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    • 32. 发明申请
    • Recessed transistor and method of manufacturing the same
    • 嵌入式晶体管及其制造方法
    • US20080185641A1
    • 2008-08-07
    • US12068179
    • 2008-02-04
    • Keun-Nam KimMakoto YoshidaChul LeeDong-Gun ParkWoun-Suck Yang
    • Keun-Nam KimMakoto YoshidaChul LeeDong-Gun ParkWoun-Suck Yang
    • H01L29/78H01L21/336
    • H01L29/66795H01L29/66621H01L29/7834H01L29/7851
    • A recessed transistor and a method of manufacturing the same are provided. The recessed transistor may include a substrate, an active pin, a gate pattern and source and drain regions. The substrate may include an isolation layer that establishes an active region and a field region of the substrate. The substrate may include a recessed structure having an upper recess formed in the active region and a lower recess in communication with the upper recess. An active pin may be formed in a region between side surfaces of the isolation layer and the lower recess and an interface between the active region and the field region. The gate pattern may include a gate insulation layer formed on an inner surface of the recessed structure and a gate electrode formed on the gate insulation layer in the recessed structure. The source/drain regions may be formed adjacent to the active region and the gate electrode.
    • 提供凹陷晶体管及其制造方法。 凹陷的晶体管可以包括衬底,有源引脚,栅极图案以及源极和漏极区域。 衬底可以包括建立衬底的有源区和场区的隔离层。 衬底可以包括具有形成在有源区域中的上凹部的凹陷结构和与上凹部连通的下凹部。 有源销可以形成在隔离层和下凹部的侧表面之间的区域中以及有源区域和场区域之间的界面。 栅极图案可以包括形成在凹陷结构的内表面上的栅极绝缘层和形成在凹陷结构中的栅极绝缘层上的栅电极。 源/漏区可以与有源区和栅电极相邻形成。