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    • 31. 发明授权
    • Semiconductor devices utilizing silicide reaction
    • 利用硅化物反应的半导体器件
    • US6051851A
    • 2000-04-18
    • US917675
    • 1997-08-26
    • Tadahiro OhmiMamoru MiyawakiYoshio NakamuraHiroshi SuzukiTakeo Yamashita
    • Tadahiro OhmiMamoru MiyawakiYoshio NakamuraHiroshi SuzukiTakeo Yamashita
    • H01L21/82G11C17/16H01L23/525H01L27/10H01L31/0328H01L31/0336H01L31/072H01L31/109
    • H01L27/112G11C17/16H01L23/5252H01L27/11206H01L2924/0002H01L2924/3011
    • Cheap semiconductor memory devices are provided so as to enable high-speed writing and reading but rarely to malfunction, thus being high in reliability. In a semiconductor device which comprises a plurality of cells each having a semiconductor layer between a pair of conductors, at least one of the pair of conductors is made of a metal, and the semiconductor layer comprises an amorphous silicon that can form a silicide region with the metal as reacting at a reaction rate of not less than 10 m/sec. Another device is characterized in that the semiconductor layer is an amorphous silicon, in that at least one of the pair of conductors is made of a metal silicide-reacting with the amorphous silicon, and in that the silicide region formed is conic. Another device is characterized in that the semiconductor layer is an amorphous silicon, in that at least one of the pair of conductors is formed of a metal silicide-reacting with the amorphous silicon, and in that a film-formed surface is produced without being exposed to an oxide atmosphere, between a step of forming the amorphus silicon and a step of forming the metal.
    • 提供廉价的半导体存储器件,以便能够进行高速写入和读取,但很少发生故障,因此可靠性高。 在包括多个单元的半导体器件中,每个单元各自在一对导体之间具有半导体层,所述一对导体中的至少一个导体由金属制成,并且所述半导体层包括可形成硅化物区域的非晶硅, 金属以不小于10m /秒的反应速率反应。 另一种器件的特征在于,半导体层是非晶硅,其中该对导体中的至少一个导体由与非晶硅反应的金属硅化物制成,并且形成的硅化物区域是圆锥形。 另一种器件的特征在于,半导体层是非晶硅,其中该对导体中的至少一个导体由与非晶硅反应的金属硅化物形成,并且由此形成膜形成表面而不暴露 在氧化物气氛之间,形成无定形硅的步骤和形成金属的步骤。
    • 39. 发明授权
    • Display unit
    • 显示单元
    • US5757054A
    • 1998-05-26
    • US714439
    • 1996-09-16
    • Mamoru MiyawakiShunsuke Inoue
    • Mamoru MiyawakiShunsuke Inoue
    • G02F1/136G02F1/1362G02F1/1368G09F9/30H01L27/06H01L29/04H01L31/036
    • G02F1/136277H01L27/0688G02F1/13454
    • The present invention solves problems as follows: a problem that, since light for displaying enters into a semiconductor substrate, carrier induced by light occurs in the semiconductor substrate, potential of the substrate fluctuates, and hence display characteristics become worse; a problem that, in the semiconductor substrate, voltages are applied to the peripheral driving circuits so as to operate the peripheral driving circuits formed in a single-crystal area, which makes display characteristics worse by the voltages being conducted to the display area through the substrate; and a problem that, in case potentials of adjacent pixels greatly differ, the difference locally changes. For this purpose, in a display unit including an active matrix substrate having an image display portion being provided with a plurality of switches and a driving circuit for supplying driving signals to the switches around the image display portion, an opposing substrate opposing the active matrix substrate and having a transparent electrode, and a liquid crystal material between both of the active matrix substrate and the opposing substrate, heavily doped impurity regions having impurity density heavier than that of the semiconductor substrate are formed in the image display portion, and the heavily doped impurity regions are connected to a fixed potential around the image display portion.
    • 本发明解决了以下问题:由于用于显示的光进入半导体衬底,所以在半导体衬底中产生由光引起的载流子,所以衬底的电位变动,因此显示特性变差; 在半导体基板中,向周边驱动电路施加电压以对形成在单晶区域中的外围驱动电路进行操作的问题在于,通过通过基板向显示区域传导的电压使显示特性变差 ; 以及在相邻像素的电位大大不同的情况下,差异局部变化的问题。 为此,在包括具有图像显示部分的多个开关的有源矩阵基板和用于向图像显示部分周围的开关提供驱动信号的驱动电路的显示单元中,与有源矩阵基板相对的相对基板 并且在有源矩阵基板和相对基板两者之间具有透明电极和液晶材料,在图​​像显示部分中形成具有比半导体基板重的杂质密度的重掺杂杂质区,并且重掺杂杂质 区域连接到图像显示部分周围的固定电位。