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    • 32. 发明授权
    • Photoimageable, aqueous acid soluble polyimide polymers
    • 可光成像,含水酸溶性聚酰亚胺聚合物
    • US06379865B1
    • 2002-04-30
    • US09547390
    • 2000-04-11
    • Guoping MaoHany B. EitouniAlphonsus V. PociusJohn B. ScheibnerNanayakkara L. D. SomasiriNicholas A. StaceyAlfred Viehbeck
    • Guoping MaoHany B. EitouniAlphonsus V. PociusJohn B. ScheibnerNanayakkara L. D. SomasiriNicholas A. StaceyAlfred Viehbeck
    • G03F709
    • C08G73/1007C08G73/1025G03F7/0387G03F7/164H05K3/287H05K2203/135Y10S430/136
    • A photoimageable, aqueous acid soluble polyimide polymer comprising an anhydride, including a substituted benzophenone nucleus, a diamine reacted with the anhydride to form a photosensitive polymer intermediate, and at least 60 Mole % of solubilizing amine reacted with the photosensitive polymer intermediate to form the photoimageable, aqueous acid soluble polyimide polymer. An emulsion for electrophoretic deposition of a coating of a photoimageable, aqueous acid soluble polyimide polymer comprises a dispersed phase, including the photoimageable aqueous acid soluble polyimide polymer, dissolved in an organic solvent and a dispersion phase including a coalescence promoter and water. The emulsion may be applied, by electrophoretic deposition, to a conductive structure to provide a photoimageable coating on the conductive structure. After exposing the coating to a pattern of radiation for photocrosslinking exposed parts of the photoimageable aqueous acid soluble polyimide polymer, an aqueous acid developer solution removes unexposed photoimageable aqueous acid soluble polyimide polymer to reveal a crosslinked polyimide polymer image of the radiation pattern.
    • 包含酸酐的可光成像的含水酸性聚酰亚胺聚合物,包括取代的二苯甲酮核,与酸酐反应形成光敏聚合物中间体的二胺和至少60摩尔的增溶胺与感光性聚合物中间体反应形成可光成像 ,水溶性聚酰亚胺聚合物水溶液。 用于电泳沉积可光成像的含水酸性聚酰亚胺聚合物涂层的乳液包括溶解在有机溶剂中的分散相,包括可光成像的含水溶性聚酰亚胺聚合物,以及包含聚结促进剂和水的分散相。 可以通过电泳沉积将乳液施加到导电结构上,以在导电结构上提供可光成像的涂层。 在将涂层暴露于辐照图案之后,将可光成像的含水溶性聚酰亚胺聚合物的曝光部分光致交联,酸性显影剂水溶液除去未曝光的可光成像的酸性水溶性聚酰亚胺聚合物,以露出辐射图案的交联聚酰亚胺聚合物图像。