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    • 36. 发明申请
    • Magnetic tunnel junction (MTJ) based magnetic field angle sensor
    • 磁隧道结(MTJ)磁场角传感器
    • US20080272771A1
    • 2008-11-06
    • US11799706
    • 2007-05-02
    • Yimin GuoPo-Kang Wang
    • Yimin GuoPo-Kang Wang
    • G01R33/00
    • G01R33/093B82Y25/00G01R33/098
    • A magnetic field angle sensor for measurement of a magnetic field angle over a 360° range has magnetic tunnel junction elements oriented at multiple angles. The magnetic field angle sensor includes multiple magnetic tunnel junction elements formed on a substrate that have an anti-ferromagnetic layer and pinned synthetic multiple layer. The magnetic tunnel junction elements are patterned to have a large dimensional aspect ratio and large anisotropies the pinned synthetic multiple layer of the magnetic tunnel junction elements. The magnetic tunnel junction elements are annealed in the presence of a strong magnetic field in a direction of the reference axis and the annealed for a second time with no external magnetic field so that exchange pinning is reduced and strong stress induced anisotropies of the pinned synthetic multiple layer align magnetization of the pinned synthetic multiple layer align a long axis of each of the magnetic tunnel junction elements.
    • 用于测量360°范围内的磁场角的磁场角传感器具有以多个角度定向的磁性隧道结元件。 磁场角传感器包括形成在具有反铁磁层和固定合成多层的基板上的多个磁性隧道结元件。 磁性隧道结元件被图案化以具有大的尺寸长宽比和大的各向异性的磁性隧道结元件的被钉合的合成多层。 磁性隧道结元件在存在强磁场的情况下在参考轴的方向上进行退火,并且在没有外部磁场的情况下第二次退火,从而减少了交换钉扎和强制应力引起的固定合成倍数的各向异性 钉扎合成多层的层对准磁化使每个磁性隧道结元件的长轴对齐。