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    • 39. 发明申请
    • BODY CAPACITOR FOR SOI MEMORY
    • 用于SOI存储器的身体电容器
    • US20070202637A1
    • 2007-08-30
    • US11742147
    • 2007-04-30
    • Jack MandelmanLouis HsuRajiv Joshi
    • Jack MandelmanLouis HsuRajiv Joshi
    • H01L21/84
    • H01L21/84H01L27/108H01L27/10832H01L27/10858H01L27/1203H01L29/94
    • A semiconductor structure having a body capacitance plate, which is formed with a process that assures that the body capacitance plate is self-aligned to both the source line (SL) diffusion and the bitline diffusion is provided. Thus the amount of overlap between the SL and the bitline diffusions and the body capacitance plate is precisely controlled. More specifically, the present invention forms the structure of a 1T-capacitorless SOI body charge storage cell having sidewall capacitor plates using a process that assures that there is 1) minimal overlap between plate and source/drain diffusions, and 2) that the minimal overlap obtained in the present invention is precisely controlled and is not subject to alignment tolerances. The inventive cell results in larger signal margin, improved performance, smaller chip size, and reduced dynamic power dissipation relative to the prior art.
    • 提供一种具有体电容板的半导体结构,其形成有确保体电容板与源极线(SL)扩散和位线扩散两者自对准的工艺。 因此,SL和位线扩散和体电容板之间的重叠量被精确地控制。 更具体地说,本发明通过使用确保存在1)板和源极/漏极扩散之间的最小重叠的过程形成具有侧壁电容器板的1T无电容的SOI体电荷存储单元的结构,以及2)最小重叠 在本发明中获得的精确控制并且不受对准公差的影响。 与现有技术相比,本发明的电池产生更大的信号余量,改善的性能,更小的芯片尺寸和降低的动态功耗。