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    • 38. 发明授权
    • Method for processing semiconductor structure and device based on the same
    • 用于处理半导体结构的方法和基于此的器件
    • US08138097B1
    • 2012-03-20
    • US12886106
    • 2010-09-20
    • Atsunobu IsobayashiMasao Ishikawa
    • Atsunobu IsobayashiMasao Ishikawa
    • H01L21/302H01L21/461
    • H01L21/31144H01L21/0332H01L21/0337
    • Methods for fabricating a device and related device structures are provided herein. According to one embodiment, a method for fabricating a device includes the acts of producing a substrate; forming a structure on the substrate having a lower dielectric layer, a metal layer, an upper dielectric layer, a planarizing layer, and a layer of photoresist material; developing the photoresist material according to a mask pattern; etching the planarizing layer and the upper dielectric layer according to the mask pattern; removing the photoresist material and the planarizing layer upon etching of the planarizing layer and the upper dielectric layer; applying a selective metal growth or metal/organic film to respective exposed portions of the metal layer following etching of the upper dielectric layer, thereby obtaining an inverted mask pattern; and etching at least the metal layer and the lower dielectric layer according to the inverted mask pattern.
    • 本文提供了制造器件和相关器件结构的方法。 根据一个实施例,一种用于制造器件的方法包括制造衬底的动作; 在具有下电介质层,金属层,上电介质层,平坦化层和光致抗蚀剂材料层的衬底上形成结构; 根据掩模图案显影光致抗蚀剂材料; 根据掩模图案蚀刻平坦化层和上介电层; 在蚀刻平坦化层和上介电层时去除光致抗蚀剂材料和平坦化层; 在蚀刻上介电层之后,在金属层的各露出部分上施加选择性金属生长或金属/有机膜,从而获得反向掩模图案; 并且根据倒置的掩模图案至少蚀刻金属层和下介电层。
    • 40. 发明授权
    • Magazine for roll-type photosensitive material
    • 卷式感光材料杂志
    • US5246111A
    • 1993-09-21
    • US837811
    • 1992-02-18
    • Osamu ShibazakiToshiyuki IkariyaMasao Ishikawa
    • Osamu ShibazakiToshiyuki IkariyaMasao Ishikawa
    • G03B27/46G03B27/58G03C3/00G03D13/02
    • G03B27/588
    • A magazine for a roll-type of photosensitive material having: an inner holder including a back plate made of paper; side plates made of paper connected with both sides of the back plate; supporting members each composed of plural accumulated disks and made of paper for supporting both ends of a spool around which the photosensitive material is wound; and a lightproof box made of paper to cover the inner holder. A slit through which the photosensitive material is pulled out is formed by a folded portion of the back plate and a lid portion of the lightproof box. A lightproofing material is provided to the folded portion of the back plate and the lid portion of the lightproof box at the slit. The supporting members are pivotally held by the side plates through a metallic or a synthetic resin shaft.
    • 一种用于辊式感光材料的盒子,具有:具有由纸构成的背板的内保持器; 侧板制成的侧板与背板的两侧连接; 每个由多个累积盘组成的支撑构件,用于支撑卷绕有感光材料的卷轴的两端; 以及由纸覆盖内部支架的防光盒。 感光材料拉出的狭缝由背板的折叠部分和防光盒的盖部分形成。 在该狭缝上的背板的折叠部分和防光盒的盖部分设有防光材料。 支撑构件通过金属或合成树脂轴由侧板枢转地保持。