate the fluorescence according to wavelengths to provide the plurality of light beams, the light separator being provided by a transmission grating or a prism, and a telecentric condenser lens configured to receive the plurality of light beams from the light separator and direct the plurality of light beams toward the plurality of detection channels of the multichannel photomultiplier tube so that the optical axes of the plurality of light beams are parallel to each other.
摘要翻译：一种光学测量装置，包括：被配置为向在通道中流动的样品施加激光的光施加部; 以及荧光检测部，被配置为检测由所述激光照射的样品产生的荧光; 荧光检测部分包括具有能够同时检测多个光束的多个检测通道的多通道光电倍增管，配置成根据波长分离荧光以提供多个光束的光分离器，光分离器由透射光栅或棱镜，以及远心聚光透镜，被配置为从光分离器接收多个光束并将多个光束引向多通道光电倍增管的多个检测通道，使得多个光轴的光束彼此平行。

37. 发明申请

US20090108214A1 OPTICAL DETECTION METHOD AND OPTICAL DETECTION APPARATUS FOR A FINE PARTICLE 有权
标题翻译：光学检测方法和光学检测装置
公开(公告)号：US20090108214A1
公开(公告)日：2009-04-30
申请号：US12258075
申请日：2008-10-24
申请人： Masataka SHINODA , Shingo Imanishi
发明人： Masataka SHINODA , Shingo Imanishi
IPC分类号： A61N5/067 , G01J1/58
CPC分类号： G01N15/1425 , G01N15/1434 , G01N15/1459 , G01N2015/1006 , G01N2015/1438
摘要： Disclosed herein is an optical detection method and optical detection apparatus, the apparatus including: a light irradiation section configured to irradiate a laser beam upon one of fine particles which are successively fed in a flow path; and a light detection section configured to detect fluorescent light and/or scattered light generated from any of the fine particles upon which the laser beam is irradiated; the method including the steps of: irradiating a laser beam upon one of fine particles which are successively fed in a flow path; and detecting fluorescent light and/or scattered light generated from the fine particle; wherein the laser beam being formed as a pulse laser beam whose pulse intensity is modulated such that one laser beam or two or more laser beams having different wavelengths are irradiated by a plural number of times upon one fine particle with the intensity varied.
摘要翻译：本发明公开了一种光学检测方法和光学检测装置，该装置包括：光照射部，被配置为将激光束照射到在流路中依次供给的细粒子之一; 以及光检测部，被配置为检测由照射所述激光束的任何微粒产生的荧光和/或散射光; 该方法包括以下步骤：将激光束照射到在流路中连续馈送的细颗粒之一; 并检测由该微粒产生的荧光和/或散射光; 其中激光束被形成为脉冲激光束的脉冲激光束，其脉冲强度被调制成使得一个激光束或具有不同波长的两个或更多个激光束被多次照射在具有强度变化的一个微粒子上。

38. 发明申请

US20080233361A1 PATTERN-FORMED SUBSTRATE, PATTERN-FORMING METHOD, AND DIE 失效
标题翻译：图案形成的基板，图案形成方法和模具
公开(公告)号：US20080233361A1
公开(公告)日：2008-09-25
申请号：US12047216
申请日：2008-03-12
申请人： Shingo Imanishi
发明人： Shingo Imanishi
IPC分类号： G03F7/00 , B41M5/00
CPC分类号： H01L21/0332 , H01L21/31144
摘要： A pattern-formed substrate is provided. The pattern-formed substrate includes a substrate base, an organic thin film and an inorganic resist film stacked on the substrate base in this order, and patterns having predetermined aspect ratios formed on the organic thin film and the inorganic resist film, respectively. The pattern of the organic thin film is formed by selective etching using the pattern of the inorganic resist film as a mask.
摘要翻译：提供了图案形成的基板。图案形成的衬底包括依次层叠在衬底基底上的衬底基底，有机薄膜和无机抗蚀剂膜以及分别形成在有机薄膜和无机抗蚀剂膜上的具有预定长宽比的图案。通过使用无机抗蚀剂膜的图案作为掩模的选择性蚀刻形成有机薄膜的图案。

39. 发明授权

US07180833B2 Information recording and/or reproducing apparatus 失效
标题翻译：信息记录和/或再现装置
公开(公告)号：US07180833B2
公开(公告)日：2007-02-20
申请号：US10461326
申请日：2003-06-16
申请人： Minoru Takeda , Masataka Shinoda , Shingo Imanishi
发明人： Minoru Takeda , Masataka Shinoda , Shingo Imanishi
IPC分类号： G11B7/00
CPC分类号： G11B7/1387 , G11B7/1374 , G11B2007/13727
摘要： An information recording and/or reproducing apparatus includes a laser light source from which a laser beam having a wavelength of from 220 nm to 280 nm exits; and a converging lens unit disposed at a nearfield area of a recording medium and upon which the laser beam from the laser light source is incident. The converging lens unit includes an objective lens and a solid immersion lens. The solid immersion lens is disposed between the objective lens and the recording medium, and is formed of a highly refractive material having a high transmittance. The information recording and/or reproducing apparatus records an information signal onto or reproduces an information signal from the recording medium by irradiating the recording medium with the laser beam from the laser light source.
摘要翻译：信息记录和/或再现装置包括激光源，激光束从波长220nm至280nm离开; 以及会聚透镜单元，设置在记录介质的近场区域，并且来自激光光源的激光束入射。会聚透镜单元包括物镜和固体浸没透镜。固体浸没透镜设置在物镜和记录介质之间，并且由具有高透射率的高折射材料形成。信息记录和/或再现装置通过用来自激光光源的激光束照射记录介质，将信息信号记录到记录介质上或从记录介质再现信息信号。

40. 发明授权

US06798493B2 Photolithography apparatus and exposure method 失效
标题翻译：光刻设备和曝光方法
公开(公告)号：US06798493B2
公开(公告)日：2004-09-28
申请号：US10373357
申请日：2003-02-24
申请人： Shingo Imanishi
发明人： Shingo Imanishi
IPC分类号： G03B2752
CPC分类号： B82Y10/00 , G03F7/70325 , G11B7/1387 , G11B7/261
摘要： A photolithography apparatus includes a laser beam source, a focusing lens, a detecting unit, and a control unit. The laser beam source emits a laser beam. The focusing lens is disposed in the near field of an exposure surface of an exposure substrate for receiving the laser beam emitted from the laser beam source. The detecting unit detects one linearly polarized component of the laser beam reflected from the distal end surface of the focusing lens. The control unit controls the distance between the distal end surface of the focusing lens and the exposure surface based on a detection signal supplied from the detecting unit.
摘要翻译：光刻设备包括激光束源，聚焦透镜，检测单元和控制单元。激光束源发射激光束。聚焦透镜设置在曝光基板的曝光表面的近场中，用于接收从激光束源发射的激光束。检测单元检测从聚焦透镜的远端表面反射的激光束的一个线性偏振分量。控制单元基于从检测单元提供的检测信号来控制聚焦透镜的远端表面与曝光表面之间的距离。

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