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31. 发明专利

JPH1166745A OPTICAL TRACK SERVO TYPE MAGNETIC RECORDING METHOD AND DEVICE 失效
公开(公告)号：JPH1166745A
公开(公告)日：1999-03-09
申请号：JP21435797
申请日：1997-08-08
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： YAMAMOTO MASAKI
IPC分类号： G11B20/10 , G11B7/085 , G11B19/02 , G11B19/06
摘要： PROBLEM TO BE SOLVED: To write a digital signal on a recording medium with a prescribed interval with a simple constitution by generating a clock signal becoming a reference from the optical continuous signal of the recording medium. SOLUTION: When a recording medium 1 having an optical track servo pattern is rotating driven, a servo signal being on the recording medium 1 is detected by an optical pickup 3 to be inputted to a PLL circuit consisting of a phase/frequency comparator circuit 6, a voltage controlled oscillator VCO 7 and a frequency divider circuit 8 via a comparator 5. In the PLL circuit 5, the clock synchronized with the servo signal is gernerated to be supplied to an encoding circuit 9 as a reference clock at the time of a write. The encoding circuit 9 encodes recording information from a CPU 10 based on the generated reference clock and amplifies them with a write amplifier 11 to write them on the recording medium 1 via a magnetic head 12. Thus, a digital signal corresponding to the recording signal synchronized with the servo signal detected by the optical pickup 3 can be recorded in the recording medium.

32. 发明专利

JPH06274844A AUTOMATIC ADJUSTING DEVICE FOR VERTICAL MAGNETIC HEADS FOR FLOPPY DISK DEVICE 失效
公开(公告)号：JPH06274844A
公开(公告)日：1994-09-30
申请号：JP6496493
申请日：1993-03-24
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SHINOMORI AKIRA , IKEUCHI TETSUYA , MIKI HIROSHI , YAMAMOTO MASAKI
IPC分类号： G11B5/56
摘要： PURPOSE:To relieve the burden of an operator, to shorten an adjusting time and to prolong the life time of adjustment media using a processing means for a noise having the same frequency band as that of a signal for adjustment by automatically adjusting the heads up to a prescribed position for head adjustment. CONSTITUTION:An analog signal for adjustment being read by an upper and a lower head '0', 1 and written in adjusting media 17 is converted to a prescribed measuring signal by means of signal conversion systems 1-4 and a signal detecting system 5. Processing systems 6-10 instruct a driving amount and a direction to driving systems 11-16 based on the measured values and automatically adjust the head up to the target positions of the upper and the lower heads '0', 1.

33. 发明专利

JPH0590125A POSITION ALIGNMENT EQUIPMENT 失效
公开(公告)号：JPH0590125A
公开(公告)日：1993-04-09
申请号：JP25086591
申请日：1991-09-30
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： KUBO KEIJI , YAMAMOTO MASAKI , SATO TAKEO , NAGANO HIROYUKI
IPC分类号： G01B11/00 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To detect position deviation of a reticle and a wafer with high precision, by projecting the image of a scanning slit on a slit on the reticle and a slit on a wafer, and comparing time-variant phases of two bright and dark images. CONSTITUTION:When a rotary slit 2 is rotated at a constant speed, the image of the rotary slit 2 projected on a wafer 9 and the image of a slit 10 on the wafer 9 are superposed with each other, projected on a transmission window 6 on a reticle 5, and detected by a photo detector 13. A slit 7 on the reticle 5 and the projected image of the rotary slit 2 are superposed with each other. When the rotary slit 2 is rotated at a constant speed, an image whose brightness periodically changes is generated. Said image is detected by a photo detector 14. By detecting and comparing the phase difference between the photo detectors 13 and 14, the relative position of the wafer and the reticle is obtained. Hence said position is not affected by the fluctuation of air due to the change of a refractive index which is different along an optical path.

34. 发明专利

JPH0566108A POSITIONING DEVICE 失效
公开(公告)号：JPH0566108A
公开(公告)日：1993-03-19
申请号：JP22776591
申请日：1991-09-09
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： TAKEUCHI HIROYUKI , YAMAMOTO MASAKI , SUGIYAMA YOSHIYUKI , SATO TAKEO , AOKI SHINICHIRO
IPC分类号： G01B11/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To highly precisely position a reticule and a wafer through a projecting optical system in a positioning device used in various exposing devices by correcting the convergence error in an alignment wavelength different from an exposing wavelength, and imaging a positioning mark image on the reticule onto the wafer through a correcting optical system and a lens. CONSTITUTION:A first positioning mark 5 provided on a first object 1 situated on the object surface of a projecting optical system, a second positioning mark 6 provided on a second object 2 situated on the image surface of the projecting optical system, and a light source 4 emitting a coherent alignment light of two frequencies having a wavelength different from an exposing wavelength are provided. A correcting optical system 7 for correcting the convergence error of the projecting optical system so as to perform a precise imaging onto the second object surface in conformation to a specified area where an interference fringe is formed on the first object, a spatial filtering optical system 13 for removing a speckle pattern from the light returned from the second positioning mark 6, and a light detecting means 15 for detecting a light beat signal from the light transmitted through the space filtering optical system are provided.

