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31. 发明申请

US20130199280A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

32. 发明授权

US08359919B2 Thermal humidity sensor 有权
标题翻译：热湿度传感器
公开(公告)号：US08359919B2
公开(公告)日：2013-01-29
申请号：US12855347
申请日：2010-08-12
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
IPC分类号： G01N27/12 , G01N27/18 , G01F1/69
CPC分类号： G01N27/18
摘要： Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.
摘要翻译：提供了一种高精度，机械坚固的热湿度传感器。本发明的热湿度传感器的检测元件1具有形成在由诸如硅或陶瓷等导热性高的材料形成的平面基板上的隔膜（桥结构）2。形成在隔膜2上的是温度检测电阻4,5,6和7以及围绕温度检测电阻器布置的加热电阻3。基于温度检测电阻4,5,6和7的输出检测湿度。因此，可以减少由于通过隔膜2的热量泄漏到平面基板而可能发生的湿度测量误差。

33. 发明申请

US20060070436A1 Heating resistance flow rate measuring apparatus 失效
标题翻译：耐热流量测量装置
公开(公告)号：US20060070436A1
公开(公告)日：2006-04-06
申请号：US11283778
申请日：2005-11-22
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , F02D41/187 , G01F1/692 , G01F1/696 , G01F1/699
摘要： A heating resistance flow rate measuring apparatus which can use a power source of an ECU in an automobile without requiring an expensive protective circuit and regulator. Heating of temperature detecting resistors themselves causes temperature changes on the windward and leeward sides, and these temperature changes depend on the amounts of heat generated by the temperature detecting resistors. The amounts of heat generated by the temperature detecting resistors depend on a voltage value of the ECU power source applied to the temperature detecting resistors, and an error is caused in a sensor output depending on a variation in the voltage of the ECU power source. Based on the finding that suppressing the amount of heat generated by the temperature detecting resistors is effective in avoiding the sensor output error caused depending on a variation in the output voltage of the ECU power source, means for suppressing the amount of heat generated by the temperature detecting resistors is disposed.
摘要翻译：一种能够在汽车中使用ECU的电源而不需要昂贵的保护电路和调节器的加热电阻流量测量装置。温度检测电阻本身的加热引起迎风侧风和背风侧的温度变化，这些温度变化取决于温度检测电阻产生的热量。由温度检测电阻器产生的热量取决于施加到温度检测电阻器的ECU电源的电压值，并且根据ECU电源的电压变化在传感器输出中引起误差。基于这样的发现，抑制由温度检测电阻产生的热量对于避免根据ECU电源的输出电压的变化而导致的传感器输出误差是有效的，用于抑制由温度产生的热量的装置设置检测电阻器。

34. 发明授权

US07010971B2 Heating resistor type flow-measuring device having a heating resistor and a thermoresistance, whose resistance value varies in response to the ambient temperature 有权
标题翻译：具有加热电阻器和耐热电阻的加热电阻器型流量测量装置，其电阻值响应于环境温度而变化
公开(公告)号：US07010971B2
公开(公告)日：2006-03-14
申请号：US10921206
申请日：2004-08-19
申请人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
发明人： Masahiro Matsumoto , Masamichi Yamada , Hiroshi Nakano , Izumi Watanabe , Keiji Hanzawa , Ryo Sato
IPC分类号： G01F1/68
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/699 , G01K7/20
摘要： A heating resistor type flow-measuring device is capable of adjusting heating temperature of a heating resistor according to the ambient temperature as well as making the initial adjustment. A heating resistor, a thermoresistance, a group of the resistors, and an amplifier constitute a bridge circuit, and leading terminals of the group of resistors are connected to one of input terminals of an amplifier for amplifying an error voltage through MOS transistors. The heating temperature of the heating resistor can be changed by selecting one of the MOS transistors and turning it on.
摘要翻译：加热电阻式流量测量装置能够根据环境温度调节加热电阻器的加热温度，并进行初始调整。加热电阻器，热电阻器，一组电阻器和放大器构成桥式电路，并且该组电阻器的引线端子连接到放大器的一个输入端子，用于通过MOS晶体管放大误差电压。可以通过选择一个MOS晶体管并将其加热来改变加热电阻器的加热温度。

35. 发明授权

US09229040B2 Disconnection detection circuit for bridge circuit and system including disconnection detecting means 有权
标题翻译：用于桥接电路的断路检测电路和包括断线检测装置的系统
公开(公告)号：US09229040B2
公开(公告)日：2016-01-05
申请号：US13806827
申请日：2011-06-21
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
IPC分类号： G01R31/02 , G01D3/08 , G01R31/28
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.
摘要翻译：在现有的桥接电路断路检测电路中，不考虑电桥输出的失调电压或温度特性劣化的事实。提供一种用于桥接电路的断开检测电路，其能够最小程度地抑制传感器的特性变化。根据本发明的用于桥接电路的断开检测电路8a包括导通装置9和10，每个导通装置9和10各自使电流从桥接电路的输出端流动到预定电位，电位差检测装置12和13各自其检测桥电路的输出端的电位与预定电位之间的电位差;以及断开检测装置14，其基于电位差检测装置的输出来检测断开。

