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    • 34. 发明申请
    • Reduced Porosity High-K Thin Film Mixed Grains for Thin Film Capacitor Applications
    • 用于薄膜电容器应用的减少孔隙率的高K薄膜混合晶粒
    • US20090316374A1
    • 2009-12-24
    • US12549325
    • 2009-08-27
    • Cengiz A. Palanduz
    • Cengiz A. Palanduz
    • H05K1/16H01G4/06
    • H01L28/56H01G4/12H01G4/1209H01L21/31691H01L2224/16225H05K1/162H05K2201/0175H05K2201/0195H05K2201/0355
    • A method including forming a layer of a first ceramic material on a substrate; and after forming the layer, forming a second ceramic material on the layer of the first ceramic material, the formed second ceramic material including an average grain size less than a grain size of the first ceramic material. An apparatus including a first electrode; a second electrode; and a sintered ceramic material, wherein the ceramic material comprises first ceramic grains defining grain boundaries therebetween and second ceramic grains having an average grain size smaller than a grain size of the first ceramic grains. A system including a device including a microprocessor, the microprocessor coupled to a circuit board through a substrate, the substrate including a capacitor structure formed on a surface, the capacitor structure including a first electrode, a second electrode, and a sintered ceramic material disposed between the first electrode and the second electrode.
    • 一种方法,包括在基板上形成第一陶瓷材料层; 在形成该层之后,在第一陶瓷材料的层上形成第二陶瓷材料,所形成的第二陶瓷材料的平均晶粒尺寸小于第一陶瓷材料的晶粒尺寸。 一种装置,包括:第一电极; 第二电极; 和烧结陶瓷材料,其中所述陶瓷材料包括在其间限定晶界的第一陶瓷晶粒和平均晶粒尺寸小于所述第一陶瓷晶粒的晶粒尺寸的第二陶瓷晶粒。 一种包括微处理器的装置,所述微处理器通过衬底耦合到电路板,所述衬底包括形成在表面上的电容器结构,所述电容器结构包括第一电极,第二电极和烧结陶瓷材料, 第一电极和第二电极。
    • 35. 发明授权
    • Thin film capacitors and methods of making the same
    • 薄膜电容器及其制造方法
    • US07547957B2
    • 2009-06-16
    • US11929788
    • 2007-10-30
    • Cengiz A. Palanduz
    • Cengiz A. Palanduz
    • H01L39/00
    • H05K1/162H01G4/1209H01G4/20H01G4/33H01L23/49822H01L2924/0002H01L2924/3011H05K2201/0175H05K2201/0195H05K2201/0326Y10T29/43Y10T29/435Y10T29/49002Y10T29/49155H01L2924/00
    • An apparatus including a first electrode; a second electrode; a first and second ceramic material disposed between the first electrode and the second electrode, the second ceramic material having a greater electrical conductivity than the first ceramic material. A method including forming a first ceramic material film and a different second ceramic material film on a first electrode; and forming a second electrode on the second ceramic material film to form a capacitor structure having the first ceramic material film and the second ceramic material film disposed between the first electrode and the second electrode, wherein the first ceramic material has a conductivity selected to dampen undesired oscillations in electrical device operation to which the capacitor structure may be exposed. An apparatus including a first electrode; a second electrode; and a composite dielectric including a plurality of dielectric films including a different Curie temperature.
    • 一种装置,包括:第一电极; 第二电极; 设置在所述第一电极和所述第二电极之间的第一和第二陶瓷材料,所述第二陶瓷材料具有比所述第一陶瓷材料更大的导电性。 一种包括在第一电极上形成第一陶瓷材料膜和不同的第二陶瓷材料膜的方法; 以及在所述第二陶瓷材料膜上形成第二电极以形成具有所述第一陶瓷材料膜并且所述第二陶瓷材料膜设置在所述第一电极和所述第二电极之间的电容器结构,其中所述第一陶瓷材料具有选择的电导率, 可能会暴露电容器结构的电气设备操作中的振荡。 一种装置,包括:第一电极; 第二电极; 以及包括具有不同居里温度的多个介电膜的复合电介质。