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31. 发明授权

US08552346B2 Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber 失效
标题翻译：用于控制处理室中的多区加热器的温度的方法和装置
公开(公告)号：US08552346B2
公开(公告)日：2013-10-08
申请号：US13113015
申请日：2011-05-20
申请人： Hari Kishore Ambal , Uwe Paul Haller , Jianhua Zhou
发明人： Hari Kishore Ambal , Uwe Paul Haller , Jianhua Zhou
IPC分类号： H05B3/06 , F26B3/06
CPC分类号： H01L21/67103 , G05D23/1932 , G05D23/22 , G05D23/2401 , H01L21/67248
摘要： Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
摘要翻译：本文提供了用于控制处理室中的多区加热器的温度的方法和装置。在一些实施例中，提供了一种控制设置在基板支撑件中的多区加热器的方法，其中多区加热器具有第一区域和第二区域。在一些实施例中，该方法可以包括测量在第一时间由第一区域绘制的电流; 测量第一个区域在第一时间段所绘制的电压; 基于在第一时间由第一区域抽取的测量的电流和电压来计算第一区域的电阻; 基于第一区的电阻和温度之间的预定关系确定第一区的温度; 以及响应于所述温度测定来调节所述第一区域的温度。

32. 发明授权

US08525417B2 Discharge electrode array for thin-film solar cell deposition 有权
标题翻译：用于薄膜太阳能电池沉积的放电电极阵列
公开(公告)号：US08525417B2
公开(公告)日：2013-09-03
申请号：US13698747
申请日：2010-10-21
申请人： Zhijian Li , Yi Li , Zhubing He , Shengming Hu , Chunzhu Wang , Jianhua Zhou
发明人： Zhijian Li , Yi Li , Zhubing He , Shengming Hu , Chunzhu Wang , Jianhua Zhou
IPC分类号： H01J1/02
CPC分类号： H01J1/02 , C23C16/517 , H01J37/32091 , H01J37/32577 , H01L31/202 , Y02E10/50 , Y02P70/521
摘要： A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.
摘要翻译：提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池沉积室的放电电极阵列。放电电极阵列包括具有矩形端部的信号馈送部件，平坦的腰部对应于位于具有屏蔽罩的阴极板的中心区域上的仰卧矩形区域中的馈入端口，连接馈入电源信号通过表面接触。电极阵列至少包括一组阴极板和阳极板，两个阴极板共享或围绕一个阳极板。可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。可以提高生产效率，降低成本。

33. 发明授权

US08438989B2 Surface feed-in electrodes for deposition of thin film solar cell and signal feed-in method thereof 有权
标题翻译：用于沉积薄膜太阳能电池的表面馈入电极及其信号馈入方法
公开(公告)号：US08438989B2
公开(公告)日：2013-05-14
申请号：US13698864
申请日：2010-10-21
申请人： Shengming Hu , Yi Li , Zhubing He , Zhijian Li , Jianhua Zhou , Chunzhu Wang
发明人： Shengming Hu , Yi Li , Zhubing He , Zhijian Li , Jianhua Zhou , Chunzhu Wang
IPC分类号： H01J1/00 , H05H1/24
CPC分类号： C23C16/505 , C23C16/24 , H01J37/32091 , H01J37/32577 , H01L31/1804 , H01L31/1824 , Y02E10/545 , Y02E10/547 , Y02P70/521
摘要： The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RF/VHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.
摘要翻译：本发明公开了一种与太阳能电池技术相关的用于薄膜太阳能电池沉积的表面馈入电极结构。表面馈入电极结构使用具有平腰和半圆形馈入端的信号馈入部件，以通过表面接触连接信号馈入端口。信号馈入端口位于阴极板背面中心的圆形圆形区域中，并馈入RF / VHF电源信号。阳极板接地。阴极板与屏蔽盖绝缘，屏蔽罩上设有通孔。其效果包括通过使用电极板中心的表面馈入，可以克服单点或多点馈入配置的馈线损耗。可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。可以提高生产效率，降低成本。

