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31. 发明授权

US08033159B2 Sensor and operating method for detecting soot 有权
标题翻译：用于检测烟灰的传感器和操作方法
公开(公告)号：US08033159B2
公开(公告)日：2011-10-11
申请号：US11988125
申请日：2006-06-27
申请人： Maximilian Fleischer , Roland Pohle , Kerstin Wiesner
发明人： Maximilian Fleischer , Roland Pohle , Kerstin Wiesner
IPC分类号： G01N37/00
CPC分类号： G01N15/0656 , F02D41/1466 , G01N27/04
摘要： The invention relates to a sensor and a method for detecting soot, said method comprising the following steps: a first operating temperature is set on the sensor for a measuring phase, such that soot can be deposited on the surface of the substrate, but depositions interfering with the measurement of the soot are prevented; the time between the beginning of the measurement and the increase in conductivity between the electrodes is recorded; and a second operating temperature is set on the sensor for a regeneration phase, such that the deposited soot is burned with the oxygen in the test gas. The inventive product is a soot sensor for using in the automobile industry.
摘要翻译：本发明涉及一种用于检测烟灰的传感器和方法，所述方法包括以下步骤：在传感器上设置第一操作温度用于测量阶段，使得烟灰可以沉积在衬底的表面上，但沉积物干涉防止烟灰的测量; 记录测量开始和电极间电导率增加之间的时间; 并且在传感器上设置第二工作温度用于再生阶段，使得沉积的烟灰与测试气体中的氧气一起燃烧。本发明的产品是用于在汽车工业中使用的烟灰传感器。

32. 发明授权

US07707869B2 FET-based gas sensor 有权
标题翻译：基于FET的气体传感器
公开(公告)号：US07707869B2
公开(公告)日：2010-05-04
申请号：US11587172
申请日：2005-04-21
申请人： Maximilian Fleischer , Hans Meixner , Elfriede Simon , Uwe Lampe , Roland Pohle
发明人： Maximilian Fleischer , Hans Meixner , Elfriede Simon , Uwe Lampe , Roland Pohle
IPC分类号： G01N33/00 , B01L5/00
CPC分类号： G01N33/0013 , G01N27/4143
摘要： An operating method is disclosed for the selective detection of a target gas in a gas mixture to be measured by a field effect transistor with a gas-sensitive layer disposed on a carrier substrate, wherein the gas mixture to be measured is prepared by an electrochemical element such that the measured gas mixture includes minimal amounts of interfering gases that interfere with the measurement of the target gas, and/or at least one target gas is activated such that it is detected by the gas-sensitive layer.
摘要翻译：公开了一种操作方法，用于选择性地检测待由气体敏感层设置在载体基底上的场效应晶体管测量的气体混合物中的目标气体，其中待测量的气体混合物由电化学元素使得测量的气体混合物包括干扰目标气体测量的最小量的干扰气体，和/或至少一个目标气体被激活，使得其被气敏层检测到。

33. 发明申请

US20090126458A1 Sensor and Operating Method for Detecting Soot 有权
标题翻译：用于检测烟灰的传感器和操作方法
公开(公告)号：US20090126458A1
公开(公告)日：2009-05-21
申请号：US11988125
申请日：2006-06-27
申请人： Maximilian Fleischer , Roland Pohle , Kerstin Wiesner
发明人： Maximilian Fleischer , Roland Pohle , Kerstin Wiesner
IPC分类号： G01N27/04
CPC分类号： G01N15/0656 , F02D41/1466 , G01N27/04
摘要： The invention relates to a sensor and a method for detecting soot, said method comprising the following steps: a first operating temperature is set on the sensor for a measuring phase, such that soot can be deposited on the surface of the substrate, but depositions interfering with the measurement of the soot are prevented; the time between the beginning of the measurement and the increase in conductivity between the electrodes is recorded; and a second operating temperature is set on the sensor for a regeneration phase, such that the deposited soot is burned with the oxygen in the test gas. The inventive product is a soot sensor for using in the automobile industry.
摘要翻译：本发明涉及一种用于检测烟灰的传感器和方法，所述方法包括以下步骤：在传感器上设置第一操作温度用于测量阶段，使得烟炱可以沉积在衬底的表面上，但沉积物干涉防止烟灰的测量; 记录测量开始和电极间电导率增加之间的时间; 并且在传感器上设置第二工作温度用于再生阶段，使得沉积的烟灰与测试气体中的氧气一起燃烧。本发明的产品是用于在汽车工业中使用的烟灰传感器。

