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    • 33. 发明授权
    • Method of making a single-crystal-silicon 3D micromirror
    • 制造单晶硅3D微镜的方法
    • US07091057B2
    • 2006-08-15
    • US10742120
    • 2003-12-19
    • Chih Kiong Terence GanAjay AgarwalJanak SinghXiaolin Zhang
    • Chih Kiong Terence GanAjay AgarwalJanak SinghXiaolin Zhang
    • H01L21/00
    • G02B26/0866
    • First and second n-doped regions are formed at a surface of a p-doped single crystal silicon substrate. An aluminum layer is patterned overlying some of the second n-doped regions to form thermal actuators. A dielectric layer is deposited overlying the patterned aluminum layer and an underlying thermal oxide layer. A metal layer is deposited thereover and patterned to form bond pads to the thermal actuators and to form reflecting mirror surfaces overlying others of the second n-doped regions to form micromirrors. The substrate is etched away from the backside stopping at the first and second n-doped regions. Then the wafer is diced into mirror array chips. Portions of the first n-doped regions are etched away from the frontside to form flexible springs wherein the second n-doped regions covered by the patterned aluminum layer form thermal actuators and wherein the flexible springs connect the micromirrors to the thermal actuators.
    • 在p掺杂单晶硅衬底的表面上形成第一和第二n掺杂区域。 将铝层图案覆盖在一些第二n掺杂区域上以形成热致动器。 沉积在图案化的铝层和下面的热氧化物层上的电介质层。 金属层沉积在其上并被图案化以形成到热致动器的接合焊盘并且形成覆盖第二n掺杂区域中的其它区域的反射镜表面以形成微镜。 在第一和第二n掺杂区域处的衬底被从背面蚀刻掉。 然后将晶片切成镜阵列芯片。 第一n掺杂区域的部分从前侧被蚀刻以形成柔性弹簧,其中由图案化铝层覆盖的第二n掺杂区域形成热致动器,并且其中柔性弹簧将微镜连接到热致动器。
    • 34. 发明授权
    • Capillary with glass internal surface
    • 毛细管带玻璃内表面
    • US06808644B2
    • 2004-10-26
    • US10139049
    • 2002-05-02
    • Yu ChenJanak Singh
    • Yu ChenJanak Singh
    • B44C122
    • G01N27/44791B01J19/0093B01J2219/00783B01J2219/00828B01J2219/00831B01J2219/00907B01L3/5027G01N27/44704
    • A process to form a capillary that is well insulated from its environment is described. Said process has two stages. The first stage, which is the same for both of the invention's two embodiments, comprises forming a micro-channel in the surface of a sheet of glassy material. For the first embodiment, this sheet is bonded to a layer of oxide, that lies on the surface of a sheet of silicon, thereby sealing in the capillary. After all silicon has been selectively removed, a thin membrane of oxide remains. Using a low temperature bonding process, a second sheet of glassy material is then bonded to this membrane. In the second embodiment, the silicon is not fully removed. Instead, the oxide layer of the first embodiment is replaced by an oxide/nitride/oxide trilayer which provides improved electrical insulation between the capillary and the remaining silicon at a lower level of inter-layer stress.
    • 描述了形成与其环境绝缘的毛细管的方法。 所述过程有两个阶段。 与本发明的两个实施例相同的第一阶段包括在玻璃状材料片的表面中形成微通道。 对于第一实施例,该片材结合到位于硅片表面上的氧化物层,从而密封在毛细管中。 在所有的硅已经被选择性地去除之后,留下一薄层的氧化物。 使用低温粘合工艺,然后将第二片玻璃状材料粘合到该膜上。 在第二实施例中,硅没有完全去除。 相反,第一实施例的氧化物层被氧化物/氮化物/氧化物三层替代,其在低层次的层间应力下在毛细管和剩余的硅之间提供改善的电绝缘。