34. 发明申请

US20130063028A1 SURFACE FEED-IN ELECTRODES FOR DEPOSITION OF THIN FILM SOLAR CELL AND SIGNAL FEED-IN METHOD THEREOF 有权
标题翻译：用于沉积薄膜太阳能电池的表面馈电电极及其信号输入方法
公开(公告)号：US20130063028A1
公开(公告)日：2013-03-14
申请号：US13698864
申请日：2010-10-21
申请人： Shengming Hu , Yi Li , Zhubing He , Zhijian Li , Jianhua Zhou , Chunzhu Wang
发明人： Shengming Hu , Yi Li , Zhubing He , Zhijian Li , Jianhua Zhou , Chunzhu Wang
IPC分类号： H01J1/00 , H05H1/24
CPC分类号： C23C16/505 , C23C16/24 , H01J37/32091 , H01J37/32577 , H01L31/1804 , H01L31/1824 , Y02E10/545 , Y02E10/547 , Y02P70/521
摘要： The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RF/VHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.
摘要翻译：本发明公开了一种与太阳能电池技术相关的用于薄膜太阳能电池沉积的表面馈入电极结构。表面馈入电极结构使用具有平腰和半圆形馈入端的信号馈入部件，以通过表面接触连接信号馈入端口。信号馈入端口位于阴极板背面中心的圆形圆形区域中，并馈入RF / VHF电源信号。阳极板接地。阴极板与屏蔽盖绝缘，屏蔽罩上设有通孔。其效果包括通过使用电极板中心的表面馈入，可以克服单点或多点馈入配置的馈线损耗。可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。可以提高生产效率，降低成本。

35. 发明申请

US20130063018A1 DISCHARGE ELECTRODE ARRAY FOR THIN-FILM SOLAR CELL DEPOSITION 有权
标题翻译：放电电极阵列用于薄膜太阳能电池沉积
公开(公告)号：US20130063018A1
公开(公告)日：2013-03-14
申请号：US13698747
申请日：2010-10-21
申请人： Zhijian Li , Yi Li , Zhubing He , Shengming Hu , Chunzhu Wang , Jianhua Zhou
发明人： Zhijian Li , Yi Li , Zhubing He , Shengming Hu , Chunzhu Wang , Jianhua Zhou
IPC分类号： H01J1/02
CPC分类号： H01J1/02 , C23C16/517 , H01J37/32091 , H01J37/32577 , H01L31/202 , Y02E10/50 , Y02P70/521
摘要： A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.
摘要翻译：提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池沉积室的放电电极阵列。放电电极阵列包括具有矩形端部的信号馈送部件，平坦的腰部对应于位于具有屏蔽盖的阴极板的中心区域上的仰卧矩形区域中的馈入端口，连接馈入电源信号通过表面接触。电极阵列至少包括一组阴极板和阳极板，两个阴极板共享或围绕一个阳极板。可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。可以提高生产效率，降低成本。

36. 发明授权

US08291858B2 Movable jig for silicon-based thin film solar cell 有权
标题翻译：硅基薄膜太阳能电池移动夹具
公开(公告)号：US08291858B2
公开(公告)日：2012-10-23
申请号：US13389484
申请日：2010-10-21
申请人： Shengming Hu , Yi Li , Zhubing He , Zhijiang Li , Jianhua Zhou , Chunzhu Wang
发明人： Shengming Hu , Yi Li , Zhubing He , Zhijiang Li , Jianhua Zhou , Chunzhu Wang
IPC分类号： C23C16/59 , H01L31/18
CPC分类号： C23C16/505 , C23C16/545 , H01J37/32091 , H01J37/32577 , H01J37/32715 , H01L21/67313 , H01L21/67326 , H01L21/6734 , H01L31/18
摘要： A movable jig for a silicon-based thin film solar cell comprises parallel electrode plates (203,208), a supporting frame and a signal feed-in assembly (201). The supporting frame is a movable frame and its side frame (216) is grounded. A shield device is set on the jig or among jig arrays themselves for preventing from being disturbed. The signal feed-in assembly is a conductor and its middle portion and head portion form a ladder cylinder, and one end surface (201-1) of the signal feed-in assembly is triangular and can surface contact and connect with a sunken triangular feed-in port (203-1) in the center area of the back surface of the cathode plate (203) of the electrode plates, so the radio frequency/the very high frequency power supply signal can be fed in. Through the way of the surface feed-in in the center of the electrode plate, the consumption caused by the feeder distance in the way of one point feed-in or multipoint feed-in can be reduced, the large area stable discharge of the uniform electric field can be obtained, the production efficiency can be increased and the cost can be decreased.
摘要翻译：一种用于硅基薄膜太阳能电池的可移动夹具包括平行电极板（203,208），支撑框架和信号馈入组件（201）。支撑框架是可动框架，其侧框架（216）接地。屏蔽装置设置在夹具或夹具阵列之间，以防止被干扰。信号馈入组件是导体，其中间部分和头部形成梯形气缸，信号馈入组件的一个端面（201-1）是三角形的，并且可以与凹陷的三角形进给表面接触并连接在电极板的阴极板（203）的后表面的中心区域中的入口（203-1），从而可以馈送射频/非常高频率的电源信号。通过在电极板的中心的表面馈入可以减少由一点馈入或多点馈入的馈线距离引起的消耗，可以获得均匀电场的大面积稳定放电，可以提高生产效率，降低成本。

