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    • 31. 发明申请
    • MOCVD apparatus and method
    • MOCVD装置和方法
    • US20050014366A1
    • 2005-01-20
    • US10859190
    • 2004-06-03
    • Akihiro FujiwaraShoji Hiramatsu
    • Akihiro FujiwaraShoji Hiramatsu
    • C23C16/00C23C16/448C23C16/52H01L21/205H01L21/44H01L33/02
    • C23C16/45561C23C16/4482C23C16/52
    • An MOCVD apparatus includes a raw material supply section configured to supply a process raw material into a process chamber. The raw material supply section includes a bubbling unit that stores an organic metal raw material in a liquid state. A carrier gas line is configured to supply, into the bubbling unit, a carrier gas that causes the organic metal raw material in a liquid state to bubble up. A flow rate control portion is provided on the carrier gas line to control the carrier gas flow rate. The flow rate control portion includes a plurality of mass flow controllers, which are disposed in parallel with each other and have full-scales different from each other for flow rate control. The mass flow controllers are switched for use, in accordance with the carrier gas flow rate.
    • MOCVD装置包括:原料供给部,其构造成将处理原料供给到处理室。 原料供给部包括以液态存储有机金属原料的鼓泡部。 载气管线被配置为将有机金属原料处于液体状态的载气供应到起泡单元中。 在载气管线上设置有流量控制部,以控制载气流量。 流量控制部包括多个质量流量控制器,它们彼此并联布置,并且具有彼此不同的满量程用于流量控制。 质量流量控制器根据载气流量切换使用。
    • 32. 发明授权
    • Optical apparatus in which image distortion is removed
    • 除去图像失真的光学装置
    • US5455647A
    • 1995-10-03
    • US220466
    • 1994-03-31
    • Akihiro Fujiwara
    • Akihiro Fujiwara
    • G03B21/53G02B7/28G02B27/00G03B21/00G03B21/132H04N17/00
    • G02B27/0025G03B21/132G03B21/53H04N9/317H04N9/3194
    • An optical apparatus including an optical assembly having an image formation optical system and a device for receiving an image, said optical assembly including optical components disposed along an optical axis for projecting the image to a display surface, a detecting device for detecting each distance to a plurality of predetermined locations which are set apart from each other and for producing detection signals representing a non-orthogonal relationship between the display surface and the optical axis, and a controlling device for biasing at least one of the components included in the optical assembly in response to the detection signals thus obtained. Then, a part of such an optical assembly is driven in a direction perpendicular to the optical axis, thus making it possible to implement an optical apparatus capable of obtaining a projected image which is in focus all over the screen without distortion.
    • 一种光学装置,包括具有图像形成光学系统和用于接收图像的装置的光学组件,所述光学组件包括沿着光轴设置的用于将图像投影到显示表面的光学部件,检测装置,用于检测到 多个预定位置彼此分开并用于产生表示显示表面和光轴之间的非正交关系的检测信号;以及控制装置,用于响应于包括在光学组件中的至少一个部件 与这样获得的检测信号。 然后,这样的光学组件的一部分在垂直于光轴的方向上被驱动,从而可以实现能够获得在整个屏幕上聚焦的投影图像而不失真的光学装置。
    • 36. 发明授权
    • Projection type display apparatus
    • 投影式显示装置
    • US07303289B2
    • 2007-12-04
    • US11067078
    • 2005-02-25
    • Akihiro Fujiwara
    • Akihiro Fujiwara
    • G03B21/00G03B3/00
    • G02B26/101G03B21/26G03B21/53
    • A projection type display apparatus includes a projection portion for projecting an image onto a surface to be projected, a light receiving portion disposed apart from the projection portion by a base line length and used for detecting a reference image projected onto the surface to be projected, and a scanning portion for scanning the reference image on the surface to be projected in a direction of the base line length, in which the projection portion is focused based on information about a scanning position of the reference image upon predetermined detection with the light receiving portion. With the projection type display apparatus, a system can be configured with a simple processing circuit, and cost reduction can be realized.
    • 投影型显示装置包括用于将图像投影到要投影的表面上的突出部分,由基线长度与突出部分分开设置的光接收部分,用于检测投射到要投影的表面上的参考图像; 以及扫描部分,用于在预定检测时基于与基准图像的扫描位置有关的信息,在投影部分被聚焦的基线长度方向上扫描要投影的表面上的参考图像, 。 利用投影型显示装置,可以将系统配置成具有简单的处理电路,并且可以实现成本降低。