34. 发明授权

US07459732B2 Gas-sensitive field-effect transistor with air gap 失效
标题翻译：具有气隙的气敏场效应晶体管
公开(公告)号：US07459732B2
公开(公告)日：2008-12-02
申请号：US11396243
申请日：2006-03-31
申请人： Maximilian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Ralf Schneider , Elfriede Simon
发明人： Maximilian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Ralf Schneider , Elfriede Simon
IPC分类号： H01L27/108
CPC分类号： G01N27/002 , G01N27/414
摘要： A gas-sensitive field-effect transistor may be formed from a substrate with a gas-sensitive layer and a transistor processed separately and then assembled. The substrate may be patterned to form spacers by which the height of an air gap between the transistor and the sensitive layer may be adjustable to a relatively precise degree. Formation of the spacers can be achieved by patterning the substrate using material-removal techniques. The height of the spacers may be adjusted in the layer thickness of the gas-sensitive layer and for the transistor fabricated using a CMOS process. Suitable techniques for producing recesses between the spacers include, for example, polishing, cutting, sandblasting, lithographic dry etching, or wet-chemical etching. Suitable materials for the substrate may include, for example, glass, ceramic, aluminum oxide, silicon, or a dimensionally stable polymer. Following preparation of the substrate and the transistor, the two elements of the transistor are joined, for example, using flip-chip methods or adhesive-bonding technology.
摘要翻译：气体敏感场效应晶体管可以由具有气体敏感层的衬底和分开处理的晶体管形成，然后组装。衬底可以被图案化以形成间隔物，通过该间隔物，晶体管和敏感层之间的气隙的高度可以相对精确地调节。可以通过使用材料去除技术对衬底进行图案化来实现间隔物的形成。间隔物的高度可以在气敏层的层厚度和使用CMOS工艺制造的晶体管中进行调整。用于在间隔件之间产生凹槽的合适技术包括例如抛光，切割，喷砂，光刻干蚀刻或湿法化学蚀刻。用于基材的合适材料可以包括例如玻璃，陶瓷，氧化铝，硅或尺寸稳定的聚合物。在准备衬底和晶体管之后，晶体管的两个元件例如使用倒装芯片方法或粘接技术连接。

35. 发明申请

US20080011053A1 Soot sensor and operating method 审中-公开
标题翻译：烟灰传感器和操作方法
公开(公告)号：US20080011053A1
公开(公告)日：2008-01-17
申请号：US11827029
申请日：2007-07-10
申请人： Maximilian Fleischer , Roland Pohle , Kerstin Wiesner
发明人： Maximilian Fleischer , Roland Pohle , Kerstin Wiesner
IPC分类号： G01N33/00 , G01N29/02
CPC分类号： G01N29/12 , G01N2291/0217 , G01N2291/0423 , G01N2291/0427
摘要： A soot sensor includes a plurality of sensor elements including a base body having at least a part that is excitable to produce mechanical oscillations, the base body having at least one defined surface having predefined catalytic properties and subjected to a measurement gas, and a heating element acting on said base body, wherein a change in an oscillation frequency, an oscillation amplitude or the quality of the oscillation which has occurred due to increasing precipitation of soot on the defined surface indicates the presence of soot.
摘要翻译：烟炱传感器包括多个传感器元件，其包括具有至少一部分可激发以产生机械振荡的基体，所述基体具有至少一个具有预定催化特性且经受测量气体的限定表面，以及加热元件作用在所述基体上，其中由于在限定表面上的烟灰的沉淀增加而发生的振荡频率，振荡幅度或振荡质量的变化表示烟灰的存在。