36. 发明授权

US09134153B2 Flowmeter 有权
标题翻译：流量计
公开(公告)号：US09134153B2
公开(公告)日：2015-09-15
申请号：US14131125
申请日：2011-07-13
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/34 , G01F1/692 , G01F1/684
CPC分类号： G01F1/34 , G01F1/6845 , G01F1/692 , H01L2224/48247
摘要： A flowmeter that improves a corrosion resistance is provided.The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.
摘要翻译：提供了提高耐腐蚀性的流量计。流量计包括具有形成有加热器的隔膜的硅基板，形成在硅基板上的铝焊盘，层叠在硅基板上的有机保护膜，以及覆盖硅基板的模制树脂。隔膜具有从有机保护膜露出的露出部分，将与模制树脂粘附性高的粘合表面层合在硅基板上，并且将模制树脂与粘合膜的粘合膜设置在暴露部分和铝垫。

37. 发明申请

US20140326064A1 Thermal Type Flowmeter 有权
标题翻译：热式流量计
公开(公告)号：US20140326064A1
公开(公告)日：2014-11-06
申请号：US14359161
申请日：2012-01-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
摘要翻译：提供了一种传感器元件的污染减少的热式流量计。流量计包括：传感器元件，包括形成在薄膜部分中的加热电阻器，薄膜部分设置在形成在基板上的隔膜上; 支撑构件，用于将传感器元件定位在其上; 第二通道，其包括支撑构件的一部分并且部分地吸入通过进气管道的进气; 以及引导构件，其设置在所述支撑构件或所述传感器元件上，所述引导构件位于沿着所述次级通道中的空气流延伸并且越过所述薄膜部分的线L上，所述引导构件允许微粒沿着远离的方向被引导来自线L的细颗粒与沿着支撑构件或传感器元件的表面的空气流一起。

38. 发明授权

US08689608B2 Thermal gas sensor 有权
标题翻译：热气传感器
公开(公告)号：US08689608B2
公开(公告)日：2014-04-08
申请号：US12973376
申请日：2010-12-20
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01N25/18
CPC分类号： G01N25/18
摘要： The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member is located around a periphery of the first heating member. The first heating member is controlled to a temperature higher than a temperature to which the second heating member is controlled. The concentration of ambient gas is measured based on power applied to the first heating member.
摘要翻译：本发明提供了一种高响应性和高精度的热气传感器，其被配置为使得能够基于导热性的变化来分析气体。热气体传感器包括：具有空腔部分5的基板2，层叠在空腔部分中的薄膜支撑体6，其包括多个绝缘层8a和8b;以及第二加热构件3和第二加热构件4，在薄膜载体中的绝缘层之间。第二加热构件位于第一加热构件的周边周围。第一加热构件被控制到比第二加热构件被控制的温度高的温度。环境气体的浓度基于施加到第一加热构件的功率被测量。

39. 发明申请

US20130313675A1 Thermal Type Flowmeter 审中-公开
标题翻译：热式流量计
公开(公告)号：US20130313675A1
公开(公告)日：2013-11-28
申请号：US13984748
申请日：2011-03-02
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： H01L29/66
CPC分类号： H01L29/66992 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01F5/00
摘要： Provided is a compact thermal type flowmeter that can perform a partial thermal treatment on a sensor element portion without affecting other elements and can improve the reliability of a sensor element while improving the sensitivity of the sensor element.A thermal type flowmeter includes a hollow portion which is formed in a semiconductor substrate, a thin film portion which is formed by insulating films provided to cover the hollow portion and, a heating resistor body and a temperature-measuring resistor body which are formed between the insulating films. In a method for manufacturing the thermal type flowmeter, a thermal treatment is performed to grow a crystal grain size of the heating resistor body and a crystal grain size of the temperature-measuring resistor body by heating the thin film portion after forming the thin film portion.
摘要翻译：提供了一种紧凑型热式流量计，其可以在不影响其他元件的情况下对传感器元件部分进行部分热处理，并且可以在提高传感器元件的灵敏度的同时提高传感器元件的可靠性。一种热式流量计包括形成在半导体衬底中的中空部分，由覆盖中空部分的绝缘膜形成的薄膜部分，以及加热电阻体和温度测量电阻体，绝缘膜。在制造热式流量计的方法中，通过在形成薄膜部分之后加热薄膜部分进行热处理，以增加加热电阻体的晶粒尺寸和温度测量电阻体的晶粒尺寸。

40. 发明申请

US20130093432A1 Disconnection Detection Circuit for Bridge Circuit and System Including Disconnection Detecting Means 有权
标题翻译：用于桥接电路和包括断路检测装置的系统的断路检测电路
公开(公告)号：US20130093432A1
公开(公告)日：2013-04-18
申请号：US13806827
申请日：2011-06-21
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
IPC分类号： G01R31/02
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.
摘要翻译：在现有的桥接电路断路检测电路中，不考虑电桥输出的失调电压或温度特性劣化的事实。提供一种用于桥接电路的断开检测电路，其能够最小程度地抑制传感器的特性变化。根据本发明的用于桥接电路的断开检测电路8a包括导通装置9和10，每个导通装置9和10各自使电流从桥接电路的输出端流动到预定电位，电位差检测装置12和13各自其检测桥电路的输出端的电位与预定电位之间的电位差;以及断开检测装置14，其基于电位差检测装置的输出来检测断开。

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