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    • 31. 发明专利
    • DE69507877D1
    • 1999-03-25
    • DE69507877
    • 1995-11-17
    • FUJIKIN KK
    • DAIDO KUNIHIKOYOSHIKAWA KAZUHIROOGAWA SHUHEI
    • F16K31/122F16K31/126F16K41/10F16K51/02
    • An actuator comprises a valve case (1) opened upward, a gas-driven actuator (2) having a fixed portion provided on the valve case and fixed thereto and an operating portion movable upward and downward by a drive gas when the gas flows in or out, a valve stem (3) extending upward from inside the valve case to above the case and having its upper end fixed to the operating portion of the actuator, and a valve element (4) provided on the lower end of the valve stem. A valve case fluid seal bellows (29) and an actuator gas seal bellows (30) are connected between the valve stem and the actuator fixed portion and between the actuator fixed portion and operating portion, respectively. A vacuum is contained in a closed space formed by the valve stem, fluid seal bellows, actuator fixed portion, gas seal bellows and actuator operating portion. The variations in the internal pressure of the closed space due to variations in the ambient temperature are much smaller than the pressure of the drive gas, so that the flow rate of fluid remains unchanged by the variations in the ambient temperature.
    • 36. 发明专利
    • METAL DIAPHRAGM TYPE VALVE
    • CA2253988C
    • 2001-05-29
    • CA2253988
    • 1998-11-12
    • FUJIKIN KK
    • YOSHIKAWA KAZUHIROOGAWA SHUHEI
    • F16K7/12F16J15/04F16K7/16F16K41/12
    • A metal diaphragm type valve includes a valve seat holder supported from a rotatable valve stem, a metal diaphragm and a deflection limiter. The valve seat holder has a shaft extending upwardly through central openings in the diaphragm and the deflection limiter. A diaphragm support step having an annular flat surface joining an arcuate shoulder is provided around the shaft of the valve seat holder and the inner peripheral edge of the diaphragm rests on the flat surface. The deflection limiter has a flat bottom surface facing the top surface of the diaphragm and an arcuate surface extends radially outwardly from the flat bottom surface. The deflection limiter, diaphragm and valve seat holder are welded together by a weld extending through the flat bottom portion of the deflection limiter and the inner peripheral edge of the diaphragm to the flat surface on the seat holder, the weld forming an air-tight seal between the valve chamber and the passage for the shaft. The radial dimensions of the flat surfaces are different so that bending stresses occur in different regions of the diaphragm depending on whether the valve is opened or closed.
    • 37. 发明专利
    • DE69507877T2
    • 1999-07-22
    • DE69507877
    • 1995-11-17
    • FUJIKIN KK
    • DAIDO KUNIHIKOYOSHIKAWA KAZUHIROOGAWA SHUHEI
    • F16K31/122F16K31/126F16K41/10F16K51/02
    • An actuator comprises a valve case (1) opened upward, a gas-driven actuator (2) having a fixed portion provided on the valve case and fixed thereto and an operating portion movable upward and downward by a drive gas when the gas flows in or out, a valve stem (3) extending upward from inside the valve case to above the case and having its upper end fixed to the operating portion of the actuator, and a valve element (4) provided on the lower end of the valve stem. A valve case fluid seal bellows (29) and an actuator gas seal bellows (30) are connected between the valve stem and the actuator fixed portion and between the actuator fixed portion and operating portion, respectively. A vacuum is contained in a closed space formed by the valve stem, fluid seal bellows, actuator fixed portion, gas seal bellows and actuator operating portion. The variations in the internal pressure of the closed space due to variations in the ambient temperature are much smaller than the pressure of the drive gas, so that the flow rate of fluid remains unchanged by the variations in the ambient temperature.
    • 40. 发明专利
    • CONTROLLER
    • CA2163613A1
    • 1996-11-11
    • CA2163613
    • 1995-11-23
    • FUJIKIN KK
    • DAIDO KUNIHIKOYOSHIKAWA KAZUHIROOGAWA SHUHEI
    • F16K31/122F16K31/126F16K41/10F16K51/02F16K31/128
    • An actuator comprises a valve case opened upward, a gas-driven actuator having a fixed portion provided on the valve case and fixed thereto and an operating portion movable upward and downward by a drive gas when the gas flows in or out, a valve stem extending upward from inside the valve case to above the case and having its upper end fixed to the operating portion of the actuator, and a valve element provided on the lower end of the valve stem. A valve case fluid seal bellows and an actuator gas seal bellows are connected between the valve stem and the actuator fixed portion and between the actuator fixed portion and operating portion, respectively. A vacuum is contained in a closed space formed by the valve stem, fluid seal bellows, actuator fixed portion, gas seal bellows and actuator operating portion. The variations in the internal pressure of the closed space due to variations in the ambient temperature are much smaller than the pressure of the drive gas, so that the flow rate of fluid remains unchanged by the variations in the ambient temperature.