35. 发明专利

JPH0430931A MOVABLE TABLE 失效
公开(公告)号：JPH0430931A
公开(公告)日：1992-02-03
申请号：JP13340290
申请日：1990-05-23
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SUGIYAMA YOSHIYUKI , SATO TAKEO , AOKI SHINICHIRO , YAMAMOTO MASAKI , TAKEUCHI HIROYUKI , NAKANISHI YOSHITO
IPC分类号： B23Q5/34
摘要： PURPOSE:To make positioning with a table moved at a long stroke and also slightly transfered by guiding the table with the same straight line guiding mechanism, using a feed screw mechanism as a long stroke feed mechanism, and interposing a piezoelectric element between the nuts of the feed screw mechanism. CONSTITUTION:Linear ball bushes 2 are fitted to the four corners of the lower surface of a slide table 1, each of the linear ball bushes 2 is slidably engaged with a pair of guide shafts 3, and the slide table 1 is slid along the guide shafts 3. The screw shaft 5 of a ball screw is directly connected to a driving motor 4, and piezoelectric element 7 is fixed to a ball screw nut 6 threadedly engaged with the screw shaft 5 and is interposed between the push plate 8 of the slide table 1 and the ball screw nut 6. The positioning is made by moving the slide table 1 at a long stroke with the ball screw used, and by slightly transferring the slide table 1 with an electric field applied to the piezoelectric element 7.

36. 发明专利

JPH02279848A ROTARY LIFTABLE UNIT TYPE HOUSE 失效
公开(公告)号：JPH02279848A
公开(公告)日：1990-11-15
申请号：JP9941489
申请日：1989-04-19
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： YAMAMURA MASAMICHI , NAKANO FUMIYASU , HIRUMA JUNKO , YAMAMOTO MASAKI , SAKAMAKI ERI , NISHIOKA MASAKI
IPC分类号： E04B1/346 , E04H1/02
摘要： PURPOSE:To easily turn a lighting face and transfer a lookout platform of a room, by connecting a plurality of unit type house on a circular rail to place them transferably and also to make the upper part of the house movable verti cally up and down. CONSTITUTION:Circular rails 1, 2 are laid around an inner court as the center and thereon a plurality of unit type houses 4, 5 are transferably placed via wheels 14. Respective unit houses 4, 5 are connected by joints 8, 11. And further, second floor 13, 20 are placed by a lifting equipment 18 to be vertically movable. And the direction of the house can be turned according to the movement of the sun and the outlook view can be improved by raising the second floor. In this way, even in an over-crowded area of houses, houses for a comfortable living can be obtained.

37. 发明专利

JPH02155222A X-RAY EXPOSURE SYSTEM 失效
公开(公告)号：JPH02155222A
公开(公告)日：1990-06-14
申请号：JP30946388
申请日：1988-12-07
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： AOKI SHINICHIRO , SATO TAKEO , YAMAGUCHI KATSUMASA , YAMAMOTO MASAKI
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To enable sufficient exposure even under an X-ray source, and to improve yield on manufacture by measuring the quantity of X-rays received by an X-ray quantity monitor arranged outside an exposure region in an X-ray passage region between an exposure shutter capable of being opened and closed to an X-ray mask and the X-ray mask and controlling the opening and closing of the exposure shutter. CONSTITUTION:An X-ray mask 1 and a wafer 3 are disposed at the positions of exposure on a mask stage 2 and a wafer stage 4 by a conveyor respectively. A controller 11 controls a shutter drive section 8, and opens an exposure shutter 7. Consequently, the pattern of the X-ray mask 1 is baked onto the wafer 3 by X-rays 6 directed from an X-ray source 5. X-rays 6 are received by an X-ray quantity monitor 9 located in the passage region of X-rays and arranged outside an exposure region during that time, a measuring section 10 measures the quantity of the X-rays 6, and transmits the data to the controller 11, and the controller 11 integrates the quantity of X-rays 6 on the basis of the data, and controls the shutter drive section 8 when the quantity of X-rays 6 reaches the quantity of X-rays required for exposure, and closes the exposure shutter 7.