37. 发明申请

US20120142137A1 MOVABLE JIG FOR SILICON-BASED THIN FILM SOLAR CELL 有权
标题翻译：用于硅基薄膜太阳能电池的可移动电极
公开(公告)号：US20120142137A1
公开(公告)日：2012-06-07
申请号：US13389484
申请日：2010-10-21
申请人： Shengming Hu , Yi Li , Zhubing He , Zhijiang Li , Jianhua Zhou , Chunzhu Wang
发明人： Shengming Hu , Yi Li , Zhubing He , Zhijiang Li , Jianhua Zhou , Chunzhu Wang
IPC分类号： H01L31/18 , C23C16/458
CPC分类号： C23C16/505 , C23C16/545 , H01J37/32091 , H01J37/32577 , H01J37/32715 , H01L21/67313 , H01L21/67326 , H01L21/6734 , H01L31/18
摘要： A movable jig for a silicon-based thin film solar cell comprises parallel electrode plates (203,208), a supporting frame and a signal feed-in assembly (201). The supporting frame is a movable frame and its side frame (216) is grounded. A shield device is set on the jig or among jig arrays themselves for preventing from being disturbed. The signal feed-in assembly is a conductor and its middle portion and head portion form a ladder cylinder, and one end surface (201-1) of the signal feed-in assembly is triangular and can surface contact and connect with a sunken triangular feed-in port (203-1) in the center area of the back surface of the cathode plate (203) of the electrode plates, so the radio frequency/the very high frequency power supply signal can be fed in. Through the way of the surface feed-in in the center of the electrode plate, the consumption caused by the feeder distance in the way of one point feed-in or multipoint feed-in can be reduced, the large area stable discharge of the uniform electric field can be obtained, the production efficiency can be increased and the cost can be decreased.
摘要翻译：一种用于硅基薄膜太阳能电池的可移动夹具包括平行电极板（203,208），支撑框架和信号馈入组件（201）。支撑框架是可动框架，其侧框架（216）接地。屏蔽装置设置在夹具或夹具阵列之间，以防止被干扰。信号馈入组件是导体，其中间部分和头部形成梯形气缸，信号馈入组件的一个端面（201-1）是三角形的，并且可以与凹陷的三角形进给表面接触并连接在电极板的阴极板（203）的后表面的中心区域中的入口（203-1），从而可以馈送射频/非常高频率的电源信号。通过在电极板的中心的表面馈入可以减少由一点馈入或多点馈入的馈线距离引起的消耗，可以获得均匀电场的大面积稳定放电，可以提高生产效率，降低成本。

