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32. 发明授权

US06762012B2 Method of manufacturing monolithic ink-jet printhead 失效
标题翻译：单片喷墨打印头的制造方法
公开(公告)号：US06762012B2
公开(公告)日：2004-07-13
申请号：US10287488
申请日：2002-11-05
申请人： Tae-kyun Kim , Seo-hyun Cho , Myung-song Jung , Kyong-il Kim , Sung-joon Park
发明人： Tae-kyun Kim , Seo-hyun Cho , Myung-song Jung , Kyong-il Kim , Sung-joon Park
IPC分类号： B41J216
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , G03F7/038 , G03F7/2022
摘要： A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.
摘要翻译：制造单片式喷墨打印头的方法包括：在基板的表面上形成通过加热油墨产生气泡的加热元件，以及在其上形成有加热元件的基板上涂覆预定厚度的负性光致抗蚀剂。接下来，将形成负光致抗蚀剂的墨水通道形成壁的侧壁和限制器的部分齐平地暴露于光并且使用第一光掩模进行固化，其中，在第一光掩模中，墨水腔和图像的限制器形成油墨通道。随后，使用其中形成喷嘴图案的第二光掩模将形成负光致抗蚀剂的墨通道形成壁的上壁的第二部分暴露于光，并且仅将第二部分暴露于光预定厚度。最后，使用溶剂溶解并除去负光致抗蚀剂的未固化部分。可以制造通过使用单一负性光致抗蚀剂的简化工艺来单元地形成元件的喷墨打印头。

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