36. 发明申请

US20060260737A1 Gas-sensitive field-effect transistor with air gap 失效
标题翻译：具有气隙的气敏场效应晶体管
公开(公告)号：US20060260737A1
公开(公告)日：2006-11-23
申请号：US11396243
申请日：2006-03-31
申请人： Maximilian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Ralf Schneider , Elfriede Simon
发明人： Maximilian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Ralf Schneider , Elfriede Simon
IPC分类号： B32B37/00
CPC分类号： G01N27/002 , G01N27/414
摘要： A gas-sensitive field-effect transistor may be formed from a substrate with a gas-sensitive layer and a transistor processed separately and then assembled. The substrate may be patterned to form spacers by which the height of an air gap between the transistor and the sensitive layer may be adjustable to a relatively precise degree. Formation of the spacers can be achieved by patterning the substrate using material-removal techniques. The height of the spacers may be adjusted in the layer thickness of the gas-sensitive layer and for the transistor fabricated using a CMOS process. Suitable techniques for producing recesses between the spacers include, for example, polishing, cutting, sandblasting, lithographic dry etching, or wet-chemical etching. Suitable materials for the substrate may include, for example, glass, ceramic, aluminum oxide, silicon, or a dimensionally stable polymer. Following preparation of the substrate and the transistor, the two elements of the transistor are joined, for example, using flip-chip methods or adhesive-bonding technology.
摘要翻译：气体敏感场效应晶体管可以由具有气体敏感层的衬底和分开处理的晶体管形成，然后组装。衬底可以被图案化以形成间隔物，通过该间隔物，晶体管和敏感层之间的气隙的高度可以相对精确地调节。可以通过使用材料去除技术对衬底进行图案化来实现间隔物的形成。间隔物的高度可以在气敏层的层厚度和使用CMOS工艺制造的晶体管中进行调整。用于在间隔件之间产生凹槽的合适技术包括例如抛光，切割，喷砂，光刻干蚀刻或湿法化学蚀刻。用于基材的合适材料可以包括例如玻璃，陶瓷，氧化铝，硅或尺寸稳定的聚合物。在准备衬底和晶体管之后，晶体管的两个元件例如使用倒装芯片方法或粘接技术连接。

37. 发明申请

US20080016949A1 Method For Measuring Gases And/Or Minimizing Cross-Sensitivities In Fet-Based Gas Sensors 有权
标题翻译：用于测量气体和/或最小化基于气体传感器的交叉敏感性的方法
公开(公告)号：US20080016949A1
公开(公告)日：2008-01-24
申请号：US11587173
申请日：2005-04-22
申请人： Maximillian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Elfriede Simon
发明人： Maximillian Fleischer , Uwe Lampe , Hans Meixner , Roland Pohle , Elfriede Simon
IPC分类号： G01N7/00 , G01N33/00
CPC分类号： G01N27/4143 , G01N33/006
摘要： A gas sensor based on a field effect transistor (“FET”) evaluates both a change in work function of a gas-sensitive layer of the FET and a change in the capacitance of the layer. Thus, two physically independent signals are read from the gas-sensitive layer, each signal representing a sensitivity to a different gas. This reduces the effect of cross-sensitivities; that is, of one gas on the target gas. The underlying physical mechanisms, the first causing a change in the work function in a reaction with gases and the second causing a change in the capacitance of the sensitive layer, are widely different. Because of this, the two parameters demonstrate different gas sensitivities. If the reactions to both gases are known, the effect of the interfering gas on the sensor signal can be compensated for, and with this the concentration of the target gas can be determined.
摘要翻译：基于场效应晶体管（“FET”）的气体传感器评估FET的气敏层的功函数变化和层的电容变化。因此，从气体敏感层读取两个物理独立的信号，每个信号表示对不同气体的敏感性。这降低了交叉敏感性的影响; 也就是目标气体上的一种气体。潜在的物理机制，首先引起与气体反应的功函数的变化，第二个导致敏感层的电容变化的物理机制是不同的。因此，这两个参数表现出不同的气体敏感性。如果对两种气体的反应是已知的，则可以补偿干扰气体对传感器信号的影响，并且可以确定目标气体的浓度。

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