38. 发明授权

US07904732B2 Encrypting and decrypting database records 有权
标题翻译：加密和解密数据库记录
公开(公告)号：US07904732B2
公开(公告)日：2011-03-08
申请号：US11535978
申请日：2006-09-27
申请人： Jing Cui , Jianhua Zhou
发明人： Jing Cui , Jianhua Zhou
IPC分类号： G06F11/30 , G06F12/14 , G06F7/00 , H04L29/06
CPC分类号： G06F21/6227
摘要： Provided are a method, system, and article of manufacture for encrypting and decrypting database records. Encryption metadata is provided for a database file having fields, wherein the encryption metadata indicates at least one encryption key for the file. A request is received to perform a read or write operation with respect to a record including the fields for the database file. A determination is made from the encryption metadata of the at least one encryption key for the database file. The determined encryption key is used to encrypt or decrypt for the read or write operation with respect to at least one of the fields in the database file.
摘要翻译：提供了用于加密和解密数据库记录的方法，系统和制品。为具有字段的数据库文件提供加密元数据，其中加密元数据指示文件的至少一个加密密钥。接收到对包括数据库文件的字段的记录执行读或写操作的请求。从数据库文件的至少一个加密密钥的加密元数据确定。确定的加密密钥用于相对于数据库文件中的至少一个字段对读取或写入操作进行加密或解密。

39. 发明申请

US20110034034A1 DUAL TEMPERATURE HEATER 审中-公开
标题翻译：双温加热器
公开(公告)号：US20110034034A1
公开(公告)日：2011-02-10
申请号：US12851794
申请日：2010-08-06
申请人： Dale R. Du Bois , Juan Carlos Rocha-Alvarez , Sanjeev Baluja , Ganesh Balasubramanian , Lipyeow Yap , Jianhua Zhou , Thomas Nowak
发明人： Dale R. Du Bois , Juan Carlos Rocha-Alvarez , Sanjeev Baluja , Ganesh Balasubramanian , Lipyeow Yap , Jianhua Zhou , Thomas Nowak
IPC分类号： H01L21/46 , B05C13/00 , B23Q3/00
CPC分类号： H01L21/68 , B05C13/00 , C23C16/4585 , H01J37/32091 , H01L21/324 , H01L21/67103 , H01L21/68728 , H01L21/6875
摘要： A method and apparatus for heating a substrate in a chamber are provided. an apparatus for positioning a substrate in a processing chamber. In one embodiment, the apparatus comprises a substrate support assembly having a support surface adapted to receive the substrate and a plurality of centering members for supporting the substrate at a distance parallel to the support surface and for centering the substrate relative to a reference axis substantially perpendicular to the support surface. The plurality of the centering members are movably disposed along a periphery of the support surface, and each of the plurality of centering members comprises a first end portion for either contacting or supporting a peripheral edge of the substrate.
摘要翻译：提供了一种用于加热室中的衬底的方法和装置。用于将基板定位在处理室中的装置。在一个实施例中，该装置包括基板支撑组件，该基板支撑组件具有适于接收基板的支撑表面和用于在平行于支撑表面的距离处支撑基板的多个定心构件，并且用于使基板相对于参考轴线基本垂直到支撑面。多个定心构件沿着支撑表面的周边可移动地设置，并且多个定心构件中的每一个包括用于接触或支撑衬底的周缘的第一端部。

40. 发明授权

US06797511B1 Alarm related peptides and nucleic acids and diagnosis using them 失效
标题翻译：报警相关的肽和核酸，并使用它们进行诊断
公开(公告)号：US06797511B1
公开(公告)日：2004-09-28
申请号：US09629498
申请日：2000-07-31
申请人： Kenneth S. Kosik , Jianhua Zhou
发明人： Kenneth S. Kosik , Jianhua Zhou
IPC分类号： C12N1563
CPC分类号： C07K16/18 , A01K2217/05 , A61K38/00 , C07K14/4711 , G01N33/6896 , G01N2800/2821
摘要： We have identified a novel protein, named ALARM or &dgr;-catenin, on the basis of its ability to bind to presenilin 1. ALARM contains 4 copies of the arm repeat and is expressed almost exclusively in brain tissue.
摘要翻译：我们根据其与早老蛋白1结合的能力，鉴定了一种名为ALARM或δ-连环蛋白的新型蛋白质.ARARM包含4个拷贝的臂重复，几乎完全表达在脑组织中。

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