38. 发明专利

JP2006123014A Inverted two-wheel traveling robot 审中-公开
标题翻译：反转双轮行走机器人
公开(公告)号：JP2006123014A
公开(公告)日：2006-05-18
申请号：JP2004310885
申请日：2004-10-26
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： YAMAMOTO MASAKI , ADACHI YUJI , OKAZAKI YASUNAO
IPC分类号： B25J5/00
摘要： PROBLEM TO BE SOLVED: To provide an inverted two-wheel traveling robot realizing an intuitive interface for causing autonomous operations by positively utilizing compliance of a machine body to posture change. SOLUTION: A cutting head replaceable cutting tool has: an unstable machine body 3; a posture sensor 4; actuators 2a, 2b for generating force to hold a posture; a posture control part 7 for stabilizing the posture; a posture variation detecting part 13 for determining intention of a human from the change of the posture sensor; and an operation control part 9 for deciding an operation mode from the output of the posture variation detecting part 13. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种反转两轮行进机器人，其通过积极地利用机体对姿势变化的顺应性而实现用于引起自主操作的直观界面。
解决方案：切割头可更换切削刀具具有：不稳定的机体3; 姿势传感器4; 用于产生保持姿势的力的致动器2a，2b; 用于稳定姿势的姿势控制部7; 姿势变化检测部13，用于根据姿势传感器的变化来判定人的意图; 以及用于根据姿势变化检测部分13的输出来确定操作模式的操作控制部分9.（C）2006，JPO＆NCIPI

39. 发明专利

JP2005230949A Multi-degree-of-freedom joint driving mechanism 审中-公开
标题翻译：多自由联合驾驶机制
公开(公告)号：JP2005230949A
公开(公告)日：2005-09-02
申请号：JP2004041325
申请日：2004-02-18
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： OKAZAKI YASUNAO , YAMAMOTO MASAKI
IPC分类号： B25J17/00 , F16D3/06 , F16D3/40 , F16H21/48
摘要： PROBLEM TO BE SOLVED: To provide a multi-degree-of-freedom joint driving mechanism with a small number of components capable of realizing the miniaturization and weight reduction.
SOLUTION: A first rotating joint 5 is arranged to a first structure 1. A second rotating joint 7 is arranged to a second structure 2 connected with the first structure 1 by the first rotating joint 5. The first rotating joint 5 and a rotating shaft are nearly perpendicular to each other. The second structure 2 and a third structure 3 are connected by the second rotating joint 7. The first rotating joint 5 is driven by a first driving device 8-1 connected to the first structure 1 and the second structure 2. A first universal joint 14 is connected to the third structure 3. A direct acting joint 15 and a second universal joint 16 are connected. The second rotating joint 7 is driven by a second driving device 10-1 connected to the first structure 1 and the second universal joint 16.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够实现小型化和轻量化的少量部件的多自由度关节驱动机构。解决方案：第一旋转接头5布置到第一结构1.第二旋转接头7被布置到通过第一旋转接头5与第一结构1连接的第二结构2.第一旋转接头5和旋转轴几乎彼此垂直。第二结构2和第三结构3通过第二旋转接头7连接。第一旋转接头5由连接到第一结构1和第二结构2的第一驱动装置8-1驱动。第一万向接头14 连接到第三结构3.连接直动接头15和第二万向接头16。第二旋转接头7由连接到第一结构1和第二万向节16的第二驱动装置10-1驱动。版权所有（C）2005，JPO＆NCIPI

40. 发明专利

JP2005069392A Elastic expansion/contraction structure 有权
标题翻译：弹性扩展/承包结构
公开(公告)号：JP2005069392A
公开(公告)日：2005-03-17
申请号：JP2003301046
申请日：2003-08-26
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： ADACHI YUJI , OKAZAKI YASUNAO , YAMAMOTO MASAKI
IPC分类号： B25J19/00 , F15B15/10
摘要： PROBLEM TO BE SOLVED: To provide an elastic expansion/contraction structure having flexibility and capable of increasing a displacement rate. SOLUTION: One end surface of a cylindrical outside hollow expansion elastic body 1 having an internal space 12 is fixed for seal by sealing members 10a and 10b, and the other end of the elastic body 1 is fixed and sealed by projecting sealing means 7a-7d to be inserted into the internal space of the elastic body, and fluid is filled and discharged in/from the internal space a of the elastic body through fluid filling/discharging passages 11a and 11b, and the fluid filling/discharging passages are connected in series to the internal space of the elastic body outside thereof through the projecting sealing means, and the whole or a part of the inside hollow expansion elastic body 4 is arranged outside and inside the elastic body. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供具有柔性并能够提高位移率的弹性膨胀/收缩结构。解决方案：具有内部空间12的圆柱形外部中空膨胀弹性体1的一个端面通过密封构件10a和10b固定用于密封，并且弹性体1的另一端通过突出的密封装置 7a-7d插入到弹性体的内部空间中，并且流体通过流体填充/排出通道11a和11b从弹性体的内部空间a填充并排出，并且流体填充/排出通道通过突出的密封装置与弹性体的外部的内部空间串联连接，并且内侧中空膨胀弹性体4的全部或一部分配置在弹性体的外部和内部。版权所有（C）2005，JPO＆NCIPI

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