会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 33. 发明授权
    • Substrate treatment apparatus
    • 基板处理装置
    • US08033288B2
    • 2011-10-11
    • US12043561
    • 2008-03-06
    • Akio ShiomiYoshihiro NishinaToru SatoRyo Muramoto
    • Akio ShiomiYoshihiro NishinaToru SatoRyo Muramoto
    • B08B3/04
    • H01L21/67781H01L21/67075H01L21/67766Y10S134/902
    • A substrate treatment apparatus includes a container holder which holds a container for containing multiple substrates vertically stacked in horizontal postures, a substrate treatment section which collectively applies treatment to multiple substrates horizontally stacked in vertical postures, a main conveyance mechanism which conveys multiple substrates horizontally stacked in vertical postures between a substrate delivery position and the substrate treatment section, a carrying in/out mechanism which carries in/out the multiple substrates with respect to the container and changes postures of the multiple substrates between the horizontal postures and the vertical postures, and a sub conveyance mechanism which receives and delivers multiple substrates in vertical postures from and to the carrying in/out mechanism at a transfer position, receives and delivers multiple substrates in vertical postures from and to the main conveyance mechanism at the substrate delivery position, and conveys multiple substrates in vertical postures between the transfer and substrate delivery positions.
    • 基板处理装置包括:容器保持器,其容纳用于容纳垂直堆叠在水平姿势中的多个基板的容器;基板处理部,其对垂直方向上水平堆叠的多个基板进行处理;主输送机构,其将多个基板水平地堆叠在 在基板输送位置和基板处理部之间的垂直姿势,相对于容器进出多个基板的搬入/退出机构,并且在水平姿势和垂直姿势之间改变多个基板的姿势,以及 在传送位置从承载/离开机构接收和传送垂直姿势的多个基板的副传送机构,在基板传送位置处从主传送机构接收并传送多个基板至主传送机构的垂直姿势,并且传送 在转移和底物递送位置之间的垂直姿势中具有多个基底。
    • 37. 发明申请
    • External covering body for construction and equipment for manufacturing the body
    • 建筑外部覆盖物和身体制造设备
    • US20060156669A1
    • 2006-07-20
    • US10532342
    • 2003-10-23
    • Tadashi FukuharaKeiichi KazamaToru SatoMasahiro Washio
    • Tadashi FukuharaKeiichi KazamaToru SatoMasahiro Washio
    • E04D1/00
    • E04D15/07E04D3/30E04D3/363E04D3/38E04D3/40
    • The present invention provides an outer surrounding body such as a roof, wall or the like which has good waterproofing and water-tightness in the connection locations between construction sheets and the mounting locations of trough members, and which shows an extremely good finish and working conditions, and an apparatus for manufacturing the same. A plurality of construction sheets A in which a thin metal sheet part m1 and a synthetic resin film m2 are constructed in layer form, and each sheet consists of a main sheet 1, an overlapped part 2 which is formed on one side of this main sheet 1 in the width direction, an overlapping part 3 which is formed on the other side of the main sheet 1 in the width direction, and which can overlap with the overlapped part 2, and a fastening part 4 which is formed in a substantially flat shape from the outside end of said overlapped part 2, are disposed side by side; the overlapping parts 3 are overlapped with the overlapped parts 2 of adjacent construction sheets A, A; and an area extending from the vicinity of the outer ends of the overlapping parts 3 of both construction sheets A, A to the vicinity of the inside corner parts of the overlapped parts 2 is fused with the synthetic resin films m2, m2 via a resin welding member 8.
    • 本发明提供了一种在建筑板和槽构件的安装位置之间的连接位置中具有良好的防水性和防水性的屋顶,墙壁等的外部环绕体,并且显示出非常好的整理和工作条件 及其制造装置。 其中薄金属片部分m 1和合成树脂膜m 2 2的多个构造片A以层的形式构成,并且每个片由主片 如图1所示,在主片材1的宽度方向的一侧形成的重叠部分2,形成在主片材1的宽度方向的另一侧上并且可以与重叠的重叠部分重叠的重叠部分3 并且从所述重叠部2的外侧端部形成为大致平坦状的紧固部4并列配置, 重叠部分3与相邻的构造片A,A的重叠部分2重叠; 并且从两个构造片A,A的重叠部3的外端部附近向重叠部2的内侧角部附近延伸的区域与合成树脂膜m 2' SUB>,m 2通过树脂焊接部件8。
    • 38. 发明申请
    • Method of oxidizing member to be treated
    • 氧化待处理物质的方法
    • US20060094248A1
    • 2006-05-04
    • US10519451
    • 2003-07-07
    • Tatsuo NishitaTsukasa YonekawaKeisuke SuzukiToru Sato
    • Tatsuo NishitaTsukasa YonekawaKeisuke SuzukiToru Sato
    • H01L21/31
    • H01L21/02238H01L21/02233H01L21/02255H01L21/31658
    • A method for oxidation of an object to be processed is provided wherein an oxide film can provide favorable film quality and a laminate structure of nitride film and oxide film can be obtained by a thermal oxidation of a nitride film. In a method for oxidation of a surface of an object to be processed in a single processing container 8 which can contain a plurality of objects to be processed, at least a nitride film is exposed on said surface, and said oxidation is performed by mainly using active hydroxyl/oxygen species in a vacuum atmosphere, setting a processing pressure to 133 Pa or below, and setting a processing temperature to 400° C. or above. Under these conditions, high interplanar uniformity is maintained and oxide films with favorable film quality are obtained by oxidizing nitride films on the surfaces of a plurality of objects to be processed.
    • 提供了一种用于氧化被处理物体的方法,其中氧化物膜可以提供良好的膜质量,并且可以通过氮化物膜的热氧化获得氮化物膜和氧化物膜的层压结构。 在可以容纳多个待处理物体的单个处理容器8中对待处理物体的表面进行氧化的方法中,至少在所述表面露出氮化物膜,主要使用 活性羟基/氧物质,将处理压力设定在133Pa以下,将处理温度设定为400℃以上。 在这些条件下,通过在多个待处理物体的表面上氧化氮化物膜,维持高的晶面间均匀性,获得具有良好的膜质量的氧化物膜。
    • 40. 发明申请
    • Scroll fluid machine
    • 滚动流体机
    • US20050232799A1
    • 2005-10-20
    • US11092320
    • 2005-03-29
    • Toru Sato
    • Toru Sato
    • F04C27/00F01C1/02F01C1/063F03C4/00F04C18/00F04C18/02
    • F04C27/008
    • In a scroll fluid machine, an orbiting scroll engages with a stationary scroll to form a sealed chamber in which fluid can be compressed toward a center with revolution of the orbiting scroll with respect to the stationary scroll. An annular groove is formed near the outer circumference of the stationary scroll. A dust seal fits in the annular groove of the stationary scroll. The annular groove has almost the same width, but has a wider portion having the twice the width as the other. In the wider portion of the annular groove, the ends of the dust seal are overlapped. The overlapped surfaces are rough to engage with each other.
    • 在涡旋流体机器中,绕动涡旋件与固定涡旋件接合以形成密封腔室,在该密封腔室中,流体可以相对于静涡旋盘绕旋转涡旋件的转动朝向中心被压缩。 在固定涡卷的外周附近形成有环状的槽。 防尘密封件装配在固定涡卷的环形槽中。 环形槽具有几乎相同的宽度,但具有宽度相同宽度的两倍。 在环形槽的较宽部分中,防尘密封件的端部重叠。 重叠的表面是粗糙的,以便彼此接合。