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    • 33. 发明授权
    • Semiconductor microactuator with an improved platform structure and method of forming the same
    • 具有改进的平台结构的半导体微致动器及其形成方法
    • US06265806B1
    • 2001-07-24
    • US09317638
    • 1999-05-25
    • Kenichiro Suzuki
    • Kenichiro Suzuki
    • H02N100
    • H02N1/008
    • A microactuator with a platform mounted to a movable part of the microactuator, where at least a part of the platform includes at least a dielectric material so that the platform has a smaller dielectric constant than metals. More particularly, the microactuator includes a semiconductor substrate, a stator fixed to the semiconductor substrate where the stator has a stator electrode, a movable part floated from the stator and the semiconductor substrate where the movable part has a movable electode, a plurality of contacts which are in contact with parts of the platform and the movable electrode, and a platform on the contacts so that the platform is fixed to the movabled electrode through the contacts. At least a part of the platform includes a dielectric material to reduce an interaction of the platform with the electrodes when the electrodes are interacting with each other to move the movable part.
    • 一种微型致动器,其具有安装到所述微致动器的可移动部分的平台,其中所述平台的至少一部分至少包括介电材料,使得所述平台具有比金属更小的介电常数。 更具体地说,微致动器包括半导体衬底,固定到半导体衬底的定子,其中定子具有定子电极,从定子浮动的可移动部分和可移动部件具有可移动电极的半导体衬底,多个触点 与平台和可动电极的部件接触,以及触点上的平台,使得平台通过触点固定到移动电极。 平台的至少一部分包括电介质材料,以在电极彼此相互作用以移动可移动部件时减小平台与电极